公开(公告)号：US20230175136A1

公开(公告)日：2023-06-08

申请号：US18101666

申请日：2023-01-26

Applicant: ASM IP Holding B.V.

Inventor： Dieter Pierreux ,  Werner Knaepen ,  Bert Jongbloed ,  Jeroen Fluit

IPC: C23C16/48 ,  C23C16/455 ,  C23C16/44 ,  C23C16/458

CPC classification number: C23C16/48 ,  C23C16/45553 ,  C23C16/4405 ,  C23C16/4583

Abstract: The disclosure relates to a substrate processing apparatus, comprising: a first reactor constructed and arranged to process a rack with a plurality of substrates therein; a second reactor constructed and arranged to process a substrate; and, a substrate transfer device constructed and arranged to transfer substrates to and from the first and second reactor. The second reactor may be provided with an illumination system constructed and arranged to irradiate ultraviolet radiation within a range from 100 to 500 nanometers onto a top surface of at least a substrate in the second reactor.

公开(公告)号：US20210343554A1

公开(公告)日：2021-11-04

申请号：US17242519

申请日：2021-04-28

Applicant: ASM IP Holding B.V.

Inventor： Theodorus G.M. Oosterlaken ,  Jeroen Fluit

IPC: H01L21/677

Abstract: A vertical batch furnace assembly for processing wafers having a cassette handling space, a wafer handling space, and a first wall and separating the cassette handling space from the wafer handling space. The first wall has at least one wafer transfer opening in front of which, at a side of the first wall which is directed to the cassette handling space, a wafer transfer position for a wafer cassette is provided. The cassette handling space comprises a cassette storage having a plurality of cassette storage positions and a cassette handler configured to transfer wafer cassettes between the cassette storage positions and the wafer transfer position. The cassette handler has a first cassette handler arm and a second cassette handler arm.

公开(公告)号：US11915960B2

公开(公告)日：2024-02-27

申请号：US16935288

申请日：2020-07-22

Applicant: ASM IP Holding B.V.

Inventor： Jeroen Fluit

IPC: H01L21/677 ,  H01L21/67 ,  H01L21/673 ,  B65G1/04 ,  F27B17/00 ,  F27D3/12 ,  F27D3/00 ,  F27D15/02

CPC classification number: H01L21/67757 ,  B65G1/045 ,  F27B17/0025 ,  F27D3/0084 ,  F27D3/12 ,  F27D15/02 ,  H01L21/67109 ,  H01L21/67303 ,  B65G2201/0297 ,  F27D2003/0051 ,  F27D2003/0087

Abstract: A vertical batch furnace assembly for processing wafers comprising a cassette handling space, a wafer handling space, and an internal wall separating the cassette handling space and the wafer handling space. The cassette handling space is provided with a cassette storage configured to store a plurality of wafer cassettes. The cassette handling space is also provided with a cassette handler configured to transfer wafer cassettes between the cassette storage and a wafer transfer position. The wafer handling space is provided with a wafer handler configured to transfer wafers between a wafer cassette in the wafer transfer position and a wafer boat. The internal wall is provided with a wafer transfer opening adjacent the wafer transfer position for a wafer cassette from or to which wafers are to be transferred. The cassette storage comprises a cassette storage carousel with a diameter between 1.1 and 1.6 meter.

公开(公告)号：US11798830B2

公开(公告)日：2023-10-24

申请号：US17980016

申请日：2022-11-03

Applicant: ASM IP Holding B.V.

Inventor： Theodorus G. M. Oosterlaken ,  Jeroen Fluit

IPC: H01L21/677

CPC classification number: H01L21/6773 ,  H01L21/67706 ,  H01L21/67757

Abstract: A vertical batch furnace assembly for processing wafers having a cassette handling space, a wafer handling space, and a first wall and separating the cassette handling space from the wafer handling space. The first wall has at least one wafer transfer opening in front of which, at a side of the first wall which is directed to the cassette handling space, a wafer transfer position for a wafer cassette is provided. The cassette handling space comprises a cassette storage having a plurality of cassette storage positions and a cassette handler configured to transfer wafer cassettes between the cassette storage positions and the wafer transfer position. The cassette handler has a first cassette handler arm and a second cassette handler arm.

公开(公告)号：US11378337B2

公开(公告)日：2022-07-05

申请号：US16827012

申请日：2020-03-23

Applicant: ASM IP Holding B.V.

Inventor： Jeroen Fluit

IPC: F27D1/18 ,  F27D3/00 ,  F27D3/12 ,  E05F1/00 ,  E06B7/22

Abstract: The disclosure relates to a door opener to open a door of a cassette with substrates, the opener having a first wall to engage with the cassette and having a first opening to transfer the door and the substrates and a second wall opposite the first wall and having a second opening to transfer substrates. The door opener may have a closure device to hold the door of the cassette and having first and second sides and moveable in a chamber formed between the first and second wall. The opener may have a first actuator to move the closure device in a first direction from a first closing position where the first side closes against the first wall to a second closing position where the second side closes against the second wall, and from the second closing position to a transport position in between the first and second closing positions.

公开(公告)号：US20250034703A1

公开(公告)日：2025-01-30

申请号：US18781473

申请日：2024-07-23

Applicant: ASM IP Holding B.V.

Inventor： Quentin Nikitas Nicolas Lionel Eric Tricas ,  Alessandro Viva ,  Theodorus G.M. Oosterlaken ,  Jeroen Fluit

IPC: C23C16/448

Abstract: A vapor phase precursor delivery system for delivering a vapor phase precursor for depositing a layer in a vapor phase deposition apparatus is disclosed. The precursor delivery vessel is constructed and arranged to store a solid precursor and to deliver a vapor phase precursor at a vessel outlet. The system being provided with a plate provided with holes to allow for gas transport between the chamber and the part of the vessel where the solid precursor is stored.

公开(公告)号：US12040199B2

公开(公告)日：2024-07-16

申请号：US16202941

申请日：2018-11-28

Applicant: ASM IP Holding B.V.

Inventor： Jeroen Fluit

IPC: H01L21/67 ,  H01L21/673 ,  H01L21/677 ,  H01L21/687

CPC classification number: H01L21/67098 ,  H01L21/67303 ,  H01L21/6773 ,  H01L21/67742 ,  H01L21/67751 ,  H01L21/67778 ,  H01L21/68707

Abstract: The disclosure relates to substrate processing apparatus, with a first and second reactor, each reactor configured with an elevator to transfer a boat with substrates to the reactor. The apparatus having a boat transfer device to transfer the boat with substrates between a substrate loading station, the first and/or second elevator and a cool down station. The substrate loading station and the cool down station may be arranged on opposite sides of the first and second elevator.

公开(公告)号：US11629407B2

公开(公告)日：2023-04-18

申请号：US16797346

申请日：2020-02-21

Applicant: ASM IP Holding B.V.

Inventor： Dieter Pierreux ,  Werner Knaepen ,  Bert Jongbloed ,  Jeroen Fluit

IPC: C23C16/48 ,  C23C16/455 ,  C23C16/44 ,  C23C16/458

Abstract: The disclosure relates to a substrate processing apparatus, comprising: a first reactor constructed and arranged to process a rack with a plurality of substrates therein; a second reactor constructed and arranged to process a substrate; and, a substrate transfer device constructed and arranged to transfer substrates to and from the first and second reactor. The second reactor may be provided with an illumination system constructed and arranged to irradiate ultraviolet radiation within a range from 100 to 500 nanometers onto a top surface of at least a substrate in the second reactor.

公开(公告)号：US20200309455A1

公开(公告)日：2020-10-01

申请号：US16827012

申请日：2020-03-23

Applicant: ASM IP Holding B.V.

Inventor： Jeroen Fluit

IPC: F27D3/00 ,  E06B7/22 ,  E05F1/00 ,  F27D3/12

Abstract: The disclosure relates to a door opener to open a door of a cassette with substrates, the opener having a first wall to engage with the cassette and having a first opening to transfer the door and the substrates and a second wall opposite the first wall and having a second opening to transfer substrates. The door opener may have a closure device to hold the door of the cassette and having first and second sides and moveable in a chamber formed between the first and second wall. The opener may have a first actuator to move the closure device in a first direction from a first closing position where the first side closes against the first wall to a second closing position where the second side closes against the second wall, and from the second closing position to a transport position in between the first and second closing positions.

公开(公告)号：US11447864B2

公开(公告)日：2022-09-20

申请号：US16840960

申请日：2020-04-06

Applicant: ASM IP Holding B.V.

Inventor： Jeroen Fluit

IPC: C23C16/455 ,  H01L21/768 ,  C23C16/08 ,  H01L21/285

Abstract: There is provided a method and apparatus to deposit a molybdenum comprising layer on a substrate by supplying a precursor comprising molybdenum(VI) dichloride dioxide and a first reactant comprising boron and hydrogen to the substrate in a reaction chamber to react and form the molybdenum layer. The first reactant comprising boron and hydrogen may be diborane.