MEMS gyroscopes with reduced errors
    1.
    发明授权
    MEMS gyroscopes with reduced errors 有权
    降低误差的MEMS陀螺仪

    公开(公告)号:US09212908B2

    公开(公告)日:2015-12-15

    申请号:US13456706

    申请日:2012-04-26

    摘要: In comb drive vibratory gyroscopes, drive-induced Coriolis accelerometer offset is effectively canceled by demodulating the output during equal times of in-phase and anti-phase drive of the shuttle with respect to the velocity signal used for angular rate demodulation. This reduces or eliminates the corresponding thermal and die-stress effects otherwise needing calibration.

    摘要翻译: 在梳状驱动振动陀螺仪中,通过在相对于用于角速率解调的速度信号的同相和反相驱动的相等时间期间解调输出,驱动诱导的科里奥利加速度计偏移被有效地消除。 这可以减少或消除另外需要校准的相应的热和晶粒应力作用。

    Method and apparatus for a micromachined multisensor
    2.
    发明授权
    Method and apparatus for a micromachined multisensor 有权
    微机械多传感器的方法和装置

    公开(公告)号:US07980133B2

    公开(公告)日:2011-07-19

    申请号:US12194288

    申请日:2008-08-19

    IPC分类号: G01P9/04

    摘要: In a micromachined devices having a movable shuttle driven in oscillation, measuring the electrical charge accumulated on opposing drive capacitors to determine the displacement of the movable shuttle. Alternately, in such a micromachined device, measuring the electrical charge accumulated on a drive capacitor and comparing the measured electrical charge to a nominal electrical charge to determine the displacement of the movable shuttle.

    摘要翻译: 在具有在振荡中驱动的可移动梭的微加工装置中,测量累积在相对的驱动电容器上的电荷,以确定可移动梭的位移。 或者,在这种微加工装置中,测量累积在驱动电容器上的电荷并将测量的电荷与标称电荷比较以确定可移动梭的位移。

    Offset Detection and Compensation for Micromachined Inertial Sensors
    3.
    发明申请
    Offset Detection and Compensation for Micromachined Inertial Sensors 有权
    微机械惯性传感器的偏移检测和补偿

    公开(公告)号:US20110041609A1

    公开(公告)日:2011-02-24

    申请号:US12545334

    申请日:2009-08-21

    IPC分类号: G01P15/10

    CPC分类号: G01P15/097 G01C19/5712

    摘要: Error sources relating to the drive signal applied to the resonator of an inertial sensor, such as in-phase offset errors relating to the drive signal and/or electronic pass-through of the drive signal to accelerometer sense electronics, are detected by modulating the drive signal and sensing accelerometer signals that are induced by the modulated drive signal. Error sources related to aerodynamics of an inertial sensor resonator are detected by modulating the distance between the resonator and the underlying substrate and sensing accelerometer signals that are induced by such modulation. Compensating signals may be provided to substantially cancel errors caused by such error sources.

    摘要翻译: 与施加到惯性传感器的谐振器的驱动信号相关的误差源,例如与驱动信号相关的同相偏移误差和/或驱动信号到加速度计感测电子器件的电子通过,通过调制驱动器 由调制的驱动信号引起的信号和感测加速度计信号。 与惯性传感器谐振器的空气动力学有关的误差源通过调制谐振器与底层衬底之间的距离并感测由这种调制引起的加速度计信号来检测。 可以提供补偿信号以基本上消除由这种错误源引起的错误。

    Analog-to-Digital Converter Using Digital Output as Dither
    4.
    发明申请
    Analog-to-Digital Converter Using Digital Output as Dither 有权
    使用数字输出作为抖动的模数转换器

    公开(公告)号:US20100188274A1

    公开(公告)日:2010-07-29

    申请号:US12478936

    申请日:2009-06-05

    申请人: John A. Geen

    发明人: John A. Geen

    IPC分类号: H03M1/20 H03M3/00

    CPC分类号: H03M3/334 H03M3/43 H03M3/456

    摘要: An analog-to-digital converter includes a delta circuit, a sigma circuit, and a quantizer circuit and further includes a feedback circuit that modulates a reference voltage provided to the quantizer circuit based on the quantizer circuit output. Modulation of the quantizer reference voltage dithers the quantizer circuit to effectively reduce or avoid lock bands. The analog-to-digital converter may be used in combination with a microelectromechanical (MEMS) device such as a gyroscope, an accelerometer, or a pressure sensor.

    摘要翻译: 模数转换器包括增量电路,Σ电路和量化器电路,还包括基于量化器电路输出调制提供给量化器电路的参考电压的反馈电路。 量化器参考电压的调制使量化器电路抖动以有效地减少或避免锁定频带。 模拟 - 数字转换器可以与诸如陀螺仪,加速度计或压力传感器的微机电(MEMS)装置组合使用。

    Method for continuous sensor self-test
    5.
    发明授权
    Method for continuous sensor self-test 有权
    连续传感器自检的方法

    公开(公告)号:US07086270B2

    公开(公告)日:2006-08-08

    申请号:US10785828

    申请日:2004-02-24

    IPC分类号: G01P9/04

    CPC分类号: G01D3/08 G01D18/002 G01D21/00

    摘要: A method and device for self-test of a sensor. The method includes stimulating the sensor with signals that generate sensor outputs at a frequency that differs from the frequency of expected sensed parameter signals. The sensor output is filtered to remove the effects of the stimulation inputs, generating a sensed parameter signal. The unfiltered sensor output is compared to the expected output of the sensor with the stimulus input. A malfunctioning sensor may be detected by the comparison and appropriate action may then be taken.

    摘要翻译: 一种用于传感器自检的方法和装置。 该方法包括以与预期的感测参数信号的频率不同的频率产生传感器输出的信号来刺激传感器。 过滤传感器输出以消除刺激输入的影响,产生感测的参数信号。 未过滤的传感器输出与传感器的预期输出与刺激输入进行比较。 可以通过比较来检测故障传感器,然后可以采取适当的动作。

    Six degree-of-freedom micro-machined multi-sensor
    6.
    发明授权
    Six degree-of-freedom micro-machined multi-sensor 有权
    六自由度微加工多传感器

    公开(公告)号:US06848304B2

    公开(公告)日:2005-02-01

    申请号:US10463653

    申请日:2003-06-17

    申请人: John A. Geen

    发明人: John A. Geen

    摘要: A six degree-of-freedom micro-machined multi-sensor that provides 3-axes of acceleration sensing, and 3-axes of angular rate sensing, in a single multi-sensor device. The six degree-of-freedom multi-sensor device includes a first multi-sensor substructure providing 2-axes of acceleration sensing and 1-axis of angular rate sensing, and a second multi-sensor substructure providing a third axis of acceleration sensing, and second and third axes of angular rate sensing. The first and second multi-sensor substructures are implemented on respective substrates within the six degree-of-freedom multi-sensor device.

    摘要翻译: 一个六自由度微加工多传感器,可在单个多传感器设备中提供3轴加速度感测和3轴角速率检测。 六自由度多传感器装置包括提供加速度感测的2轴和角速度感测的1轴的第一多传感器子结构和提供加速度感测的第三轴的第二多传感器子结构,以及 第二轴和第三轴的角速度检测。 第一和第二多传感器子结构实现在六自由度多传感器装置内的相应基板上。

    Coupling for multiple masses in a micromachined device
    7.
    发明授权
    Coupling for multiple masses in a micromachined device 失效
    在微加工装置中耦合多个质量

    公开(公告)号:US5635638A

    公开(公告)日:1997-06-03

    申请号:US469896

    申请日:1995-06-06

    申请人: John A. Geen

    发明人: John A. Geen

    IPC分类号: G01C19/5719 G01P9/04

    CPC分类号: G01C19/5719

    摘要: A micromachined device has two suspended masses positioned near each other, each of the masses being dithered along a dither axis. Two couplings, each including an arcuate member and an anchored support beam, are provided between the masses to allow relative anti-phase movement and to resist relative in-phase movement. The coupling extends around a region intermediate the masses where a dither detection device is disposed.

    摘要翻译: 微加工装置具有彼此靠近定位的两个悬挂质量,每个质量块沿抖动轴线抖动。 在质量块之间设置两个联接器,每个连接件包括弓形构件和锚固支撑梁,以允许相对的反相运动并抵抗相对的相位运动。 联接器围绕设置有抖动检测装置的质量块的区域周围延伸。

    Analog-to-digital conversion
    8.
    发明授权
    Analog-to-digital conversion 失效
    模数转换

    公开(公告)号:US4839650A

    公开(公告)日:1989-06-13

    申请号:US204026

    申请日:1988-06-08

    IPC分类号: H03M1/00 H04J3/10

    摘要: Analog-to-digital converters are subject to errors including the known half least significant bit quantization error and also bit weighting errors due to lack of an ideal binary relationship between the transition points of all the bits. The known statistical average error reduction method in which a relatively small dither component is added to the analog input signal can only fractionally reduce overall error and has little effect on bit weighting errors. Herein the analog signal is added to a dither signal, for example a ramp signal, which varies through half the peak to peak digitization range of the converter so that irrespective of the input signal all output signal bits, other than the most significant bit, are "on" for one half of the sampling period. The result is that all the less significant bit errors are cancelled leaving only the easily compensated most significant bit error. A random component can be added to the dither signal to reduce the quantization error.

    Multiple axis ring laser gyroscopes
    9.
    发明授权
    Multiple axis ring laser gyroscopes 失效
    多轴环激光陀螺仪

    公开(公告)号:US4762415A

    公开(公告)日:1988-08-09

    申请号:US858896

    申请日:1986-04-25

    CPC分类号: H01S3/083 G01C19/668

    摘要: In a multiple axis ring laser gyroscope in which one or more of the laser cavity corner mirrors is or are shared by different cavities and in which the laser beams in these different cavities operate at the same nominal frequency, scattering of the beam in one cavity into another cavity by the shared mirror(s) may produce disadvantageous lock-in effects. To at least lessen this possibility, the frequencies of the beams in the gyroscope disclosed herein are offset one from another, the offset being sufficient to affect lock in but not so great that the frequency of any beam is overly far from the lasing medium gain curve center. The frequency offsets may be produced by introducing offset bias signals into some channels of the gyroscope path length control servosystem.

    摘要翻译: 在多轴环激光陀螺仪中,其中一个或多个激光腔角镜由不同腔体共用或共用,并且其中这些不同腔中的激光束以相同的标称频率工作,将光束在一个空腔中散射成 通过共享反射镜的另一个空腔可能产生不利的锁定效应。 为了至少减轻这种可能性,本文公开的陀螺仪中的波束的频率彼此偏移,偏移量足以影响锁定但不太大,使得任何波束的频率与激光介质增益曲线过度相距 中央。 可以通过将偏移偏置信号引入陀螺仪路径长度控制伺服系统的某些通道来产生频率偏移。

    Detection of movement of a cyclic interference waveform, such as in a
ring laser gyroscope
    10.
    发明授权
    Detection of movement of a cyclic interference waveform, such as in a ring laser gyroscope 失效
    检测循环干扰波形的移动,如环形激光陀螺仪

    公开(公告)号:US4595293A

    公开(公告)日:1986-06-17

    申请号:US526871

    申请日:1983-08-26

    申请人: John A. Geen

    发明人: John A. Geen

    摘要: Detection means comprise at least three photodiodes 1, 2 and 3 which are spaced so as to expand to half a wavelength of an interference waveform produced in a ring laser gyroscope. The three photodiodes 1, 2 and 3 produce respective currents A, B and C the magnitudes of which are detected to sense the magnitude and direction of the movement of the interference waveform. The currents A, B and C are fed to a current mirror configured as a Norton amplifier input state 4, the latter producing signals which are fed to logic circuitry for obtaining signals representative of the rate and direction of the movement of the interference waveform.

    摘要翻译: 检测装置包括至少三个光电二极管1,2和3,其间隔开以扩展到在环形激光陀螺仪中产生的干涉波形的一半波长。 三个光电二极管1,2和3产生各自的电流A,B和C,其电流大小被检测以感测干扰波形的移动的幅度和方向。 电流A,B和C被馈送到配置为诺顿放大器输入状态4的电流镜,后者产生馈送到逻辑电路的信号,以获得表示干扰波形的移动速率和方向的信号。