公开(公告)号：US11563298B2

公开(公告)日：2023-01-24

申请号：US17460430

申请日：2021-08-30

Applicant: ASML NETHERLANDS B.V.

Inventor： John Colin Travers ,  Federico Belli ,  Malte Christian Brahms ,  Andreas Johannes Antonius Brouns ,  Ronald Franciscus Herman Hugers

IPC: G02F1/35 ,  G02B6/02 ,  H01S3/067 ,  G03F7/20

Abstract: A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.

公开(公告)号：US20220269183A1

公开(公告)日：2022-08-25

申请号：US17741545

申请日：2022-05-11

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz ,  Patrick Sebastian Uebel ,  Ronald Franciscus Herman Hugers ,  Jan Adrianus Boer ,  Edwin Johannes Cornelis Bos ,  Andreas Johannes Antonius Brouns ,  Vitaliy Prosyentsov ,  Paul William Scholtes - Van Eijk ,  Paulus Antonius Andreas Teunissen ,  Mahesh Upendra Ajgaonkar

IPC: G03F7/20 ,  G02B1/00 ,  G02B6/02 ,  G01B11/27 ,  G01J1/42 ,  G01M11/00

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

公开(公告)号：US11687009B2

公开(公告)日：2023-06-27

申请号：US17741545

申请日：2022-05-11

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz ,  Patrick Sebastian Uebel ,  Ronald Franciscus Herman Hugers ,  Jan Adrianus Boer ,  Edwin Johannes Cornelis Bos ,  Andreas Johannes Antonius Brouns ,  Vitaliy Prosyentsov ,  Paul William Scholtes-Van Eijk ,  Paulus Antonius Andreas Teunissen ,  Mahesh Upendra Ajgaonkar

IPC: G03F7/20 ,  G03F7/00 ,  G02B1/00 ,  G02B6/02 ,  G01B11/27 ,  G01J1/42 ,  G01M11/00

CPC classification number: G03F7/70625 ,  G01B11/27 ,  G01J1/4257 ,  G01M11/30 ,  G02B1/005 ,  G02B6/02 ,  G03F7/7065 ,  G03F7/70525

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

公开(公告)号：US11619887B2

公开(公告)日：2023-04-04

申请号：US16995993

申请日：2020-08-18

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongfeng Ni ,  Ronald Franciscus Herman Hugers ,  Andreas Johannes Antonius Brouns

IPC: G03F9/00 ,  G03F7/20 ,  G02B7/02 ,  G02B27/30

Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.

公开(公告)号：US10990021B2

公开(公告)日：2021-04-27

申请号：US16789816

申请日：2020-02-13

Applicant: ASML Netherlands B.V.

Inventor： Paul William Scholtes-Van Eijk ,  Ronald Franciscus Herman Hugers

IPC: G03F7/20

Abstract: Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation.

公开(公告)号：US12237639B2

公开(公告)日：2025-02-25

申请号：US18085338

申请日：2022-12-20

Applicant: ASML NETHERLANDS B.V.

Inventor： John Colin Travers ,  Federico Belli ,  Malte Christian Brahms ,  Andreas Johannes Antonius Brouns ,  Ronald Franciscus Herman Hugers

IPC: G02B6/02 ,  G02F1/35 ,  G03F7/00 ,  H01S3/067

Abstract: A broadband radiation source device, including a fiber assembly having a plurality of optical fibers, each optical fiber being filled with a gas medium, wherein the broadband radiation source device is operable such that subsets of the optical fibers are independently selectable for receiving a beam of input radiation so as to generate a broadband output from only a subset of the plurality of optical fibers at any one time.

公开(公告)号：US11275313B2

公开(公告)日：2022-03-15

申请号：US17213983

申请日：2021-03-26

Applicant: ASML Netherlands B.V.

Inventor： Paul William Scholtes-Van Eijk ,  Ronald Franciscus Herman Hugers

IPC: G03F7/20

Abstract: Disclosed is a metrology apparatus for use in a lithographic manufacturing process. The metrology apparatus comprises a radiation source comprising a drive laser having an output split into a plurality of optical paths, each comprising a respective broadband light generator. The metrology apparatus further comprises illumination optics for illuminating a structure, at least one detection system for detecting scattered radiation, having been scattered by the structure and a processor for determining a parameter of interest of the structure from the scattered radiation.

公开(公告)号：US12050409B2

公开(公告)日：2024-07-30

申请号：US18116218

申请日：2023-03-01

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongfeng Ni ,  Ronald Franciscus Herman Hugers ,  Andreas Johannes Antonius Brouns

IPC: G03F9/00 ,  G02B3/00 ,  G02B7/02 ,  G02B27/30 ,  G03F7/00 ,  G01N21/95

CPC classification number: G03F9/7026 ,  G02B3/00 ,  G02B7/023 ,  G02B7/026 ,  G02B27/30 ,  G03F7/7015 ,  G03F7/70625 ,  G03F7/7065 ,  G01N21/9501 ,  G01N2201/0633 ,  G02B2003/0093 ,  G03F7/70566

Abstract: An assembly for collimating broadband radiation, the assembly including: a convex refractive singlet lens having a first spherical surface for coupling the broadband radiation into the lens and a second spherical surface for coupling the broadband radiation out of the lens, wherein the first and second spherical surfaces have a common center; and a mount for holding the convex refractive singlet lens at a plurality of contact points having a centroid coinciding with the common center.

公开(公告)号：US10520824B2

公开(公告)日：2019-12-31

申请号：US16078699

申请日：2017-02-07

Applicant: ASML Netherlands B.V. ,  ASML Holding N.V.

Inventor： Ronald Franciscus Herman Hugers ,  Parag Vinayak Kelkar ,  Paulus Antonius Andreas Teunissen

IPC: G03B27/72 ,  G03F7/20 ,  G02B27/14 ,  G03F9/00 ,  G01B11/06 ,  G02B27/10

Abstract: A light combiner (500) for use in a metrology tool includes a plurality of light sources (LED 1, LED 2, LED 3, LED 4, LED 5), a first filter (502), and a second filter (504). The first filter is designed to substantially reflect light generated from a first source of the plurality of light sources, and to substantially transmit light generated from a second source of the plurality of light sources. The second filter is designed to substantially reflect light generated from the first source and the second source of the plurality of light sources, and to substantially transmit light generated from a third source of the plurality of light sources. An angle of incidence of the light generated from the first source on a surface of the first filter is less than 30 degrees.

公开(公告)号：US11360396B2

公开(公告)日：2022-06-14

申请号：US17004140

申请日：2020-08-27

Applicant: ASML NETHERLANDS B.V. ,  ASML HOLDING N.V.

Inventor： Sebastian Thomas Bauerschmidt ,  Peter Maximilian Götz ,  Patrick Sebastian Uebel ,  Ronald Franciscus Herman Hugers ,  Jan Adrianus Boer ,  Edwin Johannes Cornelis Bos ,  Andreas Johannes Antonius Brouns ,  Vitaliy Prosyentsov ,  Paul William Scholtes-Van Eijk ,  Paulus Antonius Andreas Teunissen ,  Mahesh Upendra Ajgaonkar

IPC: G03F7/20 ,  G02B1/00 ,  G02B6/02 ,  G01B11/27 ,  G01J1/42 ,  G01M11/00

Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.