Electron beam window tile having non-uniform cross-sections

    公开(公告)号:US09715990B2

    公开(公告)日:2017-07-25

    申请号:US14974928

    申请日:2015-12-18

    CPC classification number: H01J37/147 H01J5/18 H01J33/04 H01J37/09 H01J2237/18

    Abstract: Window tiles for electron beam systems are provided. The window tiles can comprise a first surface and a second surface, and one or more features extending from the first surface to the second surface. The one or more features can have a non-uniform or tapered cross-section between the first surface and the second surface. The first surface can be configured to be exposed to vacuum conditions and can be configured to receive electrons accelerated from an electron beam generator. The second surface can be configured to allow electrons to pass through to a foil. The window tiles can improve electron beam processing systems for example by increasing electron throughput, lowering power consumption, reducing heat absorption to the foil, improving and increasing foil life, and potentially allowing for use of smaller and cheaper machines in electron beam processing.

    ELECTRON BEAM WINDOW TILE HAVING NON-UNIFORM CROSS-SECTIONS TECHNICAL FIELD
    6.
    发明申请
    ELECTRON BEAM WINDOW TILE HAVING NON-UNIFORM CROSS-SECTIONS TECHNICAL FIELD 有权
    具有非均匀交叉部分的电子束窗口技术领域

    公开(公告)号:US20160181056A1

    公开(公告)日:2016-06-23

    申请号:US14974928

    申请日:2015-12-18

    CPC classification number: H01J37/147 H01J5/18 H01J33/04 H01J37/09 H01J2237/18

    Abstract: Window tiles for electron beam systems are provided. The window tiles can comprise a first surface and a second surface, and one or more features extending from the first surface to the second surface. The one or more features can have a non-uniform or tapered cross-section between the first surface and the second surface. The first surface can be configured to be exposed to vacuum conditions and can be configured to receive electrons accelerated from an electron beam generator. The second surface can be configured to allow electrons to pass through to a foil. The window tiles can improve electron beam processing systems for example by increasing electron throughput, lowering power consumption, reducing heat absorption to the foil, improving and increasing foil life, and potentially allowing for use of smaller and cheaper machines in electron beam processing.

    Abstract translation: 提供电子束系统的窗瓦。 窗瓦可以包括第一表面和第二表面以及从第一表面延伸到第二表面的一个或多个特征。 一个或多个特征可以在第一表面和第二表面之间具有不均匀或渐缩的横截面。 第一表面可以被配置为暴露于真空条件,并且可以被配置为接收从电子束发生器加速的电子。 第二表面可以被配置为允许电子通过箔。 窗瓦可以改善电子束处理系统,例如通过增加电子通量,降低功耗,减少对箔的热吸收,改善和延长箔寿命,以及潜在地允许在电子束处理中使用更小和更便宜的机器。

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