公开(公告)号：US09766264B2

公开(公告)日：2017-09-19

申请号：US14465304

申请日：2014-08-21

Applicant: INVENSENSE, INC.

Inventor： Jin Qiu ,  Joe Seeger ,  Alexander Castro ,  Igor Tchertkov ,  Richard Li

IPC: G01P15/125 ,  G01P21/00 ,  G01P15/02

CPC classification number: G01P15/125 ,  G01P15/02 ,  G01P21/00

Abstract: Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or transducers that can register motion of the proof mass and support structure and employ and output-cancelling mechanism so that the accelerometer can distinguish between acceleration and anchor motion due to sources other than acceleration. For example, the effects of anchor motion can be cancelled from an output signal of the accelerometer so that the accelerometer exhibits sensitivity to only acceleration.

公开(公告)号：US09625329B2

公开(公告)日：2017-04-18

申请号：US14635205

申请日：2015-03-02

Applicant: InvenSense, Inc.

Inventor： Ilya Gurin ,  Joe Seeger

IPC: G01L1/18 ,  G01D18/00 ,  G01L27/00 ,  G01L1/22

CPC classification number: G01L1/18 ,  G01D18/00 ,  G01L1/183 ,  G01L1/2293 ,  G01L27/002

Abstract: An example system comprises a microelectromechanical system (MEMS) sensor, a strain gauge, and a strain compensation circuit. The MEMS sensor is operable to generate a sensor output signal that corresponds to a sensed condition (e.g., acceleration, orientation, and/or pressure). The strain gauge is operable to generate a strain measurement signal indicative of a strain on the MEMS sensor. The strain compensation circuit is operable to modify the sensor output signal to compensate for the strain based on the strain measurement signal. The strain compensation circuit stores sensor-strain relationship data indicative of a relationship between the sensor output signal and the strain measurement signal. The strain compensation circuit is operable to use the sensor-strain relationship data for the modifying of the sensor output signal. The modification of the sensor output signal comprises one or both of: removal of an offset from the sensor signal, and application of a gain to the sensor signal.

公开(公告)号：US20160258825A1

公开(公告)日：2016-09-08

申请号：US14635205

申请日：2015-03-02

Applicant: InvenSense, Inc.

Inventor： Ilya Gurin ,  Joe Seeger

IPC: G01L1/18 ,  G01D18/00

CPC classification number: G01L1/18 ,  G01D18/00 ,  G01L1/183 ,  G01L1/2293 ,  G01L27/002

Abstract: An example system comprises a microelectromechanical system (MEMS) sensor, a strain gauge, and a strain compensation circuit. The MEMS sensor is operable to generate a sensor output signal that corresponds to a sensed condition (e.g., acceleration, orientation, and/or pressure). The strain gauge is operable to generate a strain measurement signal indicative of a strain on the MEMS sensor. The strain compensation circuit is operable to modify the sensor output signal to compensate for the strain based on the strain measurement signal. The strain compensation circuit stores sensor-strain relationship data indicative of a relationship between the sensor output signal and the strain measurement signal. The strain compensation circuit is operable to use the sensor-strain relationship data for the modifying of the sensor output signal. The modification of the sensor output signal comprises one or both of: removal of an offset from the sensor signal, and application of a gain to the sensor signal.

Abstract translation: 示例系统包括微机电系统（MEMS）传感器，应变计和应变补偿电路。 MEMS传感器可操作以产生对应于感测状态（例如，加速度，取向和/或压力）的传感器输出信号。 应变仪可操作以产生指示MEMS传感器上的应变的应变测量信号。 应变补偿电路可操作以修改传感器输出信号以补偿基于应变测量信号的应变。 应变补偿电路存储表示传感器输出信号和应变测量信号之间的关系的传感器 - 应变关系数据。 应变补偿电路可操作地使用传感器 - 应变关系数据来修改传感器输出信号。 传感器输出信号的修改包括以下一个或两个：从传感器信号中去除偏移，以及对传感器信号应用增益。

公开(公告)号：US11841228B2

公开(公告)日：2023-12-12

申请号：US17467145

申请日：2021-09-03

Applicant: INVENSENSE, INC.

Inventor： Doruk Senkal ,  Robert Hennessy ,  Houri Johari-Galle ,  Joe Seeger

IPC: G01C19/5712 ,  G01C19/5783

CPC classification number: G01C19/5712 ,  G01C19/5783

Abstract: The subject disclosure provides exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibratory rate gyroscope architectures with fully-coupled sense modes. Embodiments can employ balanced drive and/or balanced sense components to reduce induced vibrations and/or part to part coupling. Embodiments can comprise two inner frame gyroscopes for GY sense mode and an outer frame or saddle gyroscope for GX sense mode and drive system coupling, drive shuttles coupled to the two inner frame gyroscopes or outer frame gyroscope, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sense mode. Components can be removed from an exemplary overall architecture to fabricate a single axis or two axis gyroscope and/or can be configured such that a number of proof-masses can be reduced in half from an exemplary overall architecture to fabricate a half-gyroscope. Other embodiments can employ a stress isolation frame to reduce package induced stress.

公开(公告)号：US20210396519A1

公开(公告)日：2021-12-23

申请号：US17467145

申请日：2021-09-03

Applicant: INVENSENSE, INC.

Inventor： Doruk Senkal ,  Robert Hennessy ,  Houri Johari-Galle ,  Joe Seeger

IPC: G01C19/5712 ,  G01C19/5783

Abstract: The subject disclosure provides exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibratory rate gyroscope architectures with fully-coupled sense modes. Embodiments can employ balanced drive and/or balanced sense components to reduce induced vibrations and/or part to part coupling. Embodiments can comprise two inner frame gyroscopes for GY sense mode and an outer frame or saddle gyroscope for GX sense mode and drive system coupling, drive shuttles coupled to the two inner frame gyroscopes or outer frame gyroscope, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sense mode. Components can be removed from an exemplary overall architecture to fabricate a single axis or two axis gyroscope and/or can be configured such that a number of proof-masses can be reduced in half from an exemplary overall architecture to fabricate a half-gyroscope. Other embodiments can employ a stress isolation frame to reduce package induced stress.

公开(公告)号：US11118907B2

公开(公告)日：2021-09-14

申请号：US16138637

申请日：2018-09-21

Applicant: INVENSENSE, INC.

Inventor： Doruk Senkal ,  Robert Hennessy ,  Houri Johari-Galle ,  Joe Seeger

IPC: G01C19/5712 ,  G01C19/5783

Abstract: The subject disclosure provides exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibratory rate gyroscope architectures with fully-coupled sense modes. Embodiments can employ balanced drive and/or balanced sense components to reduce induced vibrations and/or part to part coupling. Embodiments can comprise two inner frame gyroscopes for GY sense mode and an outer frame or saddle gyroscope for GX sense mode and drive system coupling, drive shuttles coupled to the two inner frame gyroscopes or outer frame gyroscope, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sense mode. Components can be removed from an exemplary overall architecture to fabricate a single axis or two axis gyroscope and/or can be configured such that a number of proof-masses can be reduced in half from an exemplary overall architecture to fabricate a half-gyroscope. Other embodiments can employ a stress isolation frame to reduce package induced stress.

公开(公告)号：US20200096337A1

公开(公告)日：2020-03-26

申请号：US16138637

申请日：2018-09-21

Applicant: INVENSENSE, INC.

Inventor： Doruk Senkal ,  Robert Hennessy ,  Houri Johari-Galle ,  Joe Seeger

IPC: G01C19/5712 ,  G01C19/5783

Abstract: The subject disclosure provides exemplary 3-axis (e.g., GX, GY, and GZ) linear and angular momentum balanced vibratory rate gyroscope architectures with fully-coupled sense modes. Embodiments can employ balanced drive and/or balanced sense components to reduce induced vibrations and/or part to part coupling. Embodiments can comprise two inner frame gyroscopes for GY sense mode and an outer frame or saddle gyroscope for GX sense mode and drive system coupling, drive shuttles coupled to the two inner frame gyroscopes or outer frame gyroscope, and four GZ proof masses coupled to the inner frame gyroscopes for GZ sense mode. Components can be removed from an exemplary overall architecture to fabricate a single axis or two axis gyroscope and/or can be configured such that a number of proof-masses can be reduced in half from an exemplary overall architecture to fabricate a half-gyroscope. Other embodiments can employ a stress isolation frame to reduce package induced stress.

公开(公告)号：US20140360268A1

公开(公告)日：2014-12-11

申请号：US14465304

申请日：2014-08-21

Applicant: INVENSENSE, INC.

Inventor： Jin Qiu ,  Joe Seeger ,  Alexander Castro ,  Igor Tchertkov ,  Richard Li

IPC: G01P15/125 ,  G01P15/02

CPC classification number: G01P15/125 ,  G01P15/02 ,  G01P21/00

Abstract: Described herein is an accelerometer that can be sensitive to acceleration, but not anchor motion due to sources other than acceleration. The accelerometer can employ a set of electrodes and/or transducers that can register motion of the proof mass and support structure and employ and output-cancelling mechanism so that the accelerometer can distinguish between acceleration and anchor motion due to sources other than acceleration. For example, the effects of anchor motion can be cancelled from an output signal of the accelerometer so that the accelerometer exhibits sensitivity to only acceleration.

Abstract translation: 这里描述的是加速度计，其可以对加速度敏感，但是不是由于加速度以外的源而是锚定运动。 加速度计可以使用一组电极和/或换能器，其可以记录检测质量块和支撑结构的运动并采用和输出消除机构，使得加速度计能够区分由加速度以外的源而导致的加速度和锚运动。 例如，可以从加速度计的输出信号中消除锚定运动的影响，使得加速度计仅对加速度表现出灵敏度。