公开(公告)号：EP1272020A1

公开(公告)日：2003-01-02

申请号：EP01997979.8

申请日：2001-11-22

申请人： Murata Manufacturing Co., Ltd.

发明人： SAITOH, Yoshifumi, Murata Manufacturing Co. Ltd. ,  KAWAKAMI, Hiromichi, Murata Manufacturing Co. Ltd.

IPC分类号： H05K3/46 ,  H05K3/00 ,  B28B11/00 ,  H01L23/12 ,  B32B18/00

CPC分类号： C04B35/6264 ,  B28B11/243 ,  B28B17/0018 ,  B32B18/00 ,  B32B37/0046 ,  B32B2311/12 ,  C04B35/638 ,  C04B2235/3206 ,  C04B2235/3208 ,  C04B2235/3217 ,  C04B2235/3244 ,  C04B2235/3409 ,  C04B2235/3418 ,  C04B2235/3463 ,  C04B2235/3481 ,  C04B2235/365 ,  C04B2235/5445 ,  C04B2235/6025 ,  C04B2237/407 ,  C04B2237/56 ,  C04B2237/562 ,  C04B2237/565 ,  C04B2237/568 ,  C04B2237/64 ,  C04B2237/66 ,  C04B2237/702 ,  C04B2237/704 ,  H01L21/4807 ,  H01L21/481 ,  H01L21/4857 ,  H01L23/15 ,  H01L2924/0002 ,  H01L2924/09701 ,  H05K1/0306 ,  H05K3/0052 ,  H05K3/4611 ,  H05K3/4629 ,  H05K2201/09036 ,  H05K2201/0909 ,  H05K2203/308 ,  Y02P40/63 ,  H01L2924/00

摘要： A method of producing a ceramic multilayer substrate comprising the steps of:
as a first step, producing a green composite laminate 11 containing first and second shrink-suppressing layers formed on one main surface 13 and the other main surface 14 of a green multilayer mother substrate 12 comprising a plurality of ceramic green layers 17 containing ceramic powder, the first and second shrink-suppressing layers containing a sintering-difficult powder substantially incapable of being sintered under the sintering conditions for the ceramic powder; as a second step, forming first grooves 16 extending from the first shrink-suppressing layer 13 side so as to pass through the first shrink-suppressing layer 13 and reach a part of the multilayer mother substrate 12; as a third step, firing the composite laminate 11; as a fourth step, removing the first and second shrink-suppressing layers 13 and 14 and taking out the sintered multilayer mother substrate 11; and as a fourth step, dividing the multilayer mother substrate 12 along the grooves 16, and taking out a plurality of the ceramic multilayer substrates. Thereby, the shrink in the plan direction at firing can be suppressed. Thus, a ceramic multilayer substrate having a high dimensional accuracy and a high reliability can be produced with a high production efficiency.

摘要翻译： 一种制造陶瓷多层基板的方法，包括以下步骤：作为第一步骤，制备包含形成在绿色多层母体基板的一个主表面13和另一个主表面14上的第一和第二收缩抑制层的生坯复合层压体11 12包括多个含有陶瓷粉末的陶瓷生坯层17，第一和第二收缩抑制层含有烧结难熔粉末，其基本上不能在陶瓷粉末的烧结条件下烧结; 作为第二步骤，形成从第一收缩抑制层13侧延伸出来的第一槽16，以通过第一收缩抑制层13并到达多层母体基板12的一部分; 作为第三步骤，烧制复合层压体11; 作为第四步骤，除去第一和第二收缩抑制层13和14并取出烧结的多层母体基板11; 作为第四工序，将多层母基板12沿着槽16分割，取出多个陶瓷多层基板。 由此，能够抑制烧成时的平面方向的收缩。 因此，可以以高生产效率制造具有高尺寸精度和高可靠性的陶瓷多层基板。

公开(公告)号：EP1272020B1

公开(公告)日：2009-12-09

申请号：EP01997979.8

申请日：2001-11-22

申请人： MURATA MANUFACTURING CO., LTD.

发明人： SAITOH, Yoshifumi, Murata Manufacturing Co. Ltd. ,  KAWAKAMI, Hiromichi, Murata Manufacturing Co. Ltd.

IPC分类号： H05K3/46 ,  H05K3/00 ,  B28B11/00 ,  H01L23/12 ,  B32B18/00

CPC分类号： C04B35/6264 ,  B28B11/243 ,  B28B17/0018 ,  B32B18/00 ,  B32B37/0046 ,  B32B2311/12 ,  C04B35/638 ,  C04B2235/3206 ,  C04B2235/3208 ,  C04B2235/3217 ,  C04B2235/3244 ,  C04B2235/3409 ,  C04B2235/3418 ,  C04B2235/3463 ,  C04B2235/3481 ,  C04B2235/365 ,  C04B2235/5445 ,  C04B2235/6025 ,  C04B2237/407 ,  C04B2237/56 ,  C04B2237/562 ,  C04B2237/565 ,  C04B2237/568 ,  C04B2237/64 ,  C04B2237/66 ,  C04B2237/702 ,  C04B2237/704 ,  H01L21/4807 ,  H01L21/481 ,  H01L21/4857 ,  H01L23/15 ,  H01L2924/0002 ,  H01L2924/09701 ,  H05K1/0306 ,  H05K3/0052 ,  H05K3/4611 ,  H05K3/4629 ,  H05K2201/09036 ,  H05K2201/0909 ,  H05K2203/308 ,  Y02P40/63 ,  H01L2924/00

摘要： A method of manufacturing a ceramic multi-layer substrate, comprising a first process for manufacturing an unbaked composite laminated body (11) having a first contraction suppressing layer (13) and a second contraction suppressing layer (14) on one principal plane and the other principal plane of an unbaked multi-layer collecting substrate (12) formed of a plurality of ceramic green layers (17) stacked each other, a second process for forming cut-in grooves (16) reaching a part of the multi-layer collecting substrate (12) from the first contraction suppressing layer (13) side through the first contraction suppressing layer (13), a third process for baking the composite laminated body (11), a fourth process for removing the first and second contraction suppressing layers (13) and (14) and taking out the baked multi-layer collecting substrate (11), and a fifth process for taking out a plurality of ceramic multi-layer substrates by dividing the multi-layer collecting substrate along the cut-in grooves (16), whereby the ceramic multi-layer substrate with high dimensional accuracy and high reliability can be provided with high productivity by suppressing the contraction thereof in flat surface direction at the time of baking.