Dielectric device
    58.
    发明专利

    公开(公告)号:JP5545608B2

    公开(公告)日:2014-07-09

    申请号:JP2006195432

    申请日:2006-07-18

    Inventor: 伸行 小林

    Abstract: PROBLEM TO BE SOLVED: To provide a dielectric device that is provided with a dielectric layer, having less residual strain and higher characteristics. SOLUTION: The dielectric device 10 is provided with a substrate 11 and a dielectric layer 13. A layered low-density part 13c is formed, between a substrate-side surface 13a as a surface on the side of the substrate 11 and an outer electrode-side surface 13b as an opposite surface to the substrate-side surface 13a, in the dielectric layer 13. COPYRIGHT: (C)2008,JPO&INPIT

Patent Agency Ranking