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公开(公告)号:US09030862B2
公开(公告)日:2015-05-12
申请号:US14488494
申请日:2014-09-17
Applicant: Intermolecular Inc.
Inventor: Pragati Kumar , Sean Barstow , Tony P. Chiang , Sandra G Malhotra
IPC: G11C11/00 , H01L45/00 , G11C13/00 , H01L27/24 , H01L29/861
CPC classification number: H01L45/1253 , G11C13/0007 , G11C13/003 , G11C2213/32 , G11C2213/51 , G11C2213/52 , G11C2213/56 , G11C2213/71 , G11C2213/72 , G11C2213/74 , G11C2213/76 , G11C2213/79 , H01L27/2409 , H01L27/2463 , H01L29/861 , H01L45/04 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/1608 , H01L45/165
Abstract: Nonvolatile memory elements including resistive switching metal oxides may be formed in one or more layers on an integrated circuit. Each memory element may have a first conductive layer, a metal oxide layer, and a second conductive layer. Electrical devices such as diodes may be coupled in series with the memory elements. The first conductive layer may be formed from a metal nitride. The metal oxide layer may contain the same metal as the first conductive layer. The metal oxide may form an ohmic contact or a Schottky contact with the first conductive layer. The second conductive layer may form an ohmic contact or Schottky contact with the metal oxide layer. The first conductive layer, the metal oxide layer, and the second conductive layer may include sublayers. The second conductive layer may include an adhesion or barrier layer and a workfunction control layer.
Abstract translation: 包括电阻开关金属氧化物的非易失性存储元件可以形成在集成电路上的一个或多个层中。 每个存储元件可以具有第一导电层,金属氧化物层和第二导电层。 诸如二极管的电气设备可以与存储器元件串联耦合。 第一导电层可以由金属氮化物形成。 金属氧化物层可以包含与第一导电层相同的金属。 金属氧化物可以与第一导电层形成欧姆接触或肖特基接触。 第二导电层可以与金属氧化物层形成欧姆接触或肖特基接触。 第一导电层,金属氧化物层和第二导电层可以包括子层。 第二导电层可以包括粘合或阻挡层和功函数控制层。
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公开(公告)号:US08599603B2
公开(公告)日:2013-12-03
申请号:US13829378
申请日:2013-03-14
Applicant: Intermolecular Inc.
Inventor: Pragati Kumar , Sean Barstow , Tony P. Chiang , Sandra G Malhotra
IPC: G11C11/00
CPC classification number: H01L45/1253 , G11C13/0007 , G11C13/003 , G11C2213/32 , G11C2213/51 , G11C2213/52 , G11C2213/56 , G11C2213/71 , G11C2213/72 , G11C2213/74 , G11C2213/76 , G11C2213/79 , H01L27/2409 , H01L27/2463 , H01L29/861 , H01L45/04 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/1608 , H01L45/165
Abstract: Nonvolatile memory elements are provided that have resistive switching metal oxides. The nonvolatile memory elements may be formed in one or more layers on an integrated circuit. Each memory element may have a first conductive layer, a metal oxide layer, and a second conductive layer. Electrical devices such as diodes may be coupled in series with the memory elements. The first conductive layer may be formed from a metal nitride. The metal oxide layer may contain the same metal as the first conductive layer. The metal oxide may form an ohmic contact or a Schottky contact with the first conductive layer. The second conductive layer may form an ohmic contact or Schottky contact with the metal oxide layer. The first conductive layer, the metal oxide layer, and the second conductive layer may include sublayers. The second conductive layer may include an adhesion or barrier layer and a workfunction control layer.
Abstract translation: 提供具有电阻开关金属氧化物的非易失性存储元件。 非易失性存储元件可以形成在集成电路上的一个或多个层中。 每个存储元件可以具有第一导电层,金属氧化物层和第二导电层。 诸如二极管的电气设备可以与存储器元件串联耦合。 第一导电层可以由金属氮化物形成。 金属氧化物层可以包含与第一导电层相同的金属。 金属氧化物可以与第一导电层形成欧姆接触或肖特基接触。 第二导电层可以与金属氧化物层形成欧姆接触或肖特基接触。 第一导电层,金属氧化物层和第二导电层可以包括子层。 第二导电层可以包括粘合或阻挡层和功函数控制层。
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公开(公告)号:US09029232B2
公开(公告)日:2015-05-12
申请号:US14281550
申请日:2014-05-19
Applicant: Intermolecular Inc.
Inventor: Sandra G Malhotra , Sean Barstow , Tony P. Chiang , Wayne R French , Pragati Kumar , Prashant B Phatak , Sunil Shanker , Wen Wu
CPC classification number: H01L45/1608 , H01L27/2418 , H01L27/2463 , H01L45/08 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/1625 , H01L45/1641
Abstract: Nonvolatile memory elements that are based on resistive switching memory element layers are provided. A nonvolatile memory element may have a resistive switching metal oxide layer. The resistive switching metal oxide layer may have one or more layers of oxide. A resistive switching metal oxide may be doped with a dopant that increases its melting temperature and enhances its thermal stability. Layers may be formed to enhance the thermal stability of the nonvolatile memory element. An electrode for a nonvolatile memory element may contain a conductive layer and a buffer layer.
Abstract translation: 提供了基于电阻式开关存储元件层的非易失性存储元件。 非易失性存储元件可以具有电阻性开关金属氧化物层。 电阻式开关金属氧化物层可以具有一层或多层氧化物。 电阻式开关金属氧化物可以掺杂有增加其熔融温度并增强其热稳定性的掺杂剂。 可以形成层以增强非易失性存储元件的热稳定性。 用于非易失性存储元件的电极可以包含导电层和缓冲层。
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公开(公告)号:US20150034896A1
公开(公告)日:2015-02-05
申请号:US14488494
申请日:2014-09-17
Applicant: Intermolecular Inc.
Inventor: Pragati Kumar , Sean Barstow , Tony P. Chiang , Sandra G Malhotra
IPC: H01L45/00 , H01L29/861 , H01L27/24
CPC classification number: H01L45/1253 , G11C13/0007 , G11C13/003 , G11C2213/32 , G11C2213/51 , G11C2213/52 , G11C2213/56 , G11C2213/71 , G11C2213/72 , G11C2213/74 , G11C2213/76 , G11C2213/79 , H01L27/2409 , H01L27/2463 , H01L29/861 , H01L45/04 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/1608 , H01L45/165
Abstract: Nonvolatile memory elements including resistive switching metal oxides may be formed in one or more layers on an integrated circuit. Each memory element may have a first conductive layer, a metal oxide layer, and a second conductive layer. Electrical devices such as diodes may be coupled in series with the memory elements. The first conductive layer may be formed from a metal nitride. The metal oxide layer may contain the same metal as the first conductive layer. The metal oxide may form an ohmic contact or a Schottky contact with the first conductive layer. The second conductive layer may form an ohmic contact or Schottky contact with the metal oxide layer. The first conductive layer, the metal oxide layer, and the second conductive layer may include sublayers. The second conductive layer may include an adhesion or barrier layer and a workfunction control layer.
Abstract translation: 包括电阻开关金属氧化物的非易失性存储元件可以形成在集成电路上的一个或多个层中。 每个存储元件可以具有第一导电层,金属氧化物层和第二导电层。 诸如二极管的电气设备可以与存储器元件串联耦合。 第一导电层可以由金属氮化物形成。 金属氧化物层可以包含与第一导电层相同的金属。 金属氧化物可以与第一导电层形成欧姆接触或肖特基接触。 第二导电层可以与金属氧化物层形成欧姆接触或肖特基接触。 第一导电层,金属氧化物层和第二导电层可以包括子层。 第二导电层可以包括粘合或阻挡层和功函数控制层。
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公开(公告)号:US08765567B2
公开(公告)日:2014-07-01
申请号:US14062473
申请日:2013-10-24
Applicant: Intermolecular Inc.
Inventor: Sandra G Malhotra , Sean Barstow , Tony P. Chiang , Pragati Kumar , Prashant B Phatak , Sunil Shanker , Wen Wu
IPC: H01L21/02
CPC classification number: H01L45/1608 , H01L27/2418 , H01L27/2463 , H01L45/08 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/1625 , H01L45/1641
Abstract: Nonvolatile memory elements that are based on resistive switching memory element layers are provided. A nonvolatile memory element may have a resistive switching metal oxide layer. The resistive switching metal oxide layer may have one or more layers of oxide. A resistive switching metal oxide may be doped with a dopant that increases its melting temperature and enhances its thermal stability. Layers may be formed to enhance the thermal stability of the nonvolatile memory element. An electrode for a nonvolatile memory element may contain a conductive layer and a buffer layer.
Abstract translation: 提供了基于电阻式开关存储元件层的非易失性存储元件。 非易失性存储元件可以具有电阻性开关金属氧化物层。 电阻式开关金属氧化物层可以具有一层或多层氧化物。 电阻式开关金属氧化物可以掺杂有增加其熔融温度并增强其热稳定性的掺杂剂。 可以形成层以增强非易失性存储元件的热稳定性。 用于非易失性存储元件的电极可以包含导电层和缓冲层。
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公开(公告)号:US08873276B2
公开(公告)日:2014-10-28
申请号:US14058518
申请日:2013-10-21
Applicant: Intermolecular Inc.
Inventor: Pragati Kumar , Sean Barstow , Tony P. Chiang , Sandra G Malhotra
CPC classification number: H01L45/1253 , G11C13/0007 , G11C13/003 , G11C2213/32 , G11C2213/51 , G11C2213/52 , G11C2213/56 , G11C2213/71 , G11C2213/72 , G11C2213/74 , G11C2213/76 , G11C2213/79 , H01L27/2409 , H01L27/2463 , H01L29/861 , H01L45/04 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/1608 , H01L45/165
Abstract: Nonvolatile memory elements including resistive switching metal oxides may be formed in one or more layers on an integrated circuit. Each memory element may have a first conductive layer, a metal oxide layer, and a second conductive layer. Electrical devices such as diodes may be coupled in series with the memory elements. The first conductive layer may be formed from a metal nitride. The metal oxide layer may contain the same metal as the first conductive layer. The metal oxide may form an ohmic contact or a Schottky contact with the first conductive layer. The second conductive layer may form an ohmic contact or Schottky contact with the metal oxide layer. The first conductive layer, the metal oxide layer, and the second conductive layer may include sublayers. The second conductive layer may include an adhesion or barrier layer and a workfunction control layer.
Abstract translation: 包括电阻开关金属氧化物的非易失性存储元件可以形成在集成电路上的一个或多个层中。 每个存储元件可以具有第一导电层,金属氧化物层和第二导电层。 诸如二极管的电气设备可以与存储器元件串联耦合。 第一导电层可以由金属氮化物形成。 金属氧化物层可以包含与第一导电层相同的金属。 金属氧化物可以与第一导电层形成欧姆接触或肖特基接触。 第二导电层可以与金属氧化物层形成欧姆接触或肖特基接触。 第一导电层,金属氧化物层和第二导电层可以包括子层。 第二导电层可以包括粘合或阻挡层和功函数控制层。
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公开(公告)号:US20140051210A1
公开(公告)日:2014-02-20
申请号:US14062473
申请日:2013-10-24
Applicant: Intermolecular Inc.
Inventor: Sandra G Malhotra , Sean Barstow , Tony P. Chiang , Pragati KUMAR , Prashant B Phatak , Sunil Shanker , Wen Wu
IPC: H01L45/00
CPC classification number: H01L45/1608 , H01L27/2418 , H01L27/2463 , H01L45/08 , H01L45/1233 , H01L45/145 , H01L45/146 , H01L45/1625 , H01L45/1641
Abstract: Nonvolatile memory elements that are based on resistive switching memory element layers are provided. A nonvolatile memory element may have a resistive switching metal oxide layer. The resistive switching metal oxide layer may have one or more layers of oxide. A resistive switching metal oxide may be doped with a dopant that increases its melting temperature and enhances its thermal stability. Layers may be formed to enhance the thermal stability of the nonvolatile memory element. An electrode for a nonvolatile memory element may contain a conductive layer and a buffer layer.
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