利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

13 条记录 (耗时 0.008 秒)

    HIGH-RESOLUTION COMPUTED TOMOGRAPHY
    1.
    发明公开
    HIGH-RESOLUTION COMPUTED TOMOGRAPHY 有权
    高分辨率计算机层析成像

    公开(公告)号：EP3035038A1

    公开(公告)日：2016-06-22

    申请号：EP16150940.1

    申请日：2014-04-02

    申请人： Illinois Tool Works Inc.

    发明人： WANG, Yuxin ,  SHARPE, Joshua ,  SCHLECHT, Joseph ,  FERLEY, Eric ,  NOEL, Julien

    IPC分类号： G01N23/04 ,  G06T3/40

    CPC分类号： G01N23/046 ,  G01N2223/419 ,  G01N2223/42 ,  G01N2223/427 ,  G06T3/4069

    摘要： An x-ray imaging system (10), such as a X-ray computerised tomographic system, may acquire a series of radiographs at different detector positions along a first translation axis or a second translation axis parallel to orientation directions of detector pixels of a radiation detector (14). In a first embodiment, the different detector positions may be separated by a distance less than a linear size of the radiation detector (14) along the first translation axis or the second translation axis, respectively. The radiographs may be assembled into a radiograph larger than each radiograph in the series of radiographs, resulting in image stitching. In a second embodiment, the different detector positions may be separated by a distance less than a pixel size of the radiation detector (14), also referred as sub-pixel shifting of the detector. The radiographs may be assembled to form a radiograph with a higher resolution than the acquired radiographs, resulting in superresolution.

    摘要翻译： 诸如X射线计算机化断层摄影系统的X射线成像系统（10）可以沿着平行于辐射的探测器像素的定向方向的第一平移轴线或第二平移轴线在不同的探测器位置处获取一系列射线照片 检测器（14）。 在第一实施例中，不同的检测器位置可以分别沿着第一平移轴线或第二平移轴线分开小于辐射检测器（14）的线性尺寸的距离。 可将X光片组装成比X光片系列中的每个X光片更大的X光片，从而产生图像缝合。 在第二实施例中，不同的检测器位置可以间隔小于辐射检测器（14）的像素尺寸的距离，也称为检测器的子像素移位。 射线照片可以被组装以形成具有比获取的射线照片更高分辨率的射线照片，导致超分辨率。

    Thermal wave imaging
    3.
    发明公开
    Thermal wave imaging 失效
    Verfahren zur Abbildung einerWärmewelle。

    公开(公告)号：EP0150384A2

    公开(公告)日：1985-08-07

    申请号：EP84115241.6

    申请日：1984-12-14

    申请人： International Business Machines Corporation

    发明人： Baumann, Thomas ,  Dacol, Frank Hubert ,  Melcher, Robert Lee

    IPC分类号： G01N25/00 ,  G01N21/17 ,  G01N23/225 ,  G01J5/08

    CPC分类号： G01N25/72 ,  G01N23/22 ,  G01N2223/07 ,  G01N2223/073 ,  G01N2223/102 ,  G01N2223/306 ,  G01N2223/3302 ,  G01N2223/348 ,  G01N2223/40 ,  G01N2223/401 ,  G01N2223/418 ,  G01N2223/427 ,  G01N2223/509 ,  G01N2223/629 ,  G01N2223/651

    摘要： An electron energy beam (28) discontinuously scans a sample (32) and at each scan position produces a thermal wave in the sample, there being infrared radiation emitted from the thermal wave. All of the infrared radiation emitted from the heated areas of the sample is collected by an ellipsoidal collector (34) and directed by reflection to an infrared detector (44), the sample and detector being at the foci of the collector (34), to give a two-dimensional image of the sample. A computer system (52) is used to control data acquisition, storage, processing and image display, and also modulation and scanning of the beam (28). Surface, on the surface, and sub-surface structure of the sample can be detected, for example to reveal defects, or surface particles.

    摘要翻译： 电子能量束（28）不连续地扫描样品（32），并且在每个扫描位置在样品中产生热波，存在从热波发射的红外辐射。 从样品的加热区域发射的所有红外线辐射由椭圆形收集器（34）收集并通过反射引导到红外检测器（44），样品和检测器位于集电器（34）的焦点处，到 给出样品的二维图像。 计算机系统（52）用于控制数据采集，存储，处理和图像显示以及波束（28）的调制和扫描。 可以检测样品的表面，表面和亚表面结构，例如显露缺陷或表面颗粒。

    Imaging a sample with multiple beams and multiple detectors
    5.
    发明公开
    Imaging a sample with multiple beams and multiple detectors 审中-公开
    ABBILDUNG EINER探针麻醉师MEHREREN STRAHLEN UND MEHREREN DETEKTOREN

    公开(公告)号：EP2924709A1

    公开(公告)日：2015-09-30

    申请号：EP15160701.7

    申请日：2015-03-25

    申请人： FEI COMPANY

    发明人： Potocek, Pavel ,  Kooijman, Cornelis ,  Slingerland, Hendrik ,  Veen, van, Gerard ,  Boughorbel, Faysal ,  Faber, Pybe ,  Sluijterman, Albertus

    IPC分类号： H01J37/244

    CPC分类号： H01J37/261 ,  G01N21/6458 ,  G01N23/225 ,  G01N2223/418 ,  G01N2223/427 ,  G02B21/0016 ,  H01J37/06 ,  H01J37/1472 ,  H01J37/222 ,  H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/10 ,  H01J2237/226 ,  H01J2237/2446 ,  H01J2237/2447 ,  H01J2237/2448 ,  H01J2237/24507 ,  H01J2237/2602

    摘要： A multi-beam apparatus for inspecting or processing a sample (232) with a multitude of focused beams, the apparatus equipped to scan a multitude of N beams (240-n) over the sample, the apparatus equipped with a multitude of M detectors (234-m) for detecting secondary radiation emitted by the sample when said sample is irradiated by the multitude of beams, each of the detectors capable of outputting a detector signal representing the intensity of the secondary radiation detected by the detector, , in working, each detector signal comprising information caused by multiple beams, the information caused by one beam thus spread over multiple detectors, the apparatus equipped with a programmable controller (236) for processing the multitude of detector signals to a multitude of output signals, using weight factors so that each output signal represents information caused by a single beam, characterized in that the weight factors are dynamic weight factors depending on the scan position of the beams with respect to the detectors and the distance between sample and detectors.
    The weight factors describe the contribution of each beam to each detector. The invention is based on the insight that when scanning the beams over the sample, the position of the position where the secondary radiation is formed (the impact position) changes. Therefore the weight factors should be a function of the scan position.
    Also the distance between sample and detector (the working distance) has a similar effect on the weight factors
    It is noted that, as the position of the impact is known at all times the weight factors can be a known function of the scan position, working distance and, if applicable, the beam energies.

    摘要翻译： 一种用于用多个聚焦光束检测或处理样品（232）的多光束装置，所述装置配备用于扫描样品上的多个N个光束（240-n），所述装置配备有多个M个检测器 每个检测器能够输出表示由检测器检测到的二次辐射的强度的检测器信号，每个检测器信号在工作时，每个检测器 检测器信号包括由多个波束引起的信息，由一个波束引起的信息由此分布在多个检测器上，该装置配备有可编程控制器（236），用于使用加权因子将多个检测器信号处理到多个输出信号，使得 每个输出信号表示由单个波束引起的信息，其特征在于，所述权重因子是取决于所述扫描位置的动态加权因子 相对于检测器的光束和样品和检测器之间的距离。 权重因子描述了每个光束对每个探测器的贡献。 本发明基于以下认识：当扫描样品上的光束时，形成次级辐射的位置的位置（冲击位置）发生变化。 因此，重量因子应该是扫描位置的函数。 样品和检测器之间的距离（工作距离）对重量因子也有类似的影响。应注意的是，由于冲击位置始终是已知的，重量因子可以是扫描位置的已知功能，工作 距离和（如果适用）射束能量。

    HIGH-RESOLUTION COMPUTED TOMOGRAPHY
    6.
    发明公开
    HIGH-RESOLUTION COMPUTED TOMOGRAPHY 有权
    HOCHAUFLÖSENDECOMPUTERTOMOGRAFIE

    公开(公告)号：EP2984473A1

    公开(公告)日：2016-02-17

    申请号：EP14721697.2

    申请日：2014-04-02

    申请人： Illinois Tool Works Inc.

    发明人： WANG, Yuxin ,  SHARPE, Joshua ,  SCHLECHT, Joseph ,  FERLEY, Eric ,  NOEL, Julien

    IPC分类号： G01N23/04 ,  G06T3/40

    CPC分类号： G01N23/046 ,  G01N2223/419 ,  G01N2223/42 ,  G01N2223/427 ,  G06T3/4069

    摘要： An x-ray imaging system (10), such as a X-ray computerised tomographic system, may acquire a series of radiographs at different detector positions along a first translation axis or a second translation axis parallel to orientation directions of detector pixels of a radiation detector (14). In a first embodiment, the different detector positions may be separated by a distance less than a linear size of the radiation detector (14) along the first translation axis or the second translation axis, respectively. The radiographs may be assembled into a radiograph larger than each radiograph in the series of radiographs, resulting in image stitching. In a second embodiment, the different detector positions may be separated by a distance less than a pixel size of the radiation detector (14), also referred as sub-pixel shifting of the detector. The radiographs may be assembled to form a radiograph with a higher resolution than the acquired radiographs, resulting in superresolution.

    摘要翻译： 诸如X射线计算机断层摄影系统的X射线成像系统（10）可以沿着与辐射的检测器像素的取向方向平行的第一平移轴或第二平移轴在不同的检测器位置处获取一系列X射线照片 检测器（14）。 在第一实施例中，不同的检测器位置可以分别沿着第一平移轴或第二平移轴分开小于辐射检测器（14）的线性尺寸的距离。 射线照片可以被组装成比放射照片系列中的每张X光片大的放射照片，导致图像拼接。 在第二实施例中，不同的检测器位置可以被分开小于辐射检测器（14）的像素尺寸的距离，也称为检测器的子像素移位。 射线照片可以被组装以形成具有比所获取的射线照片更高的分辨率的X射线照片，导致超分辨率。

    Imaging a sample with multiple beams and multiple detectors
    7.
    发明公开
    Imaging a sample with multiple beams and multiple detectors 审中-公开
    Abbildung einer Probe mit mehreren Strahlen und mehreren Detektoren

    公开(公告)号：EP2924708A1

    公开(公告)日：2015-09-30

    申请号：EP14161505.4

    申请日：2014-03-25

    申请人： FEI COMPANY

    发明人： Potocek, Pavel ,  Kooijman, Cornelis ,  Slingerland, Hendrik ,  Veen, van, Gerard ,  Boughorbel, Faysal ,  Faber, Pybe ,  Sluijterman, Seyno

    IPC分类号： H01J37/244

    CPC分类号： H01J37/261 ,  G01N21/6458 ,  G01N23/225 ,  G01N2223/418 ,  G01N2223/427 ,  G02B21/0016 ,  H01J37/06 ,  H01J37/1472 ,  H01J37/222 ,  H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/10 ,  H01J2237/226 ,  H01J2237/2446 ,  H01J2237/2447 ,  H01J2237/2448 ,  H01J2237/24507 ,  H01J2237/2602

    摘要： The invention relates to a multi-beam apparatus for inspecting a sample (232) with a multitude of focused beams, the apparatus equipped to scan a multitude of N beams (240-n) over the sample, the apparatus equipped with a multitude of M detectors (234-m) for detecting secondary radiation emitted by the sample when said sample is irradiated by the multitude of beams, each of the detectors capable of outputting a detector signal representing the intensity of the secondary radiation detected by the detector, characterized in that, in working, each detector signal comprises information caused by multiple beams, the information caused by one beam thus spread over multiple detectors, the apparatus equipped with a programmable controller (236) for processing the multitude of detector signals to a multitude of output signals, the controller processing the multitude of detector signals so that each output signal represents information caused by a single beam.

    摘要翻译： 本发明涉及一种用于用多个聚焦光束检测样品（232）的多光束装置，该装置用于扫描样品上的多个N个光束（240-n），该装置装备有多个M 检测器（234-m），用于当所述样品被多个光束照射时检测由样品发射的次级辐射，每个检测器能够输出表示由检测器检测到的次级辐射的强度的检测器信号，其特征在于： 在工作时，每个检测器信号包括由多个波束引起的信息，由一个波束引起的信息由此分布在多个检测器上，该装置配备有用于将多个检测器信号处理到多个输出信号的可编程控制器（236） 控制器处理多个检测器信号，使得每个输出信号表示由单个波束引起的信息。