摘要:
PROBLEM TO BE SOLVED: To provide a method of forming a dense oxide coating on an aluminum component of semiconductor processing equipment.SOLUTION: A method comprises cold spraying a layer of pure aluminum 130 on a surface 112 of an aluminum component 100 to a predetermined thickness, and then forming a dense oxide coating 120 on the layer of pure aluminum 130 using a plasma electrolytic oxidation process. The plasma electrolytic oxidation process causes the layer 130 of pure aluminum to undergo microplasmic discharges, thus forming the dense oxide coating 120 on the layer of pure aluminum 130 on the surface 112 of the aluminum component 100.
摘要:
PROBLEM TO BE SOLVED: To provide a method for depositing a thin nano powder layer on a substrate.SOLUTION: A method for forming a porous coating with nanosize pores on a substrate includes the steps of: (a) forming a suspension (10) of sinterable particles in a carrier fluid; (b) maintaining the suspension by agitating (12) the carrier fluid; (c) applying (16) a first coating of the suspension to the substrate; and (d) sintering (36) the sinterable particles to the substrate. A thin layer of this nanoporous coating is deposited (16) onto a substrate having micropores. The substrate provides strength and structural support while the properties of the nano powder layer controls flow and filtration aspects of the device. This composite has sufficient strength for handling and use in industrial processes. Since the nano powder layer is thin, the pressure drop across the layer is substantially less than conventional thicker nano powder structures.
摘要:
PROBLEM TO BE SOLVED: To provide systems and methods for reducing wear, increasing the lifetime of parts and reducing cost.SOLUTION: A system includes: a component configured to receive a coating; and a mirror component configured to be removable, wherein the mirror component has at least one coated surface which substantially mirrors at least one surface on the component. The coating is used for enhancing a surface physical property of at least one surface of the component, wherein the coating is transferred by hot isostatic pressing (HIP) from the mirror component to the component.
摘要:
The disclosure of the present invention is directed to isolated particles having a diameter of ≤ 1,500 nm, obtainable according to the process comprising the steps of (a) forming a highly dispersed colloidal suspension of particles; (b) adding to the suspension an encapsulant material to at least substantially encapsulate individual particles with the encapsulant material; and (c) isolating from said suspension independent and discrete, individually encapsulated or substantially encapsulated particles.
摘要:
PROBLEM TO BE SOLVED: To provide ultrafine and fine particles, and to provide a method for making and isolating the particles. SOLUTION: A method of making isolated particles including the step of at least substantially encapsulating particles present in a highly dispersed colloidal suspension with an encapsulant material, such that the encapsulated particles remain independent and discrete upon separation from the suspension. Also, independent and discrete particles at least substantially encapsulated with the encapsulant material. COPYRIGHT: (C)2009,JPO&INPIT