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公开(公告)号：US07375797B2
公开(公告)日：2008-05-20
申请号：US11473966
申请日：2006-06-23
申请人： Alton Hugh Phillips
发明人： Alton Hugh Phillips
IPC分类号： G03B27/42
CPC分类号： G03F7/709 , G03F7/70716 , G03F7/70808 , G03F7/70991
摘要： Techniques for transferring utilities to and from a reticle or wafer stage in a lithography system while minimizing physical disturbances that affect the stage are described. These techniques involve transferring utilities to and from the stage without making physical contact with the stage. Alternatively, utilities are transferred by making physical contact with the stage while the stage is in a stationary position. In addition to transferring utilities to and from the stage, devices such as processing devices, buffers (storage mediums), electrical components, and mechanical components can be placed within the stage to use and/or control the transferred utilities.
摘要翻译： 描述了在将光刻系统中的掩模版或晶片台传递到工作台的技术，同时最小化影响台阶的物理扰动的技术。 这些技术涉及在不与舞台进行身体接触的情况下将实用程序转移到舞台上和从舞台转移。 或者，当舞台处于静止位置时，通过与舞台物理接触来转移效用。 除了将工具传送到舞台之外，诸如处理设备，缓冲器（存储介质），电气组件和机械组件之类的设备可以放置在舞台内以使用和/或控制传送的实用程序。
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公开(公告)号：US06888617B2
公开(公告)日：2005-05-03
申请号：US10611275
申请日：2003-06-30
CPC分类号： G03F7/709 , G03B17/045
摘要： A double bellows seal including a plurality of rings having first and second end rings, a middle ring, a first bellows, and a second bellows. The first bellows is formed from a flexible material that is sealingly connected between the first end ring and the middle ring, and it has a twist bias in a first rotational direction relative to an axis of the rings. The second bellows is formed from a flexible material that is sealingly connected between the second end ring and the middle ring. The second bellows has a twist bias in a second rotational direction relative to an axis of the rings that is opposite that of the first rotational direction.
摘要翻译： 一种双波纹管密封件，包括具有第一和第二端环的多个环，中间环，第一波纹管和第二波纹管。 第一波纹管由密封地连接在第一端环和中间环之间的柔性材料形成，并且其相对于环的轴线在第一旋转方向上具有扭曲偏压。 第二波纹管由密封地连接在第二端环和中间环之间的柔性材料形成。 第二波纹管相对于与第一旋转方向相反的环的轴线在第二旋转方向上具有扭曲偏压。
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公开(公告)号：US07259834B2
公开(公告)日：2007-08-21
申请号：US10968405
申请日：2004-10-18
申请人： Alton Hugh Phillips
发明人： Alton Hugh Phillips
CPC分类号： G03F7/70983 , G03B27/58 , G03F7/707
摘要： An apparatus and method are disclosed having a stage reticle safety feature. The apparatus includes a reticle stage and an optical stage. The reticle stage supports a reticle and is capable of moving the reticle in x-y-z directions. The optical stage includes a plurality of components to direct light reflected from the reticle onto a wafer substrate and a safety mechanism to move one or more components of the optical stage away from the reticle stage.
摘要翻译： 公开了一种具有舞台光罩安全特征的装置和方法。 该装置包括光罩台和光学平台。 标线片台支持掩模版，并且能够在x-y-z方向上移动掩模版。 光学平台包括将从掩模版反射的光引导到晶片基板上的多个部件，以及将光学平台的一个或多个部件远离标线片台的安全机构。
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公开(公告)号：US06614508B2
公开(公告)日：2003-09-02
申请号：US09932828
申请日：2001-08-16
IPC分类号： G03B2758
CPC分类号： G03F7/709 , G03B17/045
摘要： A double bellows seal including a plurality of rings having first and second end rings, a middle ring, a first bellows, and a second bellows. The first bellows is formed from a flexible material that is sealingly connected between the first end ring and the middle ring, and it has a twist bias in a first rotational direction relative to an axis of the rings. The second bellows is formed from a flexible material that is sealingly connected between the second end ring and the middle ring. The second bellows has a twist bias in a second rotational direction relative to an axis of the rings that is opposite that of the first rotational direction.
摘要翻译： 一种双波纹管密封件，包括具有第一和第二端环的多个环，中间环，第一波纹管和第二波纹管。 第一波纹管由密封地连接在第一端环和中间环之间的柔性材料形成，并且其相对于环的轴线在第一旋转方向上具有扭曲偏压。 第二波纹管由密封地连接在第二端环和中间环之间的柔性材料形成。 第二波纹管相对于与第一旋转方向相反的环的轴线在第二旋转方向上具有扭曲偏压。
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公开(公告)号：US06600547B2
公开(公告)日：2003-07-29
申请号：US09962963
申请日：2001-09-24
IPC分类号： G03B2752
CPC分类号： G03F7/70808 , G03B27/60 , G03F7/70833 , G03F7/709
摘要： A sliding seal system for providing a fluid seal that is slidable in two linear and one rotational degrees-of-freedom and that is flexible in one linear and two rotational degrees-of-freedom is disclosed. The sliding seal system includes a support member having a working surface arranged to provide a seal interface with a sealing surface on a first body. A flexible membrane is attached to the support member and coupled to a second body. A fluid supply system is provided to deliver a fluid to a region between the working surface of the support member and the sealing surface of the first body to provide buoyant flotation to the seal support member at the working surface. In a preferred embodiment, a fluid exhaust system is also provided to remove the fluid delivered by the fluid supply system. One particularly useful application of the described sliding seal system is in a photolithography system to provide a seal between an exposure apparatus and a wafer chamber.
摘要翻译： 公开了一种用于提供流体密封的滑动密封系统，该流体密封件可以以两个线性和一个旋转自由度滑动，并且在一个线性和两个旋转自由度中是柔性的。 滑动密封系统包括支撑构件，其具有布置成提供与第一主体上的密封表面的密封界面的工作表面。 柔性膜连接到支撑构件并且联接到第二主体。 提供流体供应系统以将流体输送到支撑构件的工作表面和第一主体的密封表面之间的区域，以在工作表面处向密封件支撑构件提供浮力浮选。 在优选实施例中，还提供流体排放系统以去除由流体供应系统输送的流体。 所描述的滑动密封系统的一个特别有用的应用是在光刻系统中，以在曝光设备和晶片室之间提供密封。
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公开(公告)号：US08619234B2
公开(公告)日：2013-12-31
申请号：US11473967
申请日：2006-06-23
申请人： Alton Hugh Phillips
发明人： Alton Hugh Phillips
CPC分类号： G03F7/709 , G03F7/70716 , G03F7/70808 , G03F7/70991
摘要： Techniques for transferring utilities to and from a reticle or wafer stage in a lithography system while minimizing physical disturbances that affect the stage are described. These techniques involve transferring utilities to and from the stage without making physical contact with the stage. Alternatively, utilities are transferred by making physical contact with the stage while the stage is in a stationary position. In addition to transferring utilities to and from the stage, devices such as processing devices, buffers (storage mediums), electrical components, and mechanical components can be placed within the stage to use and/or control the transferred utilities.
摘要翻译： 描述了在将光刻系统中的掩模版或晶片台传递到工作台的技术，同时最小化影响台阶的物理扰动的技术。 这些技术涉及在不与舞台进行身体接触的情况下将实用程序转移到舞台上和从舞台转移。 或者，当舞台处于静止位置时，通过与舞台物理接触来转移效用。 除了将工具传送到舞台之外，诸如处理设备，缓冲器（存储介质），电气组件和机械组件之类的设备可以放置在舞台内以使用和/或控制传送的实用程序。
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公开(公告)号：US06666611B2
公开(公告)日：2003-12-23
申请号：US09865968
申请日：2001-05-24
IPC分类号： F16C1100
CPC分类号： F16C11/12 , G03F7/70716 , H01J37/20 , H01J2237/0458 , H01J2237/20278 , H01J2237/3175 , Y10T403/32008 , Y10T403/32049 , Y10T403/32106 , Y10T403/45
摘要： A three-degree of motion joint comprising a translational joint, a first support member, a first rotational joint, and a second rotational joint. The translational joint allows a first component and a second component to move with respect to each other along the z-axis. The translational joint includes a first translational flexural member that connects a first member and a base member. The first support member is attached to the base member. The first rotational joint allows the first component and the second component to be moved with respect to each other in the &THgr;x direction. The first rotational joint includes a first rotational flexural member that is attached to the first member. The second rotational joint allows the first component and second component to move with respect to each other in the &THgr;y direction. The second rotational joint includes a second rotational flexural member attached to the first support member.
摘要翻译： 一种三角运动关节，包括平移关节，第一支撑构件，第一旋转接头和第二旋转接头。 平移关节允许第一部件和第二部件沿z轴相对于彼此移动。 平移关节包括连接第一构件和基部构件的第一平移弯曲构件。 第一支撑构件附接到基座构件。 第一旋转接头允许第一部件和第二部件在Thetax方向上相对于彼此移动。 第一旋转接头包括附接到第一构件的第一旋转弯曲构件。 第二旋转接头允许第一部件和第二部件在Thetay方向上相对于彼此移动。 第二旋转接头包括附接到第一支撑构件的第二旋转弯曲构件。
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公开(公告)号：US6021783A
公开(公告)日：2000-02-08
申请号：US234287
申请日：1999-01-20
申请人： Alton Hugh Phillips
发明人： Alton Hugh Phillips
CPC分类号： A45D24/14 , A45D2024/005
摘要： A braid removal tool has a comb, a strap, and a plurality of prongs. The strap is used to fasten the comb to a user's thumb. To remove a section of braids, a user first engages prongs with braids by grasping a section of unbraided hair between an index finger and the comb. Once the prongs are engaged with braids, use a downward motion and comb braids toward a hair end. Repeat this procedure until braids are completely removed. The tool may be worn on the thumb of a second hand to assist the second hand in grasping the braids to prevent excessive pulling on a scalp during combing.
摘要翻译： 编织物去除工具具有梳子，带子和多个插脚。 表带用于将梳子固定到用户的拇指上。 为了去除一部分辫子，用户首先通过抓住食指和梳子之间的一部分未毛发头发来与辫子接合。 一旦尖头与辫子接合，使用向下的动作，并梳头辫向头发端。 重复此过程，直到完全取出辫子。 该工具可以佩戴在二手的拇指上，以辅助第二只手抓住编织物，以防止在梳理过程中过度地牵拉头皮。
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