摘要:
A duty correcting circuit includes a duty steerer circuit, a differential clock generator, and a charge pump circuit. The duty steerer circuit corrects a duty cycle of an input clock signal in response to a duty control signal and generates an output clock signal. The differential clock generator generates two internal clock signals having a phase difference of 180° from each other based on the output clock signal. The charge pump circuit performs a charge pump operation in a differential mode in response to the internal clock signals to generate a duty control signal.
摘要:
A vacuum processing apparatus is provided with: a vacuum processing tank; a first gas introduction section that is constructed such that a first processing gas in a radical state is introduced into the vacuum processing tank and is guided to a semiconductor wafer; and a second gas introduction section that is constructed such that a second processing gas that reacts with the first processing gas is introduced into the vacuum processing tank and is guided to the semiconductor wafer. The second gas introduction section has two shower nozzles provided at positions on either side of an introduction pipe provided for the first gas introduction section. According to this vacuum processing apparatus, high speed processing of a number of processing objects can be achieved. Moreover, the in-plane uniformity of the processing objects after processing can be ensured.
摘要:
A duty correcting circuit includes a duty steerer circuit, a differential clock generator, and a charge pump circuit. The duty steerer circuit corrects a duty cycle of an input clock signal in response to a duty control signal and generates an output clock signal. The differential clock generator generates two internal clock signals having a phase difference of 180° from each other based on the output clock signal. The charge pump circuit performs a charge pump operation in a differential mode in response to the internal clock signals to generate a duty control signal.
摘要:
A noncontact method for measuring currents flowing through superconductive wires connected in parallel is provided. The method includes arranging hall sensors for measuring voltage levels based on magnetic fields generated around the superconductive wires, setting a matrix relation between the measured voltage values, values of currents flowing through the superconductive wires, and a variable matrix having variables defining relations between the voltage values and the current values, applying predetermined current levels to the superconductive wires a number of times and measuring voltage values through the hall sensors, substituting the predetermined current values and the measured voltage values into the matrix relation to calculate the variables of the variable matrix, and substituting the calculated variable matrix and unknown voltage values, measured by the hall sensors when unknown currents flow through the superconductive wires, into the matrix relation to calculate values of the unknown currents flowing through the superconductive wires.
摘要:
A chamber-status monitoring apparatus includes a plurality of chambers, a time-division multiplexer configured to receive, via optical fiber probes, optical signals from each chamber, to divide each optical signal into first time slots having a predetermined duration, and to multiplex the first time slots to generate an OTDM signal, a multi-input optical emission spectroscope configured to receive and disperse the OTDM signal according to wavelengths to measure spectrum information, and a controller configured to divide the spectrum information of the dispersed OTDM signal into second time slots with a predetermined time interval therebetween, to classify the second time slots according to the chambers to obtain spectrum information of the optical signals of the individual chambers, and to control endpoint detection in each of the chambers in accordance with the spectrum information of the optical signal of the corresponding chamber.
摘要:
A clock multiplier includes a phase-frequency detector, a voltage-current converter, a duty ratio control circuit, a plurality of variable delay cells and an edge combiner. The phase-frequency detector generates control signals. The voltage-current converter converts the control signals to generate first and second current control voltages. The duty ratio control circuit modifies the duty ratio of an input clock signal based on the first and second current control voltages. Each of the variable delay cells generates a triangular wave voltage based on the modified input signal, generates a square wave voltage based on the triangular wave voltage to generate a delay signal. The edge combiner generates a plurality of multiplied clocks based on the delay signals from the variable delay cells.
摘要:
A clock multiplier for multiplying an input clock by N includes a phase/frequency detector, a clock selector, and a voltage-controlled delay line. The phase/frequency detector generates a first control signal and a second control signal according to a frequency/phase difference between the input clock and a count signal indicating a signal that is generated by delaying the input clock N times. The clock selector selects one of the input clock and a feedback clock based on the input clock and the count signal. The voltage-controlled delay line adjusts a delay time of the selected signal according to a control voltage that is generated based on the first control signal and the second control signal, and outputs the feedback clock based on the adjusted signal. The clock multiplier operates without accumulating a frequency/phase difference between the input clock and the output clock when the multiplying ratio is increased.
摘要:
The present invention discloses a superconducting wire transposition method and superconducting transformer whose winding is formed of superconducting wire to enable the formation of transpositions. The superconducting wire transposition method characterized of different winding start positions of at least two disks wound with a plurality of parallel superconductive wires, and usage of different superconducting wires for conductors to be connected between the disks, thereby forming transpositions outside of the disks. Preferably, part of the plurality of disks are rotatably assembled in pairs so as to form transpositions while maintaining a total number of windings equally. Therefore, according to the present invention, transpositions can be formed without bending or welding superconducting wires and thus, deteriorations in superconductivity can be prevented.
摘要:
A voltage-controlled oscillator includes a bias circuit and a delay circuit. The bias circuit may generate a bias voltage signal pair having levels that are based on the voltage level of an input voltage signal and that are constrained by the values of a maximum current signal and a minimum current signal that are generated in the bias circuit. The delay circuit generates an output signal having a frequency that varies in response to the bias voltage signal pair. Because an operating frequency range of a voltage-controlled oscillator VCO is limited by a bias circuit, the VCO can operate with reduced gain and can limit the maximum operating frequency to a predetermined level. The VCO may also include a PTAT current generator in the bias circuit which can allow the VCO to compensate for variations of the VCO output frequency based on temperature.
摘要:
Provided is a multiple transposition method for superconducting wire, by making each superconducting wire unit from second-generation superconducting wires that were firstly transposed and then transposing each superconducting wire unit in such a manner that the phase of each unit can be changed along the length, comprising preparing wires by making curves on superconducting wires in such a manner that the superconducting wires of a thin multiple layer grown epitaxially are slit in zigzags and then making the curves repeatedly and by machining the wires with a desired length; making first-transposed superconducting wire units by combining a plurality of the prepared wires such that curves of adjacent wires come in touch to each other and are superposed; preparing a superconducting wire unit bundle by arranging the first-transposed superconducting wires units and by locating a plurality of the first-transposed superconducting wire units in parallel along the length; and making a second transposition on the first-transposed superconducting wire units by rotating the plurality of superconducting wire units on the central axis of the superconducting wire unit bundle along the length to be twisted and combined with each other.