Abstract:
A Coriolis effect device includes a housing defining an interior chamber having a central axis, an inlet, an outlet, a leading disc and a trailing disc. Each disc is supported for oscillatory movement within the interior chamber of the housing. The leading disc defines a leading flow path in fluid communication with the inlet and interior chamber, wherein a portion of the leading flow path extends radially with respect to the central axis. The trailing disc is axially spaced from the leading disc. The trailing disc defines a trailing flow path in fluid communication with the interior chamber and the outlet, wherein a portion of the trailing flow path extends radially with respect to the central axis. A phase difference between leading and trailing oscillating signals picked up from the disc movement can be used to determine a mass flow rate of fluid passing from the inlet to the outlet.
Abstract:
An optical cross-connect switch comprises a base (216), a flap (211) and one or more electrically conductive landing pads (222) connected to the flap (211). The flap (211) has a bottom portion that is movably coupled to the base (216) such that the flap (211) is movable with respect to a plane of the base (216) from a first orientation to a second orientation. The one or more landing pads (222) are electrically isolated from the flap (211) and electrically coupled to be equipotential with a landing surface.
Abstract:
A surface micromachining process for the fabrication of three-dimensional micro-hinges directly on silicon on insulator wafers. The process includes the steps of (a) defining openings around the surface of a desired hinge pin in a single layer of a silicon single crystal; (b) subjecting the openings to an etching process for removal of oxide material that is located in contiguous relation to the openings under the area of a hinge; (c) growing thermal oxide to define a gap between the hinge pin and a subsequently deposited polysilicon cap; (d) immediately depositing a thin layer of a chemical vapor deposited oxide sufficient to cover fine gaps not completely covered by the thermal oxide; depositing polysilicon and etching to define a hinge cap; and further etching to allow a mirror to be lifted out of the silicon wafer.
Abstract:
The invention provides a sensor for determining when a latch for securing an engine cowl on an aircraft is secured by detecting the proximity of a latch hook and a latch pin. The sensor includes a resonant circuit configured and adapted to transmit a status signal when the latch is in a secured state. The sensor also includes a means for conveying status information of the latch to a location remote from the latch based on the status signal, the conveying means being operably connected to the resonant circuit. The invention also provides a method of determining when a latch is open or secured by detecting the proximity of a latch hook and a latch pin.
Abstract:
The invention provides a sensor for determining when a latch for securing an engine cowl on an aircraft is secured by detecting the proximity of a latch hook and a latch pin. The sensor includes a resonant circuit configured and adapted to transmit a status signal when the latch is in a secured state. The sensor also includes a means for conveying status information of the latch to a location remote from the latch based on the status signal, the conveying means being operably connected to the resonant circuit. The invention also provides a method of determining when a latch is open or secured by detecting the proximity of a latch hook and a latch pin.
Abstract:
The subject invention is related to wireless proximity sensor and sensing system for detecting the position of an object. The system includes a transceiver for providing wireless communication with a passive wireless surface acoustic wave (SAW) proximity sensor. The wireless proximity sensor receives a wireless signal from the transceiver, which powers the SAW device and in turn transmits a signal back to the transceiver that includes information about the position of an object. The wireless proximity sensor uses one or more SAW devices with a sensing element made of magnetostrictive material, in conjunction with one or more magnets and one or more targets that are positioned relative to an object. The movement of the target(s) in relation to the proximity sensor operatively produces a mechanical response due to the shift in the magnetic field of the sensing element. The sensing element in turn enhances the magnetic field of the SAW device to which it is attached, and this information is transmitted to the transceiver as information about the position of an object.
Abstract:
A force balanced mass flow meter is disclosed that includes a cylindrical sensor housing having an interior bore, an impeller body supported for axial rotation within the interior bore of the sensor housing, and including structure for converting fluid inertia into flow induced torque when fluid flows relative to the impeller body, a proximity sensor for measuring a rotation angle of the impeller body relative to the sensor housing, an electromagnet for generating a magnetic field about the sensor housing to prevent rotation of the impeller body, electronics for determining electrical values from the proximity sensor when fluid flows relative to the impeller body and a controller for controlling current supplied to the electromagnet in response to electrical values determined from the proximity sensor, to generate a magnetic field sufficient to prevent impeller rotation.
Abstract:
The subject invention is related to wireless proximity sensor and sensing system for detecting the position of an object. The system includes a transceiver for providing wireless communication with a passive wireless surface acoustic wave (SAW) proximity sensor. The wireless proximity sensor receives a wireless signal from the transceiver, which powers the SAW device and in turn transmits a signal back to the transceiver that includes information about the position of an object. The wireless proximity sensor uses one or more SAW devices with a sensing element made of magnetostrictive material, in conjunction with one or more magnets and one or more targets that are positioned relative to an object. The movement of the target(s) in relation to the proximity sensor operatively produces a mechanical response due to the shift in the magnetic field of the sensing element. The sensing element in turn enhances the magnetic field of the SAW device to which it is attached, and this information is transmitted to the transceiver as information about the position of an object.
Abstract:
A microelectromechanical systems (MEMS) element and a MEMS optical switch are described. The MEMS element comprises a crystalline and moveable element is moveably attached to the substrate. The moveable element includes a perpendicular portion oriented substantially perpendicular to a plane of the substrate. The crystal structure of the perpendicular portion and substrate are substantially similar. The moveable element is capable of motion substantially constrained to a plane oriented substantially perpendicular to a plane of the substrate. In at least one position, a part of a perpendicular portion of the moveable element projects beyond a surface of the substrate. The moveable element may be retained in place by a latch. An array of such structures can be implemented to work as an optical switch. The optical switch may comprise a crystalline substrate and one or more moveable elements moveably attached to the substrate. The various embodiments provide for a robust and reliable MEMS elements that may be simply fabricated and densely packed.
Abstract:
The present invention provides a micromechanical or microoptomechanical structure. The structure is produced by a process comprising defining a structure on a single crystal silicon layer separated by an insulator layer from a substrate layer; depositing and etching a polysilicon layer on the single crystal silicon layer, with remaining polysilcon forming mechanical or optical elements of the structure; exposing a selected area of the single crystal silicon layer; and releasing the formed structure.