Method of manufacturing a circuit board

    公开(公告)号:JP4127207B2

    公开(公告)日:2008-07-30

    申请号:JP2003430394

    申请日:2003-12-25

    CPC classification number: H01L2924/0002 H01L2924/00

    Abstract: PROBLEM TO BE SOLVED: To provide a circuit board in which it is possible to efficiently coat a through hole of a semiconductor substrate having a through electrode with an insulating resin, and the through hole, even if it is deep, is highly reliably coated with the insulating resin; and to provide a method of manufacturing the same. SOLUTION: According to the method of manufacturing a circuit board, an oxide film is formed as required on the inner peripheral wall surface of a hole 11 which is formed on a semiconductor substrate 1, an insulating layer 2 is deposited by electrodepositing an insulating resin composite, and then a conductive pattern 3 for enabling electrical connection of the front surface and rear surface is formed on the insulating layer. Thus, the circuit board has the through hole for penetrating the semiconductor substrate, the oxide film formed as required on the inner peripheral wall surface of the through hole, the insulating layer formed on the front surface of the oxide film, and the conductive pattern formed on the front surface of the insulating layer. COPYRIGHT: (C)2005,JPO&NCIPI

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