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    Flow guide device for dual-electrode discharge cavity, dual electrode discharge cavity utilize the same and excimer laser
    1.
    发明授权
    Flow guide device for dual-electrode discharge cavity, dual electrode discharge cavity utilize the same and excimer laser 有权
    双电极放电腔的导流装置，双电极放电腔使用相同的准分子激光器

    公开(公告)号：US09350135B2

    公开(公告)日：2016-05-24

    申请号：US14646176

    申请日：2013-02-07

    Applicant: ACADEMY OF OPTO-ELECTRONICS, CHINESE ACADEMY OF SCIENCES

    Inventor： Bin Liu ,  Jinbin Ding ,  Kuibo Wang ,  Yu Wang ,  Yi Zhou ,  Jiangshan Zhao

    IPC: H01S3/22 ,  H01S3/036 ,  H01S3/225 ,  H01S3/038 ,  H01S3/097

    CPC classification number: H01S3/036 ,  H01S3/03 ,  H01S3/038 ,  H01S3/076 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/2308

    Abstract: The present disclosure proposes a flow guide device for a discharge cavity having a symmetrical configuration and including two pairs of electrodes; the flow guide device comprises two rotors which correspond to one pair of the two pairs of electrodes, respectively, installed positions of which are symmetrical about a symmetrical plane of the discharge cavity and is beneath the electrodes, a rotational axis of which is parallel to an axial direction of the electrodes which is parallel to a base plane of the discharge cavity, and the two rotors have opposite rotation directions and identical rotation speeds. The flow guide device further comprises a spoiler plate and a flow guide plate so that the discharge gas flow passes through the discharge cavity in a manner of high speed and uniform cycling when flowing through the discharge region. Thus, the discharge quality is guaranteed so as to improve the energy and reliability of the laser.

    Abstract translation: 本公开提出了一种具有对称构造并包括两对电极的排放腔的流动引导装置; 流动引导装置包括分别对应于一对两对电极的两个转子，其安装位置分别关于放电腔的对称平面对称，并且在电极的下方，其旋转轴线平行于 电极的轴向方向平行于排出腔的底面，并且两个转子具有相反的旋转方向和相同的转速。 导流装置还包括扰流板和导流板，使得当流过放电区域时，排出气体流以高速和均匀的循环方式通过排出腔。 因此，保证放电质量，以提高激光器的能量和可靠性。

    SINGLE-CAVITY DUAL-ELECTRODE DISCHARGE CAVITY AND EXCIMER LASER
    2.
    发明申请
    SINGLE-CAVITY DUAL-ELECTRODE DISCHARGE CAVITY AND EXCIMER LASER 有权
    单孔双电极放电孔和激光激光器

    公开(公告)号：US20140023101A1

    公开(公告)日：2014-01-23

    申请号：US14040490

    申请日：2013-09-27

    Applicant: Academy of Opto-Electronics, Chinese Academy of Sciences

    Inventor： Yu Wang ,  Yi Zhou ,  Jinbin Ding ,  Bin Liu ,  Lijia Zhang ,  Jiangshan Zhao ,  Pengfei Sha

    IPC: H01S3/08 ,  H01S3/03

    CPC classification number: H01S3/08 ,  H01S3/005 ,  H01S3/03 ,  H01S3/036 ,  H01S3/0384 ,  H01S3/0385 ,  H01S3/0388 ,  H01S3/076 ,  H01S3/08068 ,  H01S3/09713 ,  H01S3/10092 ,  H01S3/225 ,  H01S3/2333 ,  H01S3/235 ,  H01S3/2383

    Abstract: A single-cavity dual-electrode discharge cavity and an excimer laser including such a discharge cavity are disclosed. The discharge cavity may comprise a cavity body and two sets of main discharge electrodes. The cavity body may comprise a left chamber and a right chamber arranged to form a symmetric dual-chamber cavity. The left and right chambers can interface and communicate with each other at a plane of symmetry of the entire discharge cavity. The two sets of main discharge electrodes can be disposed in the left and right chambers on the upper side, respectively. According to the present disclosure, the single-cavity configuration can be used to achieve functions of dual-cavity configurations, such as MOPA, MOPO, and MOPRA. Thus, it is possible to reduce system complexities and also ensure synchronization of discharging in the discharge cavity.

    Abstract translation: 公开了一种单腔双电极放电腔和包括这种放电腔的准分子激光器。 放电腔可以包括空腔体和两组主放电电极。 空腔体可以包括左室和右室，其布置成形成对称的双室腔。 左和右室可以在整个排放腔的对称平面处彼此接合和连通。 两组主放电电极可以分别设置在上侧的左右室中。 根据本公开，可以使用单腔配置来实现双腔配置的功能，例如MOPA，MOPO和MOPRA。 因此，可以降低系统复杂性并且还确保放电腔中的放电同步。

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