公开(公告)号：US20250157023A1

公开(公告)日：2025-05-15

申请号：US19023560

申请日：2025-01-16

Applicant: Bruker Technologies Ltd.

Inventor： Alexander Krokhmal ,  Alexander Brandt ,  Dor Perry ,  Asher Peled ,  Matthew Wormington

IPC: G06T7/00

Abstract: A system for X-ray measurement includes first and second X-ray measurement channels, each including X-ray source configured to apply an X-ray beam to a respective measurement site on a sample and an X-ray detector assembly (XDA) configured to sense X-ray emission from the respective measurement site. An imaging assembly is configured to capture an image of the sample. A processor is configured to align the first and second X-ray measurement channels with respective first and second measurement sites using the captured image.

公开(公告)号：US11761913B2

公开(公告)日：2023-09-19

申请号：US17200918

申请日：2021-03-15

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Adam Ginsburg ,  Mark James Vermeulen ,  Paul Anthony Ryan ,  Matthew Wormington

IPC: G01N23/201 ,  G01N23/2055

CPC classification number: G01N23/201 ,  G01N23/2055 ,  G01N2223/054 ,  G01N2223/056 ,  G01N2223/6116

Abstract: A method for X-ray measurement includes generating and directing an X-ray beam to a sample including at least first and second layers stacked on one another, the X-ray beam incident on a sample location at which the first and second layers include respective first and second high aspect ratio (HAR) structures. X-ray scatter profiles are measured, that are emitted from the sample location in response to the X-ray beam as a function of tilt angle between the sample and the X-ray beam. A shift is estimated, between the first and second layers and a characteristic tilt of the first and second layers, based on the X-ray scatter profiles measured as a function of the tilt angle.

公开(公告)号：US11181490B2

公开(公告)日：2021-11-23

申请号：US17254281

申请日：2019-07-04

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01T1/166 ,  G01N23/223

Abstract: An x-ray apparatus, that may include a mount that is configured to hold a sample; an x-ray source, that is configured to direct an x-ray beam toward a first side of the sample; a detector, positioned downstream to a second side of the sample, the detector is configured to detect, during a sample measurement period, at least a part of x-rays that have been transmitted through the sample; and an x-ray intensity detector that is positioned, during a beam intensity monitoring period at a measurement position that is located between the x-ray source and the first side of the sample, so as to detect at least a part of the x-ray beam before the x-ray beam reaches the sample.

公开(公告)号：US20210341397A1

公开(公告)日：2021-11-04

申请号：US17200918

申请日：2021-03-15

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Adam Ginsburg ,  Mark James Vermeulen ,  Paul Anthony Ryan ,  Matthew Wormington

IPC: G01N23/201

Abstract: A method for X-ray measurement includes generating and directing an X-ray beam to a sample including at least first and second layers stacked on one another, the X-ray beam incident on a sample location at which the first and second layers include respective first and second high aspect ratio (HAR) structures. X-ray scatter profiles are measured, that are emitted from the sample location in response to the X-ray beam as a function of tilt angle between the sample and the X-ray beam. A shift is estimated, between the first and second layers and a characteristic tilt of the first and second layers, based on the X-ray scatter profiles measured as a function of the tilt angle.

公开(公告)号：US12249059B2

公开(公告)日：2025-03-11

申请号：US17709451

申请日：2022-03-31

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Alexander Krokhmal ,  Alexander Brandt ,  Dor Perry ,  Asher Peled ,  Matthew Wormington

IPC: G06T7/00

Abstract: A system includes first and second imaging assemblies, and a processor. The first imaging assembly is configured to produce a first image of a measurement site in a sample. The second imaging assembly is coupled with a measurement assembly and is configured to produce a second image of the measurement site. The processor is configured to: (i) perform, based on the first image, a first movement of the sample relative to the measurement assembly, (ii) perform, based on the second image, a second movement of the sample for aligning the sample with the measurement assembly, and (iii) control the measurement assembly to perform a measurement in the measurement site.

公开(公告)号：US20230316487A1

公开(公告)日：2023-10-05

申请号：US17709451

申请日：2022-03-31

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Alexander Krokhmal ,  Alexander Brandt ,  Dor Perry ,  Asher Peled ,  Matthew Wormington

IPC: G06T7/00

CPC classification number: G06T7/0004 ,  G06T2207/10116 ,  G06T2207/30148

Abstract: A system includes first and second imaging assemblies, and a processor. The first imaging assembly is configured to produce a first image of a measurement site in a sample. The second imaging assembly is coupled with a measurement assembly and is configured to produce a second image of the measurement site. The processor is configured to: (i) perform, based on the first image, a first movement of the sample relative to the measurement assembly, (ii) perform, based on the second image, a second movement of the sample for aligning the sample with the measurement assembly, and (iii) control the measurement assembly to perform a measurement in the measurement site.

公开(公告)号：US11703464B2

公开(公告)日：2023-07-18

申请号：US17505696

申请日：2021-10-20

Applicant: Bruker Technologies Ltd.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01T1/166 ,  G01N23/223

CPC classification number: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166 ,  G01N2223/6116

Abstract: A method for evaluating an array of high aspect ratio (HAR) structures on a sample includes illuminating the sample with an x-ray beam along a first axis parallel to within two degrees to the HAR structures in the array and sensing a first pattern of small angle x-ray scattering (SAXS) scattered from the sample while illuminating the sample along the first axis. The sample is illuminated with the x-ray beam along a second axis that is oblique to the HAR structures in the array, and a second pattern of the SAXS scattered from the sample is sensed while illuminating the sample along the second axis. Information is extracted with respect to the HAR structures based on the first and second patterns.

公开(公告)号：US12085521B2

公开(公告)日：2024-09-10

申请号：US18307823

申请日：2023-04-27

Applicant: Bruker Technologies Ltd.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166

CPC classification number: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166 ,  G01N2223/6116

Abstract: A method for evaluating a sample that includes an array of structural elements. The method includes obtaining a first small angle x-ray scattering (SAXS) pattern for a first angular relationship between the sample and an x-ray beam that exhibits a first collimation value and has a given cross-sectional area on a first side of the sample. A second SAXS pattern is obtained for a second angular relationship between the sample and the x-ray beam, while the x-ray beam exhibits a second collimation value that differs from the first collimation value while maintaining the given cross-sectional area of the x-ray beam on the first side of the sample, wherein the second angular relationship differs from the first angular relationship.

公开(公告)号：US20240077435A1

公开(公告)日：2024-03-07

申请号：US18307823

申请日：2023-04-27

Applicant: Bruker Technologies Ltd.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166

CPC classification number: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166 ,  G01N2223/6116

Abstract: A method for evaluating a sample that includes an array of structural elements. The method includes obtaining a first small angle x-ray scattering (SAXS) pattern for a first angular relationship between the sample and an x-ray beam that exhibits a first collimation value and has a given cross-sectional area on a first side of the sample. A second SAXS pattern is obtained for a second angular relationship between the sample and the x-ray beam, while the x-ray beam exhibits a second collimation value that differs from the first collimation value while maintaining the given cross-sectional area of the x-ray beam on the first side of the sample, wherein the second angular relationship differs from the first angular relationship.

公开(公告)号：US20210285898A1

公开(公告)日：2021-09-16

申请号：US17254281

申请日：2019-07-04

Applicant: BRUKER TECHNOLOGIES LTD.

Inventor： Alex Dikopoltsev ,  Matthew Wormington ,  Yuri Vinshtein ,  Alexander Krokhmal

IPC: G01N23/201 ,  G01N23/207 ,  G01N23/223 ,  G01T1/166

Abstract: An x-ray apparatus, that may include a mount that is configured to hold a sample; an x-ray source, that is configured to direct an x-ray beam toward a first side of the sample; a detector, positioned downstream to a second side of the sample, the detector is configured to detect, during a sample measurement period, at least a part of x-rays that have been transmitted through the sample; and an x-ray intensity detector that is positioned, during a beam intensity monitoring period at a measurement position that is located between the x-ray source and the first side of the sample, so as to detect at least a part of the x-ray beam before the x-ray beam reaches the sample.