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    Ionizer for gas cluster ion beam formation
    3.
    发明公开
    Ionizer for gas cluster ion beam formation 有权
    ionisator zur Bildung eines Gas-Cluster-Ionenstrahls

    公开(公告)号：EP1255277A1

    公开(公告)日：2002-11-06

    申请号：EP01650051.4

    申请日：2001-05-01

    申请人： Epion Corporation

    发明人： Dykstra, Jerald P.

    IPC分类号： H01J27/20 ,  H01J27/02 ,  H01J37/08

    CPC分类号： H01J37/08 ,  H01J27/026 ,  H01J27/20 ,  H01J2237/0048 ,  H01J2237/0812

    摘要： A neutral beam ionizing apparatus for electron impact ionization of a substantially cylindrical neutral beam. The apparatus includes an electron source, and a circularly cylindrical ionizing region that is substantially free of magnetic fields. In one embodiment of the invention, the beam is a gas cluster beam, and the electron source includes a heated filament (1000) for emitting thermions, the filament including one or more direction reversals shaped to produce self-nulling magnetic fields so as to minimize the magnetic field due to filament heating current. In another embodiment of the invention, a neutral beam ionizing apparatus for electron impact ionization of a substantially cylindrical neutral beam includes at least one electron source (1402), and an elliptically cylindrical ionizing region (Fig.15). In one embodiment, the elliptically cylindrical ionizing region includes a pair of co-focal elliptically cylindrical electrodes biased so as to cause electrons emitted from the at least one electron source to orbit repeatedly through the axis of the beam to be ionized.

    摘要翻译： 一种用于大致圆柱形中性光束的电子轰击电离的中性束电离装置。 该装置包括电子源和基本上不含磁场的圆柱形电离区域。 在本发明的一个实施例中，光束是气体束束，并且电子源包括用于发射热量的加热灯丝（1000），该灯丝包括一个或多个成形为产生自归零磁场的方向反转，从而使 由于灯丝加热电流引起的磁场。 在本发明的另一个实施例中，用于基本上为圆柱形中性光束的电子轰击电离的中性束电离装置包括至少一个电子源（1402）和椭圆柱形电离区（图15）。 在一个实施例中，椭圆柱形电离区域包括一对共焦椭圆柱形电极，其被偏置以使得从至少一个电子源发射的电子重复地穿过待离子束的光束的轴线。