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公开(公告)号：US11050210B2
公开(公告)日：2021-06-29
申请号：US16730065
申请日：2019-12-30
Applicant: Gigaphoton Inc.
Inventor： Hisakazu Katsuumi , Junichi Fujimoto , Satoshi Tanaka
IPC: H01S3/04 , H01S3/041 , H01G2/08 , H01S3/034 , H01S3/038 , H01S3/097 , H01S3/0975 , H01S3/032 , G03F7/20 , H01S3/134 , H01S3/036 , H01S3/0971
Abstract: To cool a capacitor including a first electrode and a second electrode, a capacitor cooling structure includes: a conducting part electrically connected with the first electrode; an insulating part that has a first surface including a first position and a second surface including a second position, and is connected with the conducting part at the first position; a first fastening part configured to fasten the conducting part and the insulating part to each other; and a cooling part connected with the second position facing the first position, the conducting part and the cooling part being electrically insulated from each other by the insulating part.
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公开(公告)号：US09748727B2
公开(公告)日：2017-08-29
申请号：US14956709
申请日：2015-12-02
Applicant: Gigaphoton Inc.
Inventor： Kouji Kakizaki , Hiroaki Tsushima , Junichi Fujimoto , Natsushi Suzuki , Hisakazu Katsuumi
IPC: H01S3/0977 , H01S3/0971 , H01S3/038 , H01S3/08
CPC classification number: H01S3/09713 , H01S3/0384 , H01S3/08009 , H01S3/0977
Abstract: A preliminary ionization discharge device used in a laser chamber of a laser apparatus using preliminary ionization includes a dielectric pipe; a preliminary ionization inner electrode provided inside the dielectric pipe; and a preliminary ionization outer electrode provided outside the dielectric pipe. The preliminary ionization outer electrode includes: a contact plate part configured to contact the dielectric pipe; and an elastic part configured to exert a force in a direction in which the contact plate part pushes the dielectric pipe.
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3.发明申请公开(公告)号：US20130320232A1
公开(公告)日：2013-12-05
申请号：US13904117
申请日：2013-05-29
Applicant: Gigaphoton Inc.
Inventor： Tsukasa HORI , Junichi Fujimoto , Osamu Wakabayashi
IPC: G21K5/04
Abstract: An extreme ultraviolet light generation apparatus may include a droplet production device configured to produce a droplet of a target substance in a predetermined traveling direction, a first laser device configured to generate a first laser beam and irradiate the droplet with the first laser beam to diffuse the droplet, a second laser device configured to generate a second laser beam and irradiate the target substance diffused by irradiation of the first laser beam with the second laser beam to produce plasma of the diffused target substance and generate extreme ultraviolet light from the plasma of the target substance, and a beam shaping unit configured to elongate a beam spot of the first laser beam in the traveling direction of the droplet produced by the droplet production device.
Abstract translation: 极紫外线发生装置可以包括：液滴制造装置，其被配置为在预定的行进方向上产生目标物质的液滴;第一激光装置，其被配置为产生第一激光束并用第一激光束照射液滴， 液滴，第二激光装置，被配置为产生第二激光束并且通过用第二激光束照射第一激光束来照射被扩散的目标物质，以产生扩散目标物质的等离子体并从目标的等离子体产生极紫外光 以及光束整形单元，其被配置为在由液滴产生装置产生的液滴的行进方向上拉长第一激光束的束斑。
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Patent Agency Ranking
公开(公告)号：US09055657B2
公开(公告)日：2015-06-09
申请号：US13904117
申请日：2013-05-29
Applicant: Gigaphoton Inc.
Inventor： Tsukasa Hori , Junichi Fujimoto , Osamu Wakabayashi
Abstract: An extreme ultraviolet light generation apparatus may include a droplet production device configured to produce a droplet of a target substance in a predetermined traveling direction, a first laser device configured to generate a first laser beam and irradiate the droplet with the first laser beam to diffuse the droplet, a second laser device configured to generate a second laser beam and irradiate the target substance diffused by irradiation of the first laser beam with the second laser beam to produce plasma of the diffused target substance and generate extreme ultraviolet light from the plasma of the target substance, and a beam shaping unit configured to elongate a beam spot of the first laser beam in the traveling direction of the droplet produced by the droplet production device.
Abstract translation: 极紫外线发生装置可以包括：液滴制造装置，其被配置为在预定的行进方向上产生目标物质的液滴;第一激光装置，其被配置为产生第一激光束并用第一激光束照射液滴， 液滴，第二激光装置，被配置为产生第二激光束并且通过用第二激光束照射第一激光束来照射被扩散的目标物质，以产生扩散目标物质的等离子体并从目标的等离子体产生极紫外光 以及光束整形单元，其被配置为在由液滴产生装置产生的液滴的行进方向上拉长第一激光束的束斑。
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5.发明授权公开(公告)号：US09507248B2
公开(公告)日：2016-11-29
申请号：US13681744
申请日：2012-11-20
Applicant: Gigaphoton Inc.
Inventor： Shinji Okazaki , Hakaru Mizoguchi , Junichi Fujimoto , Takashi Matsunaga , Kouji Kakizaki , Osamu Wakabayashi
CPC classification number: G03B27/522 , G03F7/70408
Abstract: A two-beam interference apparatus may include a wafer stage on which a wafer may be set, a beam splitter to split first laser light into second and third laser light having a beam intensity distribution elongated in a first direction within a surface of the wafer, and an optical system to guide the second and third laser light onto the wafer. The wafer is irradiated with the second laser light from a second direction perpendicular to the first direction, and the third laser light from a third direction perpendicular to the first direction but different from the second direction, to thereby cause interference of the second and third laser light on the wafer. This apparatus increases the accuracy of the two-beam interference exposure.
Abstract translation: 双光束干涉装置可以包括其上可以设置晶片的晶片台，分束器，用于将第一激光分离成具有沿晶片表面内的第一方向延伸的光束强度分布的第二和第三激光， 以及将第二和第三激光引导到晶片上的光学系统。 从垂直于第一方向的第二方向照射第二激光，从与第一方向垂直但与第二方向不同的第三方向照射第三激光，从而引起第二和第三激光的干涉 光在晶圆上。 该装置增加了双光束干涉曝光的精度。
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公开(公告)号：US09225139B2
公开(公告)日：2015-12-29
申请号：US14531876
申请日：2014-11-03
Applicant: Gigaphoton Inc.
Inventor： Akihiko Kurosu , Junichi Fujimoto , Yosuke Ishizuka , Takashi Matsunaga , Osamu Wakabayashi
CPC classification number: H01S3/036 , F16C32/047 , H01S3/02 , H01S3/041 , H01S3/223 , H01S3/2232 , H01S3/2258
Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
Abstract translation: 放电泵浦气体激光装置可以包括激光室，设置在激光室中的一对放电电极，具有磁性轴承的风扇设置在激光室中并且能够使激光室中的气体循环， 被配置为容纳激光室的壳体，以及与磁性轴承电连接的磁性轴承控制器，其能够控制磁性轴承，并且与激光室分开设置在壳体中。
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公开(公告)号：US09373926B2
公开(公告)日：2016-06-21
申请号：US14694743
申请日：2015-04-23
Applicant: GIGAPHOTON INC.
Inventor： Hiroaki Tsushima , Hakaru Mizoguchi , Junichi Fujimoto , Hiroaki Nakarai , Natsushi Suzuki
IPC: H01S3/036 , F16C33/66 , F16C32/04 , H01S3/134 , H01S3/225 , H01S3/038 , H01S3/097 , H01S3/223 , H01S3/104 , F16C19/06 , H01S3/0971 , H01S3/1055
CPC classification number: H01S3/036 , F16C19/06 , F16C32/0402 , F16C32/0406 , F16C33/6696 , F16C2204/02 , F16C2204/10 , F16C2204/52 , F16C2240/40 , F16C2360/46 , H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/104 , H01S3/1055 , H01S3/134 , H01S3/2232 , H01S3/225 , H01S3/2251 , H01S3/2256
Abstract: There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer.
Abstract translation: 提供了容纳一对放电电极和气体循环功能的激光室，所述激光室包括：支撑所述气体循环风扇的轴的磁性轴承，所述轴与所述磁性轴承不接触; 以及触控轴承，其构造为当所述磁性轴承不受控制时作为轴承进行操作，所述触地轴承设置有由Au镀层，含Ni镀层和Cu镀层中的一种或多种构成的固体润滑剂。
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公开(公告)号：US09059554B2
公开(公告)日：2015-06-16
申请号：US14049383
申请日：2013-10-09
Applicant: Gigaphoton Inc.
Inventor： Akihiko Kurosu , Junichi Fujimoto , Yosuke Ishizuka , Takashi Matsunaga , Osamu Wakabayashi
CPC classification number: H01S3/036 , F16C32/047 , H01S3/02 , H01S3/041 , H01S3/223 , H01S3/2232 , H01S3/2258
Abstract: A discharge-pumped gas laser device may include a laser chamber, a pair of discharge electrodes provided in the laser chamber, a fan with a magnetic bearing being provided in the laser chamber and configured to be capable of circulating a gas in the laser chamber, a housing configured to contain the laser chamber, and a magnetic bearing controller connected to the magnetic bearing electrically, being capable of controlling the magnetic bearing, and provided in the housing separately from the laser chamber.
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