CERAMIC SUBSTRATE AND MANUFACTURING METHOD THEREFOR

    公开(公告)号:EP3413695A1

    公开(公告)日:2018-12-12

    申请号:EP16889407.9

    申请日:2016-12-07

    Abstract: A ceramic substrate (10) having a cavity which can be used for measuring the thickness of the substrate includes a plurality of stacked ceramic substrate members (1). Each of the plurality of ceramic substrate members (1) includes a via (2) reaching the other main surface from one main surface. A gap (6) is formed in each of first and second ceramic substrate members (1a, 1f) of the plurality of stacked ceramic substrate members (1) to penetrate each of the first and second ceramic substrate members (1a, 1f), the first ceramic substrate member (1a) being arranged at an outermost surface on one side in a stacking direction of the ceramic substrate members (1), the second ceramic substrate member (If) being arranged at an outermost surface on the other side opposite to the one side in the stacking direction. At least a portion of a side surface and a bottom surface within the gap (6) are covered with a protection layer (7, 8). The protection layer (7, 8) is made of a material having an etching rate lower than that of the ceramic substrate members (1).

    Measuring equipment and method for forming laminated body
    7.
    发明公开
    Measuring equipment and method for forming laminated body 有权
    计和方法,用于形成层叠体

    公开(公告)号:EP2444772A3

    公开(公告)日:2014-12-17

    申请号:EP12151253.7

    申请日:2010-10-19

    CPC classification number: G01B5/06 H01G4/12 H01G4/30 H05K3/4629

    Abstract: A method for improving an accuracy of measurement of the thickness of a green sheet, and additionally improving yield of a green sheet used for formation of a laminated body is provided. The thickness of each of a plurality of ceramic green sheets is measured, and an average and a variation of obtained thickness measurement values are checked against predetermined ranking criteria. Thereby, a ranking is performed in which the plurality of ceramic green sheets are classified into a plurality of ranks set in the ranking criteria. When forming the laminated body, only a ceramic green sheet belonging to at least one of the ranks which is in advance allowed to be used is used as a ceramic green sheet constituting each layer of the laminated body.

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