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公开(公告)号：US09059554B2
公开(公告)日：2015-06-16
申请号：US14049383
申请日：2013-10-09
Applicant: Gigaphoton Inc.
Inventor： Akihiko Kurosu , Junichi Fujimoto , Yosuke Ishizuka , Takashi Matsunaga , Osamu Wakabayashi
CPC classification number: H01S3/036 , F16C32/047 , H01S3/02 , H01S3/041 , H01S3/223 , H01S3/2232 , H01S3/2258
Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
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Patent Agency Ranking
公开(公告)号：US09225139B2
公开(公告)日：2015-12-29
申请号：US14531876
申请日：2014-11-03
Applicant: Gigaphoton Inc.
Inventor： Akihiko Kurosu , Junichi Fujimoto , Yosuke Ishizuka , Takashi Matsunaga , Osamu Wakabayashi
CPC classification number: H01S3/036 , F16C32/047 , H01S3/02 , H01S3/041 , H01S3/223 , H01S3/2232 , H01S3/2258
Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
Abstract translation: 放电泵浦气体激光装置可以包括激光室，设置在激光室中的一对放电电极，具有磁性轴承的风扇设置在激光室中并且能够使激光室中的气体循环， 被配置为容纳激光室的壳体，以及与磁性轴承电连接的磁性轴承控制器，其能够控制磁性轴承，并且与激光室分开设置在壳体中。
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公开(公告)号：US09841684B2
公开(公告)日：2017-12-12
申请号：US14629282
申请日：2015-02-23
Applicant: GIGAPHOTON INC.
Inventor： Hiroshi Tanaka , Akihiko Kurosu , Hiroyuki Masuda , Hideyuki Ochiai , Osamu Wakabayashi , Masato Moriya
IPC: G03F7/20 , H01L21/268 , H01L21/67 , H01L21/66
CPC classification number: G03F7/70483 , G03F7/70041 , G03F7/70058 , G03F7/70358 , H01L21/268 , H01L21/67115 , H01L21/67253 , H01L22/10 , H01L22/26
Abstract: A light source apparatus according to an embodiment may be used for an exposure apparatus which exposes a plurality of wafers by repeating a wafer exposure for exposing a total exposure area of each wafer. The wafer exposure may include a sequential execution of scanning exposures in which each divided area defined by dividing the total exposure area of each wafer is scanned by pulsed light. The apparatus may comprise: a light source controller configured to execute a control for outputting the pulsed light based on a luminescence trigger signal received from the exposure apparatus; a detector configured to detect a characteristic of the pulsed light; and a data collection processor configured to collect at least a piece of data in data included in a pulse light data group related to the pulsed light detected by the detector and a control data group related to the control, and execute a mapping process of mapping the collected data by at least one of scanning exposure basis and wafer exposure basis.
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公开(公告)号：US10250008B2
公开(公告)日：2019-04-02
申请号：US15671580
申请日：2017-08-08
Applicant: Gigaphoton Inc.
Inventor： Akihiko Kurosu , Fumio Kawamata
Abstract: A discharge excitation gas laser device may include a laser chamber in which a laser gas containing a halogen gas is encapsulated, a pair of discharge electrodes disposed to face each other inside the laser chamber, a fan disposed inside the laser chamber to make the laser gas flow between the pair of discharge electrodes, a motor for rotating the fan, a motor power supply for supplying power to the motor, a magnetic bearing configured to levitate the rotary shaft of the fan magnetically, a displacement sensor for detecting the position of the rotary shaft through a can, and a controller configured to measure the rotational speed of the fan on the basis of a detection signal from the displacement sensor and control the motor power supply in such a manner that the measured rotational speed becomes a target rotational speed.
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公开(公告)号：US10164396B2
公开(公告)日：2018-12-25
申请号：US15720122
申请日：2017-09-29
Applicant: GIGAPHOTON INC.
Inventor： Akihiko Kurosu , Takashi Matsunaga , Hiroyuki Masuda , Osamu Wakabayashi , Hiroaki Tsushima , Masanori Yashiro , Takeshi Ohta
IPC: H01S3/036 , H01S3/097 , H01S3/0971 , H01S3/104 , H01S3/04 , H01S3/03 , H01S3/08 , H01S3/134 , H01S3/13 , H01S3/225 , H01S3/041
Abstract: There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.
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公开(公告)号：US09825417B2
公开(公告)日：2017-11-21
申请号：US15144081
申请日：2016-05-02
Applicant: GIGAPHOTON INC.
Inventor： Akihiko Kurosu , Takashi Matsunaga , Hiroyuki Masuda , Osamu Wakabayashi , Hiroaki Tsushima , Masanori Yashiro , Takeshi Ohta
IPC: H01S3/036 , H01S3/097 , H01S3/0971 , H01S3/104 , H01S3/04 , H01S3/03 , H01S3/08 , H01S3/134 , H01S3/13 , H01S3/225 , H01S3/041
CPC classification number: H01S3/036 , H01S3/03 , H01S3/0404 , H01S3/0407 , H01S3/041 , H01S3/08009 , H01S3/08031 , H01S3/09702 , H01S3/0971 , H01S3/104 , H01S3/1306 , H01S3/134 , H01S3/2258
Abstract: There may be provided a laser unit including a display configured to display one or both of electric power consumed by the laser unit and electric energy consumed by the laser unit.
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