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公开(公告)号：EP2839933A4
公开(公告)日：2015-11-18
申请号：EP13778067
申请日：2013-04-09
申请人： NITTO DENKO CORP
发明人： MAENO YOUHEI
CPC分类号： G01N15/10 , B01L3/0289 , B01L2200/0657 , B01L2300/0838 , B01L2300/0896 , B82Y35/00 , C01B2202/06 , G01N1/04 , G01N2001/028 , G01N2001/2826 , Y10S977/953
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2.发明公开SAMPLE FIXING MEMBER FOR TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETER 审中-公开PROBENFIXIERELEMENT航空TIME二次离子质谱仪
公开(公告)号：EP2811293A4
公开(公告)日：2015-10-21
申请号：EP13743829
申请日：2013-01-29
申请人： NITTO DENKO CORP
发明人： MAENO YOUHEI
CPC分类号： H01J49/02 , C01B32/16 , G01N1/00 , H01J49/0409 , H01J49/142 , H01J49/40
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公开(公告)号：EP2811302A4
公开(公告)日：2015-12-30
申请号：EP13742917
申请日：2013-01-29
申请人： NITTO DENKO CORP
发明人： MAENO YOUHEI
IPC分类号： G01Q30/20
CPC分类号： G01Q30/20 , C01B32/16 , C01B2202/08 , Y10S977/752
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4.发明公开
公开(公告)号：EP2269951A4
公开(公告)日：2015-01-28
申请号：EP09732881
申请日：2009-03-31
申请人： NITTO DENKO CORP
发明人： MAENO YOUHEI , NAKAYAMA YOSHIKAZU , HIRAHARA KAORI
CPC分类号： B81B1/00 , B81B2203/0361 , B81C1/00206 , C09J7/00 , C09J2201/626 , Y10S977/742 , Y10S977/752 , Y10T428/249921 , Y10T428/26 , Y10T428/2913 , Y10T428/2918 , Y10T428/2973 , Y10T428/2975 , Y10T428/298
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公开(公告)号：EP2863203A4
公开(公告)日：2016-02-24
申请号：EP13806669
申请日：2013-06-12
申请人： NITTO DENKO CORP
发明人： MAENO YOUHEI , TOYOKAWA AKIKO
CPC分类号： G01N1/04 , B82Y15/00 , G01N1/2214 , G01N1/405 , G01N15/10 , Y10S977/962
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公开(公告)号：EP2330077A4
公开(公告)日：2015-08-05
申请号：EP09814370
申请日：2009-06-19
申请人： NITTO DENKO CORP
发明人： MAENO YOUHEI , NAKAYAMA YOSHIKAZU , HIRAHARA KAORI
CPC分类号： H01B1/04 , B82Y30/00 , B82Y40/00 , C01B32/168 , C01B2202/04 , C01B2202/20 , H01B1/24 , Y10S977/742 , Y10S977/752 , Y10S977/753 , Y10T428/26 , Y10T428/28 , Y10T428/2913 , Y10T428/2973 , Y10T428/2975
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7.发明公开CLEANING MEMBER, DELIVERY MEMBER WITH CLEANING FUNCTION, AND METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS 审中-公开清洁四肢，有清洗函数和方法的ABLIEFERGLIED清洁基板处理装置
公开(公告)号：EP2051289A4
公开(公告)日：2014-12-03
申请号：EP07767555
申请日：2007-06-26
申请人： NITTO DENKO CORP
发明人： TERADA YOSHIO , SUGO YUKI , YOSHIDA YOSHINORI , MAENO YOUHEI
CPC分类号： B08B1/00 , B08B7/0028 , B82Y30/00 , B82Y40/00 , C01B32/16 , C01B2202/08 , C01B2202/34 , C01B2202/36
摘要： Provided is a cleaning member capable of removing minute foreign matter, in particular foreign matter of a submicron level simply, exactly, and sufficiently without contaminating a cleaning site. Further provided is a carrying member provided with a cleaning function having the cleaning member and a method of cleaning a substrate processing equipment with the use of the cleaning member or the carrying member provided with a cleaning function. The cleaning member of the present invention includes a layer member having a plurality of protrusions of a columnar structure on a surface, in which each of the protrusions of a columnar structure has a carbon-based nanostructure.
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公开(公告)号：EP2891889A4
公开(公告)日：2016-04-13
申请号：EP13833055
申请日：2013-08-21
申请人： NITTO DENKO CORP
发明人： MAENO YOUHEI , SUZUKI YOSHINORI
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9.发明公开CLEANING MEMBER, DELIVERY MEMBER WITH CLEANING FUNCTION, AND METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS 有权清洁四肢，四肢供应带清洗功能和方法清洁基板处理装置
公开(公告)号：EP2050515A4
公开(公告)日：2012-01-18
申请号：EP07767769
申请日：2007-06-28
申请人： NITTO DENKO CORP
发明人： SUGO YUKI , TERADA YOSHIO , UENDA DAISUKE , NAMIKAWA MAKOTO , YOSHIDA YOSHINORI , MAENO YOUHEI
IPC分类号： B08B1/00 , H01L21/304
CPC分类号： H01L21/67046 , B08B1/00 , B08B7/0028 , C23C16/4407
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10.发明公开FIBROUS ROD-LIKE STRUCTURE AGGREGATES AND ADHESIVE MEMBERS WHEREIN SAME ARE USED 有权纤维状的棒状结构及责任总额的元素
公开(公告)号：EP2266921A4
公开(公告)日：2011-06-22
申请号：EP09733142
申请日：2009-03-31
申请人： NITTO DENKO CORP
发明人： MAENO YOUHEI , NAKAYAMA YOSHIKAZU , HIRAHARA KAORI
CPC分类号： B82Y40/00 , B82Y30/00 , C01B32/16 , C01B2202/04 , C01B2202/06 , C01B2202/08 , C01B2202/20 , C01B2202/34 , C09J7/00 , C09J2201/626 , Y10S977/742 , Y10S977/752 , Y10T428/249924 , Y10T428/26 , Y10T428/2913 , Y10T428/2918 , Y10T428/2973 , Y10T428/2975
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