CERAMIC LAMINATE, CERAMIC INSULATING SUBSTRATE, AND METHOD FOR MANUFACTURING CERAMIC LAMINATE

    公开(公告)号:EP3418428A1

    公开(公告)日:2018-12-26

    申请号:EP17753344.5

    申请日:2017-02-17

    IPC分类号: C23C24/04 H01L23/15

    CPC分类号: C23C24/04 H01L23/15

    摘要: A ceramic laminate improving the mechanical characteristics of a composite ceramic layer which has excellent thermal fatigue resistance, thermal conductivity, and insulation ability and having excellent durability and heat dissipation and insulation ability and a ceramic insulating substrate and a method of production of a ceramic laminate are provided.
    In a cross-section perpendicular to the bonding interfaces, the average size of the second phase particles 3 is 0.02 µm to 0.3 µm and the average value of the ratio of the long axis and short axis of an equivalent ellipse when viewing a second phase particle 3 as an ellipse is 2 to 10. Further, 60% or more of the number of the second phase particles 3 has an orientation angle of 30° or less while the average orientation angle is 5° to 35°.