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    불소 함유 중합성 에스테르 화합물 및 그의 제조 방법
    5.
    发明公开
    불소 함유 중합성 에스테르 화합물 및 그의 제조 방법 有权
    含氟聚合聚合酯化合物及其制备方法

    公开(公告)号：KR1020050033840A

    公开(公告)日：2005-04-13

    申请号：KR1020040079704

    申请日：2004-10-06

    申请人： 신에쓰 가가꾸 고교 가부시끼가이샤

    发明人： 긴쇼,다께시 ,  와따나베,다께루

    IPC分类号： C07C69/14

    CPC分类号： C07C67/29 ,  C07C29/40 ,  C07C45/512 ,  C07C49/172 ,  C07C49/173 ,  C07C49/245 ,  C07C67/14 ,  C07C69/653 ,  C07C2601/14 ,  C07C2603/74 ,  C07F7/1856 ,  C07C35/52 ,  C07C35/48 ,  C07C33/46 ,  C07C31/42

    摘要： Provided is a fluorine-included polymerizable ester compound which shows excellent transparency and drying etching resistance against laser light with 200nm and less in wavelength and is useful as monomers to produce a substrate resin for resist. The fluorine-included polymerizable ester compound is represented by formula 1 and 2, in which R1 is H, a methyl or a trifluoromethyl radical; R2 and R3 are independently H or a monovalent hydrocarbon radical having a C1-C15 hetero atom and may be a bivalent hydrocarbon radical having a C1-C15 hetero atom when R2 and R3 are possibly combined each other to form a ring; R4 is H, a hydroxide or a monovalent hydrocarbon radical having a C1-C15 hetero atom; and R5 is an acidic unstable radical.

    摘要翻译： 本发明提供一种含氟聚合性酯化合物，其对波长为200nm以下的激光显示优异的透明性和耐干蚀刻性，并且可用作制造抗蚀剂用基材树脂的单体。 含氟可聚合酯化合物由式1和2表示，其中R 1是H，甲基或三氟甲基; R 2和R 3独立地为H或具有C 1 -C 15杂原子的一价烃基，并且当R 2和R 3可以相互结合形成环时，可以是具有C 1 -C 15杂原子的二价烃基; R4是H，具有C1-C15杂原子的氢氧化物或一价烃基; R5是酸性不稳定基团。