公开(公告)号：US11814721B2

公开(公告)日：2023-11-14

申请号：US17723237

申请日：2022-04-18

Applicant: Applied Materials, Inc.

Inventor： Simon Lau

IPC: C23C14/50 ,  H01L21/683 ,  H01L21/687 ,  C23C16/458 ,  C23C14/22

CPC classification number: C23C14/50 ,  C23C16/4581 ,  C23C16/4583 ,  C23C16/4586 ,  H01L21/6838 ,  H01L21/6875 ,  H01L21/68757 ,  H01L21/68785 ,  C23C14/228

Abstract: The present disclosure provides a holding arrangement. The holding arrangement for holding a substrate includes: a body portion having a first side; a dry adhesive material provided on the first side of the body portion; a seal surrounding the dry adhesive material and configured to provide a vacuum region on the first side, wherein the dry adhesive material is provided in the vacuum region; and a conduit to evacuate the vacuum region.

公开(公告)号：US10807207B2

公开(公告)日：2020-10-20

申请号：US15557424

申请日：2015-05-08

Applicant: Applied Materials, Inc.

Inventor： Simon Lau

IPC: B23Q3/08 ,  C03C17/00 ,  C23C14/50 ,  B65G49/06 ,  C23C16/458

Abstract: A method and a support for holding a substrate, wherein the support is included in a transportation system configured to transport the substrate. The method includes attaching an adhesive to the support, wherein the material of the adhesive is a synthetic setae material and wherein the adhesive is configured to attach the substrate to the support; and attaching the adhesive to the substrate. Moreover, the thickness of the substrate is about 0.3 mm or less, and/or wherein the substrate has a size of 1.4 m2 or more. The support includes a support body and an adhesive, wherein the material of the adhesive is a synthetic setae material and wherein the adhesive is configured to attach the support body to the substrate, wherein the support is included in a transportation system configured to transport the substrate.

公开(公告)号：US11339469B2

公开(公告)日：2022-05-24

申请号：US15772979

申请日：2016-01-13

Applicant: Applied Materials, Inc.

Inventor： Simon Lau

IPC: C23C14/50 ,  B65G49/06 ,  H01L21/683 ,  H01L21/687 ,  C23C16/458

Abstract: The present disclosure provides a holding arrangement. The holding arrangement for holding a substrate includes: a body portion having a first side; a dry adhesive material provided on the first side of the body portion; a seal surrounding the dry adhesive material and configured to provide a vacuum region on the first side, wherein the dry adhesive material is provided in the vacuum region; and a conduit to evacuate the vacuum region.

公开(公告)号：US11186906B2

公开(公告)日：2021-11-30

申请号：US15766335

申请日：2016-11-10

Applicant: Applied Materials, Inc.

Inventor： Simon Lau

IPC: C23C14/50 ,  C23C16/458 ,  H01J37/32 ,  H01L21/67 ,  H01L21/673 ,  H01L21/687 ,  H01L21/683

Abstract: A holding arrangement for holding a substrate is described. The holding arrangement includes a body having a first wall of flexible material; an adhesive arrangement configured for attaching the substrate, wherein the adhesive arrangement is provided on a first side of the first wall, and a force transmission arrangement configured for applying a force to a second side of the first wall opposing the first side of the first wall.

公开(公告)号：US20130055953A1

公开(公告)日：2013-03-07

申请号：US13664246

申请日：2012-10-30

Applicant: Applied Materials, Inc.

Inventor： Dieter Haas ,  Thomas Berger ,  Simon Lau

IPC: C23C16/458 ,  B05C13/00

CPC classification number: H01L21/68714 ,  H01L21/68 ,  Y10T29/49998

Abstract: A substrate support for supporting a substrate in a processing chamber comprises a frame for carrying the substrate, at least a first fastening means fixedly attached to the frame for aligning the substrate relative to the frame, and at least a second fastening means movably attached to the frame, the second fastening means being movable relative to the frame and/or the substrate. Furthermore, a processing device comprises an edge exclusion projecting over a portion of the surface of the substrate in order to prevent processing of the portion of the surface of the substrate. A part of the edge exclusion may be moved into a gap between the edge(s) of the substrate and the frame element of the substrate support to form a labyrinth seal between the frame element and the edge of the substrate. A method of placing the substrate on the substrate support is also disclosed.

Abstract translation: 用于在处理室中支撑衬底的衬底支撑件包括用于承载衬底的框架，至少一个固定地连接到框架上用于使衬底相对于框架对准的第一紧固装置，以及至少一个第二紧固装置， 第二紧固装置可相对于框架和/或基板移动。 此外，处理装置包括在衬底表面的一部分上突出的边缘排除，以防止衬底的表面部分的处理。 边缘排除的一部分可以移动到基板的边缘和基板支撑件的框架元件之间的间隙中，以在框架元件和基板的边缘之间形成迷宫式密封。 还公开了将衬底放置在衬底支撑件上的方法。