公开(公告)号：EP2808661A1

公开(公告)日：2014-12-03

申请号：EP14170823.0

申请日：2014-06-02

申请人： Kabushiki Kaisha TOPCON

发明人： Ohtomo, Fumio ,  Kumagai, Kaoru ,  Momiuchi, Masayuki ,  Osaragi, Kazuki

IPC分类号： G01J3/28 ,  G01J3/02 ,  G01J3/36 ,  G02B27/10

CPC分类号： G01J3/2823 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/36 ,  G01J2003/123 ,  G01J2003/2826 ,  G01J2003/2853 ,  G02B26/008 ,  G02B27/1013 ,  G02B27/126

摘要： A spectral image acquiring device comprises an objective lens (3), a field aperture member (8) for limiting a size of an image passing through the objective lens and focusing, a wavelength selecting member (13) arranged on an optical axis of the objective lens, having two or more wavelength selecting surfaces and having different wavelength selection characteristics for each of the wavelength selecting surfaces, a deflecting member (5) for deflecting partial luminous fluxes passing through the wavelength selecting surface, an image pickup element (7) arranged on the optical axis of the objective lens, and an image forming lens (6) for focusing the partial luminous fluxes deflected by the deflecting member on the image pickup element for each of the partial luminous fluxes.

摘要翻译： 一种光谱图像获取装置，包括物镜（3），用于限制通过物镜的图像的尺寸并聚焦的场开口构件（8），设置在物镜的光轴上的波长选择构件（13） 透镜，具有两个或更多个波长选择表面并且对于每个波长选择表面具有不同的波长选择特性;偏转部件（5），用于偏转穿过波长选择表面的部分光通量;图像拾取元件（7），布置在 物镜的光轴和成像透镜（6），用于针对每个部分光通量将由偏转部件偏转的部分光通量聚焦在图像拾取元件上。

公开(公告)号：EP3312577A1

公开(公告)日：2018-04-25

申请号：EP17163048.6

申请日：2017-03-27

申请人： Samsung Electronics Co., Ltd.

发明人： BAE, Sang Kon ,  PARK, Yun S ,  LEE, So Young

IPC分类号： G01J3/28 ,  G01J3/02

CPC分类号： G01J3/457 ,  G01J3/027 ,  G01J3/28 ,  G01J2003/2853 ,  G06F17/18

摘要： An apparatus and method for monitoring a stability of a spectrum are provided. The apparatus for monitoring stability of a spectrum includes a spectroscope configured to measure a spectrum of a sample and a processor configured to calculate a similarity change index of the measured spectrum and to determine the stability of the measured spectrum by analyzing the calculated similarity change index.

摘要翻译： 提供了一种监测频谱稳定性的设备和方法。 用于监测光谱稳定性的设备包括配置为测量样品的光谱的分光镜和配置成计算测量光谱的相似性变化指数并通过分析计算的相似性变化指数确定测量光谱的稳定性的处理器。

公开(公告)号：EP0352923A1

公开(公告)日：1990-01-31

申请号：EP89306879.1

申请日：1989-07-06

申请人： BAXTER INTERNATIONAL INC. (a Delaware corporation)

发明人： Cross, Klaus

IPC分类号： A61B5/00 ,  G01N21/31

CPC分类号： A61B5/14551 ,  A61B5/7239 ,  G01J3/433 ,  G01J2003/123 ,  G01J2003/2853 ,  G01J2003/4332 ,  G01N21/31 ,  G01N2021/3144 ,  G01N2201/0826

摘要： A continuous spectrum of light (10) in a selected wavelength (12) band is transmitted through selected tissue. The spectral distribution of light transmitted through the selected tissue is monitored and differentiated (36) with respect to wavelength. The differentiated spectral data is processed (38) to determine the oxygen saturation in the tissue. The spectral data may be digitized (34) and stored in a storage device (33) that correlates the transmitted intensity with the wavelength. The intensity values for a predetermined number of spectra may be averaged (35) to smooth the spectral data. The first derivative of the averaged spectral data is then determined at predetermined wavelengths and processed (38) with an algorithm to determine the oxygen saturation.

摘要翻译： 所选波长（12）带中的连续光谱（10）被透过选定的组织。 通过选择的组织透射的光的光谱分布被监测并且相对于波长被区分（36）。 处理差分光谱数据（38）以确定组织中的氧饱和度。 频谱数据可以被数字化（34）并存储在存储装置（33）中，其将发送的强度与波长相关联。 可以对预定数量的光谱的强度值进行平均（35）以平滑光谱数据。 然后在预定波长处确定平均光谱数据的一阶导数，并用算法处理（38）以确定氧饱和度。

公开(公告)号：EP0262140A1

公开(公告)日：1988-04-06

申请号：EP86903700.0

申请日：1986-06-12

申请人： OPSIS AB

发明人： UNEUS, Leif ,  WALLIN, Svante

IPC分类号： G01D5 ,  G01J3 ,  G01N15 ,  G01N21 ,  G01J5

CPC分类号： G01N21/25 ,  G01D5/268 ,  G01J3/42 ,  G01J5/0014 ,  G01J5/0018 ,  G01J5/601 ,  G01J2003/2853 ,  G01N15/0205

摘要： Un procédé de détermination des paramètres, en particulier la pression, la température, la concentration, le nombre de particules et la répartition granulométrique, de substances gazeuses présentes dans des processus de combustion et dans d'autres processus se déroulant à haute température, comprend l'émission d'une lumière à large bande spectrale à travers l'objet (2) de la mesure. La lumière émise à travers cet objet se divise spectralement, et la distribution spectrale de la lumière dans la plage étudiée de longueurs d'ondes est enregistrée un grand nombre de fois. Ces enregistrements se font successivement, en ce sens que la lumière spectralement divisée est balayée par rapport à un détecteur a un seul canal et si rapidement que l'intensité totale de la lumière dans toute la plage de longueurs d'onde reste constante pendant chaque enregistrement. Ensuite, la valeur moyenne des distributions spectrales est générée, et les paramètres requis sont calculés sur la base de la distribution spectrale correspondant à la valeur moyenne, de l'apparence de la distribution spectrale correspondant à la valeur moyenne et des spectres calculés ou enregistrés dans des conditions connues, utilisés dans ce calcul. Un appareil comprend des dispositifs appropriés pour appliquer ce procédé.

公开(公告)号：EP3376211A1

公开(公告)日：2018-09-19

申请号：EP17161210.4

申请日：2017-03-15

申请人： Pan, Dong-Shyogn

发明人： Pan, Dong-Shyogn

IPC分类号： G01N21/65 ,  G01J3/44 ,  G01N33/38 ,  G01N21/87 ,  G01J3/28

CPC分类号： G01N21/65 ,  G01J3/44 ,  G01J2003/2853 ,  G01J2003/2859 ,  G01J2003/2869 ,  G01N21/87 ,  G01N33/381

摘要： A method of a diamond color grading, comprising steps of :
providing a Raman spectrometer operating with a laser beam of wavelength 785 nm and total laser energy of 450 mW for an average detection of surfaces of diamonds;
six continuous scans being performed on each diamond to obtain an averaged Raman spectrum;
a spectral range of the Raman spectrometer used for data acquisition being 100-3300 cm-1 ; and
each Raman spectrum being processed by background subtraction and peak intensity normalization so as to result in a smooth baseline and calibrated intensity, from which the diamond color is capable of being graded based on a characteristic peak at 2030 cm -1 such that a stronger intensity corresponds to a much deeper yellow color which represents a much lower grade of diamond.

公开(公告)号：EP3152624A4

公开(公告)日：2018-01-24

申请号：EP15802551

申请日：2015-06-03

申请人： CYMER LLC ,  ASML NETHERLANDS BV

发明人： DUFFEY THOMAS PATRICK ,  GODFRIED HERMAN PHILIP

IPC分类号： G01J3/14 ,  G01J3/02 ,  G01J3/26 ,  G01J3/28 ,  G03F7/00 ,  G03F7/20

CPC分类号： G01J3/28 ,  G01J3/027 ,  G01J3/14 ,  G01J3/26 ,  G01J9/00 ,  G01J11/00 ,  G01J2003/2853 ,  G03F7/70041 ,  G03F7/70058 ,  G03F7/70575

摘要： A method is described for estimating a spectral feature of a pulsed light beam produced by an optical source and directed toward a wafer of a lithography apparatus. The method includes receiving a set of N optical spectra of pulses of the light beam; saving the received N optical spectra to a saved set; transforming the optical spectra in the saved set to form a set of transformed optical spectra; averaging the transformed optical spectra to form an averaged spectrum; and estimating a spectral feature of the pulsed light beam based on the averaged spectrum.

公开(公告)号：EP3152624A1

公开(公告)日：2017-04-12

申请号：EP15802551.0

申请日：2015-06-03

申请人： Cymer, LLC ,  ASML Netherlands BV

发明人： DUFFEY, Thomas Patrick ,  GODFRIED, Herman Philip

IPC分类号： G03F7/20

CPC分类号： G01J3/28 ,  G01J3/027 ,  G01J3/14 ,  G01J3/26 ,  G01J9/00 ,  G01J11/00 ,  G01J2003/2853 ,  G03F7/70041 ,  G03F7/70058 ,  G03F7/70575

摘要： A method is described for estimating a spectral feature of a pulsed light beam produced by an optical source and directed toward a wafer of a lithography apparatus. The method includes receiving a set of N optical spectra of pulses of the light beam; saving the received N optical spectra to a saved set; transforming the optical spectra in the saved set to form a set of transformed optical spectra; averaging the transformed optical spectra to form an averaged spectrum; and estimating a spectral feature of the pulsed light beam based on the averaged spectrum.

摘要翻译： 描述了一种用于估计由光源产生并指向光刻设备的晶片的脉冲光束的光谱特征的方法。 该方法包括接收光束的脉冲的一组N个光谱; 将接收到的N光谱保存到保存的集合; 转换保存集中的光谱，形成一组变换光谱; 对变换的光谱进行平均以形成平均光谱; 以及基于所述平均光谱估计所述脉冲光束的光谱特征。

公开(公告)号：EP0262140B1

公开(公告)日：1990-08-16

申请号：EP86903700.2

申请日：1986-06-12

申请人： OPSIS AB

发明人： UNEUS, Leif ,  WALLIN, Svante

IPC分类号： G01N21/27

CPC分类号： G01N21/25 ,  G01D5/268 ,  G01J3/42 ,  G01J5/0014 ,  G01J5/0018 ,  G01J5/601 ,  G01J2003/2853 ,  G01N15/0205

摘要： A method for determining parameters, especially pressure, temperature, concentration, number of particles and particle size distribution, of gaseous substances present in combustion processes and other high temperature processes, comprises transmitting spectrally broad-band light through an object (2) of measurement, spectrally dividing the light transmitted through said object, and recording the spectral distribution of the light in the studied wavelength range a large number of times. Each recording occurs sequentially in that the spectrally divided light is swept relative to a one-channel detector and for such a short time that the total light intensity of the entire wavelength range is constant during each recording. After that, the mean value of said recorded spectral distribution is generated, and the required parameters are calculated on the basis of said mean value spectral distribution, the appearance of said means value spectral distribution, as well as spectra calculated or recorded for known conditions, being utilised for said calculation. An apparatus comprises means for carrying out the method.