公开(公告)号：US12237170B2

公开(公告)日：2025-02-25

申请号：US18374637

申请日：2023-09-28

Applicant: ENTEGRIS, INC.

Inventor： Sangbum Han ,  Seobong Chang ,  Bryan C. Hendrix ,  Jaeeon Park ,  Thomas H. Baum

IPC: H01L21/285 ,  C07F15/06 ,  C23C16/06 ,  C23C16/16 ,  C23C16/18

Abstract: The present disclosure relates to a bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors, and ultra high purity versions thereof, methods of making, and methods of using these bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors in a vapor deposition process. One aspect of the disclosure relates to an ultrahigh purity bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursor of the formula Co2(CO)6(R3C≡CR4), where R3 and R4 are different organic moieties and R4 is more electronegative or more electron withdrawing compared to R3.

公开(公告)号：US20180158687A1

公开(公告)日：2018-06-07

申请号：US15819620

申请日：2017-11-21

Applicant: Entegris, Inc.

Inventor： Sangbum Han ,  Seobong Chang ,  Jaeeon Park ,  Bryan Clark Hendrix ,  Thomas H. Baum

IPC: H01L21/285 ,  C23C16/06

CPC classification number: H01L21/28556 ,  C07F15/06 ,  C23C16/06 ,  C23C16/16 ,  C23C16/18

Abstract: The present disclosure relates to a bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors, and ultra high purity versions thereof, methods of making, and methods of using these bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors in a vapor deposition process. One aspect of the disclosure relates to an ultrahigh purity bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursor of the formula Co2(CO)6(R3C≡CR4), where R3 and R4 are different organic moieties and R4 is more electronegative or more electron withdrawing compared to R3.

公开(公告)号：US20240096631A1

公开(公告)日：2024-03-21

申请号：US18374637

申请日：2023-09-28

Applicant: ENTEGRIS, INC.

Inventor： Sangbum Han ,  Seobong Chang ,  Bryan C. Hendrix ,  Jaeeon Park ,  Thomas H. Baum

IPC: H01L21/285 ,  C07F15/06 ,  C23C16/06 ,  C23C16/16 ,  C23C16/18

CPC classification number: H01L21/28556 ,  C07F15/06 ,  C23C16/06 ,  C23C16/16 ,  C23C16/18

Abstract: The present disclosure relates to a bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors, and ultra high purity versions thereof, methods of making, and methods of using these bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors in a vapor deposition process. One aspect of the disclosure relates to an ultrahigh purity bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursor of the formula Co2(CO)6(R3C≡CR4), where R3 and R4 are different organic moieties and R4 is more electronegative or more electron withdrawing compared to R3.

公开(公告)号：US11804375B2

公开(公告)日：2023-10-31

申请号：US16952985

申请日：2020-11-19

Applicant: ENTEGRIS, INC.

Inventor： Sangbum Han ,  Seobong Chang ,  Bryan C. Hendrix ,  Jaeeon Park ,  Thomas H. Baum

IPC: H01L21/285 ,  C23C16/06 ,  C23C16/16 ,  C07F15/06 ,  C23C16/18

CPC classification number: H01L21/28556 ,  C07F15/06 ,  C23C16/06 ,  C23C16/16 ,  C23C16/18

Abstract: The present disclosure relates to a bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors, and ultra high purity versions thereof, methods of making, and methods of using these bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursors in a vapor deposition process. One aspect of the disclosure relates to an ultrahigh purity bridging asymmetric haloalkynyl dicobalt hexacarbonyl precursor of the formula Co2(CO)6(R3C≡CR4), where R3 and R4 are different organic moieties and R4 is more electronegative or more electron withdrawing compared to R3.