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公开(公告)号:TW201519342A
公开(公告)日:2015-05-16
申请号:TW103134942
申请日:2014-10-07
IPC分类号: H01L21/603 , H01L21/607
CPC分类号: H01L24/81 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/48 , H01L24/75 , H01L25/03 , H01L25/0657 , H01L25/105 , H01L25/50 , H01L2224/1134 , H01L2224/1145 , H01L2224/11462 , H01L2224/13082 , H01L2224/131 , H01L2224/13109 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13624 , H01L2224/16148 , H01L2224/16225 , H01L2224/16238 , H01L2224/48091 , H01L2224/48225 , H01L2224/48227 , H01L2224/75251 , H01L2224/75252 , H01L2224/75301 , H01L2224/75343 , H01L2224/75348 , H01L2224/75349 , H01L2224/75744 , H01L2224/75745 , H01L2224/759 , H01L2224/8112 , H01L2224/81121 , H01L2224/81193 , H01L2224/81201 , H01L2224/81203 , H01L2224/81205 , H01L2224/81207 , H01L2224/81409 , H01L2224/81424 , H01L2224/81439 , H01L2224/81444 , H01L2224/81447 , H01L2224/818 , H01L2224/81801 , H01L2224/81895 , H01L2224/81906 , H01L2225/06513 , H01L2225/1023 , H01L2225/1058 , H01L2924/01047 , H01L2924/01049 , H01L2924/01079 , H01L2924/01082 , H01L2924/15311 , H01L2924/181 , H01L2924/20102 , H01L2924/20103 , H01L2924/20104 , H01L2924/20105 , H01L2924/20106 , H01L2924/20107 , H01L2924/20301 , H01L2924/20302 , H01L2924/20303 , H01L2924/20304 , H01L2924/20305 , H01L2924/20306 , H01L2924/20307 , H01L2924/00014 , H01L2924/01029 , H01L2924/01014 , H01L2924/00012 , H01L2924/014 , H01L2224/8121 , H01L2924/00
摘要: 一種超音波接合半導體元件的方法,包括:(a)校準一第一半導體元件之複數個第一導體結構的表面相對應於一第二半導體元件之複數個第二導體結構的表面,其中複數個第一導體結構之每一者的表面與複數個第二導體結構之每一者的表面皆包含鋁;以及(b)超音波接合該複數個第一導體結構中的數個至相對應之該複數個第二導體結構中的數個。
简体摘要: 一种超音波接合半导体组件的方法,包括:(a)校准一第一半导体组件之复数个第一导体结构的表面相对应于一第二半导体组件之复数个第二导体结构的表面,其中复数个第一导体结构之每一者的表面与复数个第二导体结构之每一者的表面皆包含铝;以及(b)超音波接合该复数个第一导体结构中的数个至相对应之该复数个第二导体结构中的数个。
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公开(公告)号:TWI629732B
公开(公告)日:2018-07-11
申请号:TW105120538
申请日:2014-10-07
IPC分类号: H01L21/603 , H01L21/607
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公开(公告)号:TW201637107A
公开(公告)日:2016-10-16
申请号:TW105120538
申请日:2014-10-07
IPC分类号: H01L21/603 , H01L21/607
CPC分类号: H01L24/81 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/48 , H01L24/75 , H01L25/03 , H01L25/0657 , H01L25/105 , H01L25/50 , H01L2224/1134 , H01L2224/1145 , H01L2224/11462 , H01L2224/13082 , H01L2224/131 , H01L2224/13109 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13624 , H01L2224/16148 , H01L2224/16225 , H01L2224/16238 , H01L2224/48091 , H01L2224/48225 , H01L2224/48227 , H01L2224/75251 , H01L2224/75252 , H01L2224/75301 , H01L2224/75343 , H01L2224/75348 , H01L2224/75349 , H01L2224/75744 , H01L2224/75745 , H01L2224/759 , H01L2224/8112 , H01L2224/81121 , H01L2224/81193 , H01L2224/81201 , H01L2224/81203 , H01L2224/81205 , H01L2224/81207 , H01L2224/81409 , H01L2224/81424 , H01L2224/81439 , H01L2224/81444 , H01L2224/81447 , H01L2224/818 , H01L2224/81801 , H01L2224/81895 , H01L2224/81906 , H01L2225/06513 , H01L2225/1023 , H01L2225/1058 , H01L2924/01047 , H01L2924/01049 , H01L2924/01079 , H01L2924/01082 , H01L2924/15311 , H01L2924/181 , H01L2924/20102 , H01L2924/20103 , H01L2924/20104 , H01L2924/20105 , H01L2924/20106 , H01L2924/20107 , H01L2924/20301 , H01L2924/20302 , H01L2924/20303 , H01L2924/20304 , H01L2924/20305 , H01L2924/20306 , H01L2924/20307 , H01L2924/00014 , H01L2924/01029 , H01L2924/01014 , H01L2924/00012 , H01L2924/014 , H01L2224/8121 , H01L2924/00
摘要: 一種超音波接合半導體元件的方法,包括:(a)校準一第一半導體元件之複數個第一導體結構的表面相對應於一第二半導體元件之複數個第二導體結構的表面,其中複數個第一導體結構之每一者的表面與複數個第二導體結構之每一者的表面皆包含鋁;以及(b)超音波接合該複數個第一導體結構中的數個至相對應之該複數個第二導體結構中的數個。
简体摘要: 一种超音波接合半导体组件的方法,包括:(a)校准一第一半导体组件之复数个第一导体结构的表面相对应于一第二半导体组件之复数个第二导体结构的表面,其中复数个第一导体结构之每一者的表面与复数个第二导体结构之每一者的表面皆包含铝;以及(b)超音波接合该复数个第一导体结构中的数个至相对应之该复数个第二导体结构中的数个。
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公开(公告)号:TWI548012B
公开(公告)日:2016-09-01
申请号:TW103134942
申请日:2014-10-07
IPC分类号: H01L21/603 , H01L21/607
CPC分类号: H01L24/81 , H01L24/11 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/48 , H01L24/75 , H01L25/03 , H01L25/0657 , H01L25/105 , H01L25/50 , H01L2224/1134 , H01L2224/1145 , H01L2224/11462 , H01L2224/13082 , H01L2224/131 , H01L2224/13109 , H01L2224/13124 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13624 , H01L2224/16148 , H01L2224/16225 , H01L2224/16238 , H01L2224/48091 , H01L2224/48225 , H01L2224/48227 , H01L2224/75251 , H01L2224/75252 , H01L2224/75301 , H01L2224/75343 , H01L2224/75348 , H01L2224/75349 , H01L2224/75744 , H01L2224/75745 , H01L2224/759 , H01L2224/8112 , H01L2224/81121 , H01L2224/81193 , H01L2224/81201 , H01L2224/81203 , H01L2224/81205 , H01L2224/81207 , H01L2224/81409 , H01L2224/81424 , H01L2224/81439 , H01L2224/81444 , H01L2224/81447 , H01L2224/818 , H01L2224/81801 , H01L2224/81895 , H01L2224/81906 , H01L2225/06513 , H01L2225/1023 , H01L2225/1058 , H01L2924/01047 , H01L2924/01049 , H01L2924/01079 , H01L2924/01082 , H01L2924/15311 , H01L2924/181 , H01L2924/20102 , H01L2924/20103 , H01L2924/20104 , H01L2924/20105 , H01L2924/20106 , H01L2924/20107 , H01L2924/20301 , H01L2924/20302 , H01L2924/20303 , H01L2924/20304 , H01L2924/20305 , H01L2924/20306 , H01L2924/20307 , H01L2924/00014 , H01L2924/01029 , H01L2924/01014 , H01L2924/00012 , H01L2924/014 , H01L2224/8121 , H01L2924/00
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