摘要:
In a method of manufacturing a green light emitting diode, an included angle (ϑ] defined by a line extending along the longitudinal direction of light and dark stripes of an oxide region (7) formed on a cleavage surface (6) of a GaP single crystal wafer (1) and a (111) surface of the wafer (1) is set to be a predetermined angle, and a liquid phase epitaxial layer having a p-n junction is formed on the (111) surface (8) of the GaP single crystal wafer (1).
摘要:
An active layer is formed on an n-type InP buffer layer (11) of a substrate (10). A pair of strip-shaped grooves are formed into the active layer to divide it into a contract portion (12a) and side portions. A p-type InP cladding layer (15) is deposited on the entire surface of the active layer and grooves. The cladding layer (15) is selectively etched to form a mesa portion including the central active portion (12a) and expose the buffer layer (11). An insulating film (18) is coated on the mesa portion and buffer layer, so that a semiconductor light-emitting device is manufactured.
摘要:
In a method of manufacturing pure green light emitting diodes, after an n-type GaP epitaxial layer with thickness larger than or equal to a value for which the density of dislocation on the surface becomes less than or equal to 1 x 10" cm -2 is grown on an n-type GaP substrate, a p-type GaP epitaxial layer is grown on the above n-type epitaxial layer. Even with the use of a GaP substrate with normal dislocation density, the density of dislocation in the neighborhood of the p-n junction becomes low and therefore GaP green light emitting diodes with high intensity of light emission is obtained.
摘要:
In a method of manufacturing a green light emitting diode, an included angle (ϑ] defined by a line extending along the longitudinal direction of light and dark stripes of an oxide region (7) formed on a cleavage surface (6) of a GaP single crystal wafer (1) and a (111) surface of the wafer (1) is set to be a predetermined angle, and a liquid phase epitaxial layer having a p-n junction is formed on the (111) surface (8) of the GaP single crystal wafer (1).
摘要:
After a liquid-phase epitaxial growth step by an n-type GaAs saturated solution (21) is terminated, a substrate (1) is temporarily dipped in an undoped GaAs saturated or supersaturated solution (22), and thereafter liquid-phase epitaxial growth is performed by a p-type Al x Ga 1-x As saturated solution (23). Thus, the n-type GaAs saturated solution (21) is prevented from being mixed into the p-type Al x Ga 1-x As saturated solution (23) to contaminate the same, whereby a solar battery of high quality can be obtained even if the number of times of crystallization is increased.
摘要:
After a liquid-phase epitaxial growth step by an n-type GaAs saturated solution (21) is terminated, a substrate (1) is temporarily dipped in an undoped GaAs saturated or supersaturated solution (22), and thereafter liquid-phase epitaxial growth is performed by a p-type Al x Ga 1-x As saturated solution (23). Thus, the n-type GaAs saturated solution (21) is prevented from being mixed into the p-type Al x Ga 1-x As saturated solution (23) to contaminate the same, whereby a solar battery of high quality can be obtained even if the number of times of crystallization is increased.
摘要翻译:在通过n型GaAs饱和溶液(21)的液相外延生长步骤终止后,将衬底(1)暂时浸入未掺杂的GaAs饱和或过饱和溶液(22)中,然后液相外延生长为 由p型Al x Ga 1-x As饱和溶液(23)进行。 因此,防止了n型GaAs饱和溶液(21)混入p型Al x Ga 1-x As饱和溶液(23)中以使其污染,由此即使数量多 结晶次数增加。