公开(公告)号：US20190157157A1

公开(公告)日：2019-05-23

申请号：US15821684

申请日：2017-11-22

Applicant: GLOBALFOUNDRIES INC.

Inventor： Shahab Siddiqui ,  Beth Baumert ,  Abu Naser M. Zainuddin ,  Luigi Pantisano

IPC: H01L21/8234 ,  H01L21/02 ,  H01L21/28 ,  H01L27/088 ,  H01L29/423 ,  H01L29/49 ,  H01L29/51 ,  H01L29/66 ,  H01L21/311 ,  C23C16/50 ,  C23C16/455

Abstract: At least one method, apparatus and system are provided for forming a hybrid oxide layer for providing for a first region of a finFET device to operate at a first voltage and a second region of the finFET to operate at a second voltage. A first set of fins are formed on an I/O device portion, and a second set of fins are formed on a core device portion of a substrate. A first and a second oxide layers are deposited on the first and second set of fins, wherein they merge to form a hybrid oxide layer. The thickness of the second oxide layer is based on a first operating voltage for the I/O device portion. The hybrid layer is removed from the core device portion such that the I/O device portion operates at the first voltage and the core device portion operates at a second voltage.

公开(公告)号：US20200321332A1

公开(公告)日：2020-10-08

申请号：US16376234

申请日：2019-04-05

Applicant: GLOBALFOUNDRIES INC.

Inventor： Abu Naser M. Zainuddin ,  Christopher D. Sheraw ,  Sangameshwar Rao Saudari ,  Wei Ma ,  Kai Zhao ,  Bala S. Haran

IPC: H01L27/088 ,  H01L21/8234 ,  H01L29/78 ,  H01L29/66 ,  H01L21/3065

Abstract: A method includes forming a first region including a pair of first FinFETs and a second region including a pair of second FinFETs on a substrate. Each FinFET includes a metal gate having a first spacer adjacent thereto, and each first FinFET has a gate dielectric that is thicker than a gate dielectric of each second FinFET, such that the first FinFETs can be higher voltage input/output devices. The method forms a first contact between the metal gates of the pair of first FinFETs with a second spacer thereabout, the second spacer contacting a portion of each first spacer. The second spacer thus has a portion extending parallel to the metal gates, and a portion extending perpendicular to the metal gates. A second contact is formed between the metal gates of the pair of second FinFETs, and the second contact devoid of the second spacer.

公开(公告)号：US10755982B1

公开(公告)日：2020-08-25

申请号：US16508816

申请日：2019-07-11

Applicant: GLOBALFOUNDRIES Inc.

Inventor： Abu Naser M. Zainuddin ,  Wei Ma ,  Daniel Jaeger ,  Joseph Versaggi ,  Jae Gon Lee ,  Thomas Kauerauf

IPC: H01L21/8234 ,  H01L27/088 ,  H01L29/66

Abstract: One illustrative method disclosed herein includes forming 1st and 2nd sacrificial gate structures for, respectively, 1st and 2nd devices, removing 1st and 2nd sacrificial gate electrodes from the 1st and 2nd sacrificial gate structures so as to at least partially define, respectively, 1st and 2nd replacement gate (RMG) cavities, and removing the 2nd sacrificial gate insulation layer from the 2nd RMG cavity while leaving the 1st sacrificial gate insulation layer in position in the 1st RMG cavity. The method also includes forming a conformal gate insulation layer in both the 1st and 2nd RMG cavities, removing the conformal gate insulation layer and the 1st sacrificial gate insulation layer from the 1st RMG cavity while leaving the conformal gate insulation layer in the 2nd RMG cavity, and performing an oxidation process to form an interfacial gate insulation layer only in the 1st RMG cavity.

公开(公告)号：US10438853B2

公开(公告)日：2019-10-08

申请号：US15821684

申请日：2017-11-22

Applicant: GLOBALFOUNDRIES INC.

Inventor： Shahab Siddiqui ,  Beth Baumert ,  Abu Naser M. Zainuddin ,  Luigi Pantisano

IPC: H01L21/8234 ,  C23C16/455 ,  H01L21/02 ,  H01L21/28 ,  H01L27/088 ,  H01L29/423 ,  H01L29/49 ,  H01L29/51 ,  H01L29/66 ,  H01L21/311 ,  C23C16/50

Abstract: At least one method, apparatus and system are provided for forming a hybrid oxide layer for providing for a first region of a finFET device to operate at a first voltage and a second region of the finFET to operate at a second voltage. A first set of fins are formed on an I/O device portion, and a second set of fins are formed on a core device portion of a substrate. A first and a second oxide layers are deposited on the first and second set of fins, wherein they merge to form a hybrid oxide layer. The thickness of the second oxide layer is based on a first operating voltage for the I/O device portion. The hybrid layer is removed from the core device portion such that the I/O device portion operates at the first voltage and the core device portion operates at a second voltage.