公开(公告)号：US07580197B2

公开(公告)日：2009-08-25

申请号：US11907908

申请日：2007-10-18

申请人： Yasuhiro Omura ,  Hironori Ikezawa

发明人： Yasuhiro Omura ,  Hironori Ikezawa

IPC分类号： G02B1/06 ,  G02B3/00 ,  G02B17/00

CPC分类号： G02B17/0892 ,  G02B13/22 ,  G02B17/08 ,  G02B21/33 ,  G03F7/70225 ,  G03F7/70341

摘要： A liquid immersion optical system includes a first optically transparent member and a second optically transparent member, arranged in an optical path between the first optically transparent member and an object. A first space between the first optically transparent member and the second optically transparent member is fillable with a first liquid. A second space between the second optically transparent member and the object is fillable with a second liquid. The second optically transparent member is detachably arranged in the optical path between the first optically transparent member and the object.

摘要翻译： 液浸光学系统包括第一光学透明构件和第二光学透明构件，其布置在第一光学透明构件和物体之间的光路中。 第一光学透明构件和第二光学透明构件之间的第一空间可由第一液体填充。 第二光学透明构件和物体之间的第二空间可以用第二液体填充。 第二光学透明构件可拆卸地布置在第一光学透明构件和物体之间的光路中。

公开(公告)号：US20080068573A1

公开(公告)日：2008-03-20

申请号：US11907907

申请日：2007-10-18

申请人： Yasuhiro Omura ,  Hironori Ikezawa

发明人： Yasuhiro Omura ,  Hironori Ikezawa

IPC分类号： G03B27/42

CPC分类号： G02B17/0892 ,  G02B13/22 ,  G02B17/08 ,  G02B21/33 ,  G03F7/70225 ,  G03F7/70341

摘要： A lithographic projection apparatus is arranged to project a pattern from a patterning device onto a substrate using a projection system and has a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid. An element of the projection system through which the pattern is projected has, on a surface configured to be in contact with the liquid, a protective coating which is SiO2.

摘要翻译： 光刻投影装置被布置成使用投影系统将图案从图案形成装置投影到基板上，并且具有液体供应系统，其构造成至少部分地用液体填充投影系统和基板之间的空间。 在配置成与液体接触的表面上，投影图案的投影系统的元件具有SiO 2的保护涂层。

公开(公告)号：US20070285633A1

公开(公告)日：2007-12-13

申请号：US11665490

申请日：2005-10-12

申请人： Hironori Ikezawa ,  Yasuhiro Omura

发明人： Hironori Ikezawa ,  Yasuhiro Omura

IPC分类号： G03B27/52 ,  G02B13/24 ,  G02B27/00 ,  G02B3/02 ,  G02B5/00 ,  G03B27/32

CPC分类号： G03F7/70341 ,  G02B13/143 ,  G03F7/70983

摘要： A imaging optical system is a system of a liquid immersion type permitting a plane-parallel plate in liquid to be replaced with another, without substantial degradation of imaging performance, while ensuring sufficiently high laser resistance of a boundary lens. The imaging optical system is provided with a first optically transparent member located nearest to a second plane, and a second optically transparent member located adjacent to the first optically transparent member. An optical path between the first optically transparent member and the second plane is fillable with a first liquid and an optical path between the first optically transparent member and the second optically transparent member is fillable with a second liquid. The optical system satisfies the condition of 1

摘要翻译： 成像光学系统是一种允许液体中的平面平行板被另一个替代的液浸式系统，而不会显着降低成像性能，同时确保边界透镜的足够高的激光电阻。 成像光学系统设置有最靠近第二平面定位的第一透光构件和邻近第一光学透明构件定位的第二光学透明构件。 第一光学透明构件和第二平面之间的光路可以被第一液体填充，并且第一光学透明构件和第二光学透明构件之间的光路可以被第二液体填充。 光学系统满足1

公开(公告)号：US20100159401A1

公开(公告)日：2010-06-24

申请号：US12719455

申请日：2010-03-08

申请人： Hironori IKEZAWA ,  Yuji KUDO ,  Yasuhiro OMURA

发明人： Hironori IKEZAWA ,  Yuji KUDO ,  Yasuhiro OMURA

IPC分类号： G03F7/20

CPC分类号： G03F7/70341

摘要： A liquid immersion type projection optical system that can stably prevent the outflow of immersion liquid into inside of an optical system and can maintain good imaging performance. In the projection optical system of the present invention, an optical path between a light transmitting member (Lp) disposed closest to a second surface (W) side and the second surface is filled with a liquid (Lm1) having a refractive index greater than 1.1, and a light shielding film (36) for shielding the passing of light is formed on the side surfaces (41, 42) of the light transmitting member. When D is a space between the second surface and the light shielding film, Θ is a maximum incident angle of an image forming beam which reaches the second surface, and Ym is a maximum image height on the second surface, the condition of 0.25

摘要翻译： 一种液浸型投影光学系统，其可以稳定地防止浸没液体流入光学系统内部并且可以保持良好的成像性能。 在本发明的投影光学系统中，在最靠近第二表面（W）侧设置的透光构件（Lp）和第二表面之间的光路填充有折射率大于1.1的液体（Lm1） 并且在透光构件的侧面（41,42）上形成用于遮蔽光通过的遮光膜（36）。 当D是第二表面和遮光膜之间的空间时，Θ是到达第二表面的图像形成光束的最大入射角，Ym是第二表面上的最大图像高度，条件为0.25

公开(公告)号：US07688517B2

公开(公告)日：2010-03-30

申请号：US11907801

申请日：2007-10-17

申请人： Yasuhiro Omura ,  Hironori Ikezawa

发明人： Yasuhiro Omura ,  Hironori Ikezawa

IPC分类号： G02B3/00 ,  G02B1/06 ,  G02B17/00

CPC分类号： G02B17/0892 ,  G02B13/22 ,  G02B17/08 ,  G02B21/33 ,  G03F7/70225 ,  G03F7/70341

摘要： An optical system for ultraviolet light includes a plurality of optical elements made of a material transparent to ultraviolet light. At least two of the optical elements are utilized for forming at least one liquid lens group that has a first delimiting optical element, a second delimiting optical element, and a liquid lens, which is arranged in an interspace between the first delimiting optical element and the second delimiting optical element and contains a liquid transparent to ultraviolet light.

摘要翻译： 用于紫外光的光学系统包括由对紫外线透明的材料制成的多个光学元件。 至少两个光学元件用于形成至少一个具有第一限定光学元件，第二限定光学元件和液体透镜的液体透镜组，该透镜组布置在第一限定光学元件和第二限定光学元件之间的间隙中 第二分隔光学元件并且包含对紫外光透明的液体。

公开(公告)号：US07688422B2

公开(公告)日：2010-03-30

申请号：US11665490

申请日：2005-10-12

申请人： Hironori Ikezawa ,  Yasuhiro Omura

发明人： Hironori Ikezawa ,  Yasuhiro Omura

IPC分类号： G03B27/42 ,  G03B27/58 ,  G03B27/54

CPC分类号： G03F7/70341 ,  G02B13/143 ,  G03F7/70983

摘要： An imaging optical system is a system of a liquid immersion type permitting a plane-parallel plate in liquid to be replaced with another, without substantial degradation of imaging performance, while ensuring sufficiently high laser resistance of a boundary lens. The imaging optical system is provided with a first optically transparent member located nearest to a second plane, and a second optically transparent member located adjacent to the first optically transparent member. An optical path between the first optically transparent member and the second plane is fillable with a first liquid and an optical path between the first optically transparent member and the second optically transparent member is fillable with a second liquid. The imaging optical system satisfies the condition of 1

摘要翻译： 成像光学系统是一种允许在液体中的平面平行板被替代的液浸式系统，而不会显着降低成像性能，同时确保边界透镜的足够高的激光电阻。 成像光学系统设置有最靠近第二平面定位的第一透光构件和邻近第一光学透明构件定位的第二光学透明构件。 第一光学透明构件和第二平面之间的光路可以被第一液体填充，并且第一光学透明构件和第二光学透明构件之间的光路可以被第二液体填充。 成像光学系统满足1

公开(公告)号：US20080049336A1

公开(公告)日：2008-02-28

申请号：US11907797

申请日：2007-10-17

申请人： Yasuhiro Omura ,  Hironori Ikezawa ,  David Williamson

发明人： Yasuhiro Omura ,  Hironori Ikezawa ,  David Williamson

IPC分类号： G02B9/64 ,  G02B17/00 ,  G02B3/00 ,  G02B9/04 ,  G02B9/12 ,  G02B9/62

CPC分类号： G02B17/0892 ,  G02B13/22 ,  G02B17/08 ,  G02B21/33 ,  G03F7/70225 ,  G03F7/70341

摘要： An immersion optical system includes a plurality of lenses disposed along a light beam path of the immersion optical system. The plurality of lenses include a liquid immerged lens which is contactable with a liquid layer. An optically conjugate point of an object surface is formed in the light beam path of the immersion optical system. The object surface is contactable with a liquid.

摘要翻译： 浸入式光学系统包括沿着浸没式光学系统的光束路径设置的多个透镜。 多个透镜包括可与液体层接触的液体浸没透镜。 物镜表面的光学共轭点形成在浸没式光学系统的光束路径中。 物体表面可与液体接触。

公开(公告)号：US07978310B2

公开(公告)日：2011-07-12

申请号：US12719455

申请日：2010-03-08

申请人： Hironori Ikezawa ,  Yuji Kudo ,  Yasuhiro Omura

发明人： Hironori Ikezawa ,  Yuji Kudo ,  Yasuhiro Omura

IPC分类号： G03B27/54 ,  G03B27/32

CPC分类号： G03F7/70341

摘要： A liquid immersion type projection optical system that can stably prevent the outflow of immersion liquid into inside of an optical system and can maintain good imaging performance. In the projection optical system of the present invention, an optical path between a light transmitting member (Lp) disposed closest to a second surface (W) side and the second surface is filled with a liquid (Lm1) having a refractive index greater than 1.1, and a light shielding film (36) for shielding the passing of light is formed on the side surfaces (41, 42) of the light transmitting member. When D is a space between the second surface and the light shielding film, Θ is a maximum incident angle of an image forming beam which reaches the second surface, and Ym is a maximum image height on the second surface, the condition of 0.25

摘要翻译： 一种液浸型投影光学系统，其可以稳定地防止浸没液体流入光学系统内部并且可以保持良好的成像性能。 在本发明的投影光学系统中，在最靠近第二表面（W）侧设置的透光构件（Lp）和第二表面之间的光路填充有折射率大于1.1的液体（Lm1） 并且在透光构件的侧面（41,42）上形成用于遮蔽光通过的遮光膜（36）。 当D是第二表面和遮光膜之间的空间时，Θ是到达第二表面的图像形成光束的最大入射角，Ym是第二表面上的最大图像高度，条件为0.25

公开(公告)号：US07551362B2

公开(公告)日：2009-06-23

申请号：US11907679

申请日：2007-10-16

申请人： Yasuhiro Omura ,  Hironori Ikezawa

发明人： Yasuhiro Omura ,  Hironori Ikezawa

IPC分类号： G02B3/00 ,  G02B17/00

CPC分类号： G02B17/0892 ,  G02B13/22 ,  G02B17/08 ,  G02B21/33 ,  G03F7/70225 ,  G03F7/70341

摘要： An immersion optical system includes a liquid immerged optical element having an optical surface which is contactable with a liquid, a convex surface, and an optical axis. A side surface of the liquid immerged optical element is inclined with respect to the optical axis.

摘要翻译： 浸入式光学系统包括具有可与液体，凸面和光轴接触的光学表面的液体浸入式光学元件。 液体浸没的光学元件的侧表面相对于光轴倾斜。

公开(公告)号：US20080094696A1

公开(公告)日：2008-04-24

申请号：US11907679

申请日：2007-10-16

申请人： Yasuhiro Omura ,  Hironori Ikezawa

发明人： Yasuhiro Omura ,  Hironori Ikezawa

IPC分类号： G02B17/08 ,  G02B3/00

CPC分类号： G02B17/0892 ,  G02B13/22 ,  G02B17/08 ,  G02B21/33 ,  G03F7/70225 ,  G03F7/70341

摘要： An immersion optical system includes a liquid immerged optical element having an optical surface which is contactable with a liquid, a convex surface, and an optical axis. A side surface of the liquid immerged optical element is inclined with respect to the optical axis.

摘要翻译： 浸入式光学系统包括具有可与液体，凸面和光轴接触的光学表面的液体浸入式光学元件。 液体浸没的光学元件的侧表面相对于光轴倾斜。