THIN FILM TRANSISTOR AND FABRICATION METHOD THEREOF, ARRAY SUBSTRATE AND DISPLAY PANEL
    2.
    发明申请
    THIN FILM TRANSISTOR AND FABRICATION METHOD THEREOF, ARRAY SUBSTRATE AND DISPLAY PANEL 有权
    薄膜晶体管及其制造方法,阵列基板和显示面板

    公开(公告)号:US20170040343A1

    公开(公告)日:2017-02-09

    申请号:US14912822

    申请日:2015-08-18

    Inventor: Lung Pao HSIN

    Abstract: A thin film transistor and a fabrication method thereof, an array substrate and a display panel are provided. The thin film transistor includes: a gate electrode (2), a source electrode (5) and a drain electrode (6) disposed in a same layer on a base substrate (1); a gate insulating layer (3) disposed on the gate electrode (2), the source electrode (5) and the drain electrode (6); an active layer (4) disposed on the gate insulating layer (3); a passivation layer (7) disposed on the active layer (4) and the gate insulating layer (3). A first via hole (81) and a second via hole (91) are disposed in the passivation layer (7); a third via hole (82) and a fourth via hole (92) are disposed in the passivation layer (7) and the gate insulating layer (3); a first connection pattern (8) and a second connection pattern (9) are disposed on the passivation layer (7); the first connection pattern (8) is connected with the active layer (4) and the source electrode (5) through the first via hole (81) and the third via hole (82) respectively; the second connection pattern (9) is connected with the active layer (4) and the drain electrode (6) through the second via hole (91) and the fourth via hole (92) respectively. The thin film transistor effectively reduces the influence of the parasitic capacitance between the source electrode and the gate electrode and the parasitic capacitance between the drain electrode and the gate electrode on the thin film transistor.

    Abstract translation: 提供薄膜晶体管及其制造方法,阵列基板和显示面板。 薄膜晶体管包括:设置在基底基板(1)上的同一层中的栅电极(2),源电极(5)和漏电极(6)。 设置在栅电极(2)上的栅极绝缘层(3),源电极(5)和漏电极(6); 设置在栅极绝缘层(3)上的有源层(4); 设置在有源层(4)和栅极绝缘层(3)上的钝化层(7)。 第一通孔(81)和第二通孔(91)设置在钝化层(7)中; 在钝化层(7)和栅极绝缘层(3)中设置第三通孔(82)和第四通孔(92)。 第一连接图案(8)和第二连接图案(9)设置在钝化层(7)上; 第一连接图案(8)分别通过第一通孔(81)和第三通孔(82)与有源层(4)和源电极(5)连接; 第二连接图案(9)分别通过第二通孔(91)和第四通孔(92)与有源层(4)和漏电极(6)连接。 薄膜晶体管有效地减小了源电极和栅电极之间的寄生电容以及薄膜晶体管上的漏电极和栅电极之间的寄生电容的影响。

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