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公开(公告)号：JP2011203188A
公开(公告)日：2011-10-13
申请号：JP2010072687
申请日：2010-03-26
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： TACHIZAKI TAKEHIRO , WATANABE MASAHIRO , HARIYAMA TATSUO , YOSHITAKE YASUHIRO , MATSUI TETSUYA , MATSUMOTO KOICHI , TAKAMASU KIYOSHI
IPC分类号： G01S17/08
CPC分类号： G01S17/36 , G01B9/02003 , G01B9/02007 , G01B9/02008 , G01B9/0207 , G01S7/4815 , G01S7/4911 , G01S17/42
摘要： PROBLEM TO BE SOLVED: To provide an apparatus for measuring distance using an optical comb, capable of attaining simple optical measurements of the absolute distance up to an object to be measured approximately 10 m away, which has a low-reflectance surface or a scattering plane, by a noncontact method with precision of at least 0.1 mm, by solving the problem wherein the quantity of light is too small and it is difficult to extract only required beats from a large number of own beats with high signal to noise ratio (SN ratio).SOLUTION: The apparatus for measuring a distance to an object, measures the distance up to the object by comparing beat signal phases of beat signals between a plurality of CW lasers reflected or scattered by the light source and the object with those by a plurality of CW lasers, prior to the irradiation of the light source and the object.
摘要翻译： 要解决的问题：提供一种使用光梳来测量距离的装置，其能够获得距离大约10m的被测量物体的绝对距离的简单的光学测量，其具有低反射率表面或散射面 通过解决其中光量太小而难以从大量具有高信噪比（SN比）的所需节拍中提取所需节拍的精度为0.1mm以上的非接触方式 ）。解决方案：用于测量到物体的距离的装置，通过比较由光源和物体反射或散射的多个CW激光器之间的拍频信号的差拍信号相位，通过比较由多个 的CW激光器，在照射光源和物体之前。
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公开(公告)号：JP2011196732A
公开(公告)日：2011-10-06
申请号：JP2010061778
申请日：2010-03-18
申请人： Hitachi Ltd , 株式会社日立製作所
IPC分类号： G01M11/02 , H01L21/027
CPC分类号： G01M11/0207 , G01J9/00 , G01M11/0257 , G01N21/93 , G01N21/9501
摘要： PROBLEM TO BE SOLVED: To solve a problem wherein, since there is the case where a pupil diameter of an objective lens used for a semiconductor inspection device or a laser processing device exceeds a field of view detected by Shack-Hartmann sensor, an aberration of the whole pupil cannot be measured by one-time imaging.SOLUTION: In order to measure an aberration of the whole pupil, the large field of view is detected by scanning the Shack-Hartmann sensor.
摘要翻译： 要解决的问题为了解决由于存在用于半导体检查装置或激光加工装置的物镜的瞳孔直径超过Shack-Hartmann传感器检测到的视野的情况，因此， 整个瞳孔不能通过一次成像测量。解决方案：为了测量整个瞳孔的像差，通过扫描Shack-Hartmann传感器来检测大视场。
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公开(公告)号：JP2014074633A
公开(公告)日：2014-04-24
申请号：JP2012221808
申请日：2012-10-04
申请人： Hitachi Ltd , 株式会社日立製作所
IPC分类号： G01B11/24
CPC分类号： G01B11/14 , G01B11/12 , G01B11/24 , G01B11/2441 , G01C3/08 , G01S7/4812 , G01S7/4813 , G01S7/4818 , G01S17/08 , G01S17/42 , G01S17/88 , G01S17/89
摘要： PROBLEM TO BE SOLVED: To provide a shape measuring device which achieves the avoidance of increase in size and the improvement of durability and measurement accuracy by measuring a number of points with one distance sensor.SOLUTION: A shape measuring device which measures a shape of a measured object includes: a distance sensor 0 which applies a measuring beam to the measured object, which detects the light reflected by the measured object, and which calculates a distance to the measured object; a separation part for separating the measuring beam from the distance sensor 0 into a plurality of measuring beams to be applied to a plurality of measurement points; and a selection part for selecting the measuring beam to be applied to the measured object among the plurality of measuring beams after the separation by the separation part.
摘要翻译： 要解决的问题：提供一种形状测量装置，其通过用一个距离传感器测量多个点来实现避免尺寸增加和耐久性和测量精度的提高。解决方案：一种形状测量装置，其测量形状测量装置的形状 测量对象包括：距离传感器0，其向测量对象施加测量光束，该距离传感器检测被测物体反射的光，并计算到被测物体的距离; 分离部分，用于将测距光束与距离传感器0分离成多个测量光束以被施加到多个测量点; 以及选择部，用于选择在通过分离部分离后的多个测量光中施加到测量对象的测量光束。
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公开(公告)号：JP2013007591A
公开(公告)日：2013-01-10
申请号：JP2011139056
申请日：2011-06-23
申请人： Hitachi Ltd , 株式会社日立製作所
CPC分类号： G01S17/36 , G01S7/481 , G01S7/4818
摘要： PROBLEM TO BE SOLVED: To improve measurement accuracy without increasing the device cost by optically beating down light from a light source that oscillates a plurality of frequencies using an optical modulator and detecting the phase at a low frequency.SOLUTION: The present invention provides a distance measuring device provided with: a light source which oscillates light of a plurality of different frequencies; an optical modulator which modulates frequencies of the light from the light source, and the light from the light source applied to and then reflected from an object to be measured; an oscillator which inputs a voltage signal to the optical modulator; a detector which detects an optical signal modulated by the optical modulator; and a distance calculation circuit which calculates the distance from the phase of the optical signal detected by the detector.
摘要翻译： 要解决的问题：通过光学地降低来自使用光调制器振荡多个频率的光源并且以低频检测相位的光源来降低光，从而提高测量精度而不增加器件成本。 解决方案：本发明提供了一种距离测量装置，其具有：振荡多个不同频率的光的光源; 调制来自光源的光的频率的光调制器和来自被测量对象的光源的光，然后从被测量物体反射的光调制器; 振荡器，其将电压信号输入到所述光调制器; 检测器，其检测由所述光调制器调制的光信号; 以及距离计算电路，其计算由检测器检测到的光信号的相位的距离。 版权所有（C）2013，JPO＆INPIT
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公开(公告)号：JP2015017811A
公开(公告)日：2015-01-29
申请号：JP2013143152
申请日：2013-07-09
申请人： 株式会社日立製作所 , Hitachi Ltd
CPC分类号： G01B11/026 , G01B11/12 , G01B11/24
摘要： 【課題】本発明は、1つの距離センサからの光を分離することにより、装置を大型化せずに測定精度を向上させた形状計測装置および方法を提供することを目的とする。【解決手段】本発明は、「測定対象へレーザを照射し、反射光を検出して測定点までの距離を算出する距離センサと、前記距離センサからの光を複数に分離する分離部と、前記距離センサと前記測定対象とを相対的に回転させる回転部と、前記距離センサから得た複数の測定点までの距離の測定結果を統合するデータ処理部とを備える形状計測装置」を提供する。【選択図】図2
摘要翻译： 要解决的问题：提供一种形状测量方法和装置，其通过分离来自一个距离传感器的光而不增加装置来提高测量精度。解决方案：本发明提供一种形状测量装置，其包括：辐射激光器的距离传感器 测量对象，检测反射光，并计算到测量点的距离; 分割单元，用于将距离传感器的光分成多个光; 用于相对旋转距离传感器和测量对象的旋转部分; 以及数据处理单元，用于将距离测量点的测量结果整合到由距离传感器获取的多个测量点。
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公开(公告)号：JP2014115277A
公开(公告)日：2014-06-26
申请号：JP2013234543
申请日：2013-11-13
申请人： Hitachi Ltd , 株式会社日立製作所
CPC分类号： G01B11/24 , G01B11/026 , G01C15/008 , G01S3/784 , G01S5/163 , G01S7/4817 , G01S7/497 , G01S17/023 , G01S17/06 , G01S17/42
摘要： PROBLEM TO BE SOLVED: To provide a shape measurement system for highly accurately measuring a large-sized structure with a simple method.SOLUTION: In a shape measurement system 100, there are provided with: a distance sensor 11 for measuring a distance to an object to be measured while rotating measurement light; a shape measurement part 10 comprising means for changing measurement positions of the distance sensor 11; a wheel 201 for moving the shape measuring part 10; and a position posture measuring sensor part 300 for measuring a position of the shape measurement part 10. Spatial coordinates of an original point of the shape measurement part 10 and an angle of rotation in a coordinate system with a reference point of the position posture measurement sensor part 300 as an original point are measured.
摘要翻译： 要解决的问题：提供一种用于通过简单的方法高精度地测量大尺寸结构的形状测量系统。解决方案：在形状测量系统100中，设置有：距离传感器11，用于测量到物体的距离 旋转测量光时进行测量; 形状测量部分10，包括用于改变距离传感器11的测量位置的装置; 用于移动形状测量部分10的轮201; 以及位置姿势测量传感器部分300，用于测量形状测量部分10的位置。形状测量部分10的原点的空间坐标和坐标系中的位置姿态测量传感器的参考点的旋转角度 测量作为原始点的第300部分。
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7.发明专利Distance measuring method and apparatus and shape measuring apparatus with the same packaged therein 审中-公开其包装的距离测量方法和装置和形状测量装置
公开(公告)号：JP2013117453A
公开(公告)日：2013-06-13
申请号：JP2011265387
申请日：2011-12-05
申请人： Hitachi Ltd , 株式会社日立製作所
CPC分类号： G01S7/4812 , G01S7/4815 , G01S7/497 , G01S17/36 , G01S17/42
摘要： PROBLEM TO BE SOLVED: To provide a distance measuring method and apparatus in which the time required for adjusting a focusing position is shortened by using low-precision range finding and high-precision range finding, and a shape measuring apparatus with the same packaged therein.SOLUTION: A distance measuring apparatus comprises a high-precision range finding system, a low-precision range finding system and inter-lens distance change means. In the high-precision range finding system, light from a first light source is separated into first reference light which does not irradiate a subject and first measuring light which irradiates the subject through a focus unit including a plurality of lenses, and a distance to the subject is measured from a phase difference between the first reference light and the first measuring light. In the low-precision range finding system, light from a second light source the frequency of which is lower than that of the first light source is separated into second reference light which does not irradiate the subject and second measuring light which irradiates the subject, and the distance to the subject is measured from a phase difference or an arrival time difference between the second reference light and the second measuring light. The inter-lens distance change means changes an inter-lens distance between the plurality of lenses in the laser focus unit from a result of the low-precision range finding system.
摘要翻译： 要解决的问题：提供一种距离测量方法和装置，其中通过使用低精度测距和高精度测距来缩短调整聚焦位置所需的时间，以及具有相同尺寸的形状测量装置 包装在其中。 解决方案：距离测量装置包括高精度测距系统，低精度测距系统和透镜间距变化装置。 在高精度测距系统中，来自第一光源的光被分离为不照射被摄体的第一参考光，并且通过包括多个透镜的焦点单元照射被摄体的第一测量光和与 对象是从第一参考光和第一测量光之间的相位差测量的。 在低精度测距系统中，来自第二光源的光的频率低于第一光源的光被分离为不照射被摄体的第二参考光和照射被摄体的第二测量光，以及 从第二参考光和第二测量光之间的相位差或到达时间差来测量到被摄体的距离。 透镜间距改变装置将激光聚焦单元中的多个透镜之间的透镜间距改变为低精度测距系统的结果。 版权所有（C）2013，JPO＆INPIT
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8.发明专利Multipoint measuring method and multipoint measuring device, using fbg sensor 有权多点测量方法和多点测量装置，使用FBG传感器
公开(公告)号：JP2013113830A
公开(公告)日：2013-06-10
申请号：JP2011263252
申请日：2011-12-01
申请人： Hitachi Ltd , 株式会社日立製作所
CPC分类号： G01B11/165 , G01D5/35303 , G01D5/35316 , G01D5/35387 , G01D5/3539
摘要： PROBLEM TO BE SOLVED: To provide a multipoint measuring method and device using an FBG sensor, which allows for measurement using FBG sensors of a plurality of optical fibers without use of an optical switch, even in the case of using the optical fibers in one transmission path.SOLUTION: A multipoint measuring device using an FBG sensor comprises: an optical fiber 4 provided with a diffraction grating in a core; a wide-band wavelength light source 9; a light source-side optical modulator 10 which controls the time of light incident to the optical fiber 4 from the light source; a detection-side optical modulator 12 which controls the transmission time of the reflection light from the diffraction grating of the optical fiber 4; a wavelength shift amount calculator 14 which detects the reflection light from the optical modulator and processes the obtained signal so as to separate the signal from the optical fiber 4; a temperature/strain calculator 15 which calculates the deformation of a measurement target from the results of the calculator; and a display part 16 which displays the deformation data of the measurement target.
摘要翻译： 要解决的问题：为了提供使用FBG传感器的多点测量方法和装置，其允许使用多个光纤的FBG传感器而不使用光学开关进行测量，即使在使用光纤的情况下 在一个传输路径。 解决方案：使用FBG传感器的多点测量装置包括：在芯中设置有衍射光栅的光纤4; 宽带波长光源9; 光源侧光调制器10，其控制从光源入射到光纤4的光的时间; 检测侧光调制器12，其控制来自光纤4的衍射光栅的反射光的透射时间; 波长偏移量计算器14，其检测来自光调制器的反射光，并处理所获得的信号，以分离来自光纤4的信号; 温度/应变计算器15，其从计算器的结果计算测量目标的变形; 以及显示测量对象的变形数据的显示部16。 版权所有（C）2013，JPO＆INPIT
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公开(公告)号：JP2015055547A
公开(公告)日：2015-03-23
申请号：JP2013188944
申请日：2013-09-12
申请人： 株式会社日立製作所 , Hitachi Ltd
CPC分类号： G01J5/0831 , G01J5/601
摘要： 【課題】本発明は、高精度な温度計測と、形状計測を両立する計測方法およびその装置を提供することを目的とする。【解決手段】本発明は、披検物から発生される熱放射光の一部を遮光する絞りと、前記符号化絞りを透過した熱放射光を波長領域に応じて分散させる2次元回折素子と、前記2次元回折素子によって分散された熱放射光を検出する2次元センサとを備える多波長放射温度計を提供する。【選択図】図1
摘要翻译： 要解决的问题：提供一种能够实现高精度的测温和形状测量的测量方法及其装置。解决方案：多波长辐射温度计包括：屏蔽从目标产生的热辐射光的一部分的隔膜; 二维衍射元件，其根据波长区域分散透过编码光阑的热辐射光; 以及检测由二维衍射元件分散的热辐射光的二维传感器。
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公开(公告)号：JP2014102258A
公开(公告)日：2014-06-05
申请号：JP2014019953
申请日：2014-02-05
申请人： Hitachi Ltd , 株式会社日立製作所
发明人： TACHIZAKI TAKEHIRO , WATANABE MASAHIRO , HARIYAMA TATSUO , YOSHITAKE YASUHIRO , MATSUI TETSUYA , MATSUMOTO KOICHI , TAKAMASU KIYOSHI
IPC分类号： G01S17/32
摘要： PROBLEM TO BE SOLVED: To provide a distance measuring apparatus for using an optical comb, capable of simply measuring of absolute distance to an object to be measured approximately 10 m away, which has a low-reflectance surface or a scattering plane surface, by an optically noncontact method with precision of 0.1 mm or more, by solving the problem that the quantity of light is too small and it is difficult to extract only required beats from a large number of own beats with high signal to noise ratio (SN ratio).SOLUTION: A distance measuring apparatus for measuring distance to an object, measures the distance to the object by comparing beat signal phases of beat signals between a plurality of CW lasers reflected or scattered by a light source and the object, with beat signal phases of beat signals by the plurality of CW lasers, prior to irradiation of the light source and the object.
摘要翻译： 要解决的问题：提供一种使用光梳的距离测量装置，其能够简单地测量具有低反射率表面或散射面表面的约10m距离的被测量物体的绝对距离 通过解决光量太小的问题，难以从大量的具有高信噪比（SN比）的节拍中提取所需的节拍，精度为0.1mm以上的光学非接触方法。 解决方案：用于测量与物体的距离的距离测量装置，通过比较由光源和物体反射或散射的多个CW激光器之间的节拍信号的拍频信号相位，以拍子的节拍信号相位来测量到物体的距离 在照射光源和物体之前由多个CW激光器发出信号。
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