利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

22 条记录 (耗时 0.021 秒)

    Organic electroluminescent device with SiN layer containing hydrogen and fluorine
    1.
    发明授权
    Organic electroluminescent device with SiN layer containing hydrogen and fluorine 有权
    具有含有氢和氟的SiN层的有机电致发光器件

    公开(公告)号：US08063555B2

    公开(公告)日：2011-11-22

    申请号：US12611593

    申请日：2009-11-03

    申请人： Koichi Matsuda ,  Yukito Aota

    发明人： Koichi Matsuda ,  Yukito Aota

    IPC分类号： H01J1/62 ,  H01J63/04

    CPC分类号： H01L51/5253 ,  H01L51/5281 ,  H01L2251/5315 ,  H01L2251/5346

    摘要： An organic EL device includes a substrate; a layered structure including a first electrode, an organic layer, and a second electrode disposed on the substrate in this order; and laminated protective layers surrounding at least the layered structure. The protective layers are composed of silicon, nitrogen, hydrogen, and fluorine. The fluorine content in the outermost protective layer is in the range of 0.01 to 1.0 atomic percent.

    摘要翻译： 有机EL器件包括衬底; 依次包括第一电极，有机层和设置在基板上的第二电极的分层结构; 以及至少包围层状结构的层叠保护层。 保护层由硅，氮，氢和氟组成。 最外层保护层中的氟含量在0.01〜1.0原子％的范围内。

    METHOD FOR PRODUCING ORGANIC LIGHT-EMITTING DEVICE
    3.
    发明申请
    METHOD FOR PRODUCING ORGANIC LIGHT-EMITTING DEVICE 失效
    生产有机发光装置的方法

    公开(公告)号：US20090288680A1

    公开(公告)日：2009-11-26

    申请号：US12468785

    申请日：2009-05-19

    申请人： Kumiko Kaneko ,  Nozomu Izumi ,  Koichi Matsuda ,  Yukito Aota ,  Hiroshi Sugai

    发明人： Kumiko Kaneko ,  Nozomu Izumi ,  Koichi Matsuda ,  Yukito Aota ,  Hiroshi Sugai

    IPC分类号： B08B3/04 ,  B08B3/08

    CPC分类号： H01L27/3276 ,  H01L27/3288 ,  H01L51/5253 ,  H01L51/56 ,  H01L2227/326 ,  H01L2251/566

    摘要： A method for producing an organic light-emitting device is provided for an organic light-emitting device having a substrate provided with external connection terminals, organic light-emitting elements provided on the substrate, and a protective film that covers the organic light-emitting elements. The method includes, sequentially, providing a protective film removal layer on the external connection terminals, forming the protective film on the substrate, dividing the substrate on which the protective film has been formed, and cleaning the substrate with water, an aqueous solution, or a solvent. The protective film removal layer and the protective film are removed from the external connection terminals as a result of cleaning the substrate.

    摘要翻译： 本发明提供一种有机发光装置的制造方法，其具有设置有外部连接端子的基板，设置在基板上的有机发光元件和覆盖有机发光元件的保护膜的有机发光装置 。 该方法包括依次在外部连接端子上设置保护膜去除层，在基板上形成保护膜，对已经形成有保护膜的基板进行分割，并用水，水溶液或 溶剂。 作为清洗基板的结果，从外部连接端子除去保护膜去除层和保护膜。

    Plasma processing method and apparatus
    4.
    发明授权
    Plasma processing method and apparatus 失效
    等离子体处理方法和装置

    公开(公告)号：US07587989B2

    公开(公告)日：2009-09-15

    申请号：US10755300

    申请日：2004-01-13

    申请人： Yukito Aota ,  Masahiro Kanai

    发明人： Yukito Aota ,  Masahiro Kanai

    IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H05B31/26

    CPC分类号： H01J37/32532 ,  C23C16/515

    摘要： In a plasma processing method, on a back side of a cathode electrode is provided at least one conductor plate d.c. potentially insulated from the cathode electrode and an opposing electrode, and the cathode electrode and the conductor plate are enclosed with a shielding wall such that a ratio of an inter-electrode coupling capacitance provided by the cathode electrode and the opposing electrode to a coupling capacitance provided by the cathode electrode and a bottom surface of the shielding wall on the back side of the conductor plate is not less than a predetermined value. Thereby, a high-quality, high-speed plasma processing is realized.

    摘要翻译： 在等离子体处理方法中，在阴极电极的背面设置有至少一个导体板d.c. 可能与阴极电极和对置电极绝缘，并且阴极电极和导体板被屏蔽壁包围，使得由阴极电极和相对电极提供的电极间耦合电容与提供的耦合电容的比率 通过阴极电极和导体板背侧的屏蔽壁的底面不小于预定值。 由此，实现了高质量的高速等离子体处理。

    Plasma-processing apparatus
    7.
    发明授权
    Plasma-processing apparatus 失效
    等离子体处理装置

    公开(公告)号：US07582185B2

    公开(公告)日：2009-09-01

    申请号：US10745604

    申请日：2003-12-29

    申请人： Yukito Aota ,  Masahiro Kanai ,  Atsushi Koike ,  Tomokazu Sushihara

    发明人： Yukito Aota ,  Masahiro Kanai ,  Atsushi Koike ,  Tomokazu Sushihara

    IPC分类号： C23C16/00 ,  C23F1/00 ,  H01L21/306 ,  H05B31/26

    CPC分类号： H01J37/32174 ,  H01J37/32082

    摘要： A plasma-processing apparatus having a high frequency power application electrode in which plasma is generated by supplying VHF power to the high frequency power application electrode. The plasma-processing apparatus has an impedance-matching equipment comprising a capacitive element and an inductive element, which are mutually connected in series. The apparatus is arranged so that the capacitive element and the inductive element of the impedance-matching equipment are symmetrical with respect to the center of the high frequency power application electrode.

    摘要翻译： 一种具有高频功率施加电极的等离子体处理装置，其中通过向高频电力施加电极提供VHF电力而产生等离子体。 等离子体处理装置具有阻抗匹配装置，其包括串联连接的电容元件和电感元件。 该装置被布置成使得阻抗匹配设备的电容元件和电感元件相对于高频功率施加电极的中心是对称的。

    ORGANIC ELECTROLUMINESCENT DEVICE
    10.
    发明申请
    ORGANIC ELECTROLUMINESCENT DEVICE 有权
    有机电致发光器件

    公开(公告)号：US20070159095A1

    公开(公告)日：2007-07-12

    申请号：US11611352

    申请日：2006-12-15

    申请人： KOICHI MATSUDA ,  YUKITO AOTA

    发明人： KOICHI MATSUDA ,  YUKITO AOTA

    IPC分类号： H01L51/00

    CPC分类号： H01L51/5253 ,  H01L51/5281 ,  H01L2251/5315 ,  H01L2251/5346

    摘要： An organic EL device includes a substrate; a layered structure including a first electrode, an organic layer, and a second electrode disposed on the substrate in this order; and laminated protective layers surrounding at least the layered structure. The protective layers are composed of silicon, nitrogen, hydrogen, and fluorine. The fluorine content in the outermost protective layer is in the range of 0.01 to 1.0 atomic percent.

    摘要翻译： 有机EL器件包括衬底; 依次包括第一电极，有机层和设置在基板上的第二电极的分层结构; 以及至少包围层状结构的层叠保护层。 保护层由硅，氮，氢和氟组成。 最外层保护层中的氟含量为0.01〜1.0原子％。