Planarization layer for micro-fluid ejection head substrates
    4.
    发明申请
    Planarization layer for micro-fluid ejection head substrates 有权
    用于微流体喷射头基板的平面化层

    公开(公告)号:US20060055723A1

    公开(公告)日:2006-03-16

    申请号:US10941493

    申请日:2004-09-15

    IPC分类号: B41J2/015

    摘要: A substantially inorganic planarization layer for a micro-fluid ejection head substrate and method therefor. The planarization layer includes a plurality of layers composed of one or more dielectric compounds and at least one spin on glass (SOG) layer having a total thickness ranging from about 1 microns to about 15 microns deposited over a second metal layer of the micro-fluid ejection head substrate. A top most layer of the planarization layer is selected from one or more of the dielectric compounds and a hard mask material.

    摘要翻译: 一种用于微流体喷射头基板的基本上无机的平坦化层及其方法。 平坦化层包括由一个或多个电介质化合物组成的多个层和沉积在微流体的第二金属层上的总厚度为约1微米至约15微米的至少一个旋涂玻璃(SOG)层 喷射头基板。 平坦化层的最上层选自一种或多种介电化合物和硬掩模材料。

    Process for making a micro-fluid ejection head structure
    5.
    发明申请
    Process for making a micro-fluid ejection head structure 有权
    制造微流体喷射头结构的方法

    公开(公告)号:US20060057503A1

    公开(公告)日:2006-03-16

    申请号:US10937968

    申请日:2004-09-10

    IPC分类号: B41J2/16

    摘要: A device surface of a substrate is dry-sprayed with a polymeric material (e.g., a photoresist) to provide a spray-coated layer on the surface of the substrate. The spray-coated layer has a thickness ranging from about 0.5 to about 20 microns. Flow features are formed (e.g., imaged and developed) in the spray-coated layer. A nozzle plate layer is applied to the spray-coated layer. The nozzle plate layer has a thickness ranging from about 5 to about 40 microns and contains nozzle holes formed therein to provide the micro-fluid ejection head structure.

    摘要翻译: 用聚合材料(例如,光致抗蚀剂)对衬底的器件表面进行干喷涂以在衬底的表面上提供喷涂层。 喷涂层具有约0.5至约20微米的厚度。 流动特征在喷涂层中形成(例如,成像和显影)。 将喷嘴板层施加到喷涂层。 喷嘴板层具有约5至约40微米的厚度,并且包含形成在其中的喷嘴孔以提供微流体喷射头结构。

    Methods for making micro-fluid ejection head structures
    6.
    发明申请
    Methods for making micro-fluid ejection head structures 有权
    制造微流体喷射头结构的方法

    公开(公告)号:US20070070122A1

    公开(公告)日:2007-03-29

    申请号:US11234421

    申请日:2005-09-23

    IPC分类号: B41J2/135

    摘要: Methods of making micro-fluid ejection head structures. One of the methods includes providing a substrate having a plurality fluid ejection actuators on a device surface thereof. The device surface of the substrate also has a thick film layer comprising at least one of fluid flow channels and fluid ejection chambers therein. A removable anti-reflective material is applied to at least one or more exposed portions of the device surface of the substrate. A nozzle layer is applied adjacent to the thick film layer. The nozzle layer is imaged to provide a plurality of nozzles in the nozzle layer, and the non-reflective material is removed from the exposed portions of the device surface of the substrate.

    摘要翻译: 制造微流体喷射头结构的方法。 一种方法包括在其装置表面上提供具有多个流体喷射致动器的基板。 衬底的器件表面还具有包括流体流动通道和流体喷射室中的至少一个的厚膜层。 可移除的抗反射材料被施加到衬底的器件表面的至少一个或多个暴露部分。 在厚膜层附近施加喷嘴层。 喷嘴层被成像以在喷嘴层中提供多个喷嘴,并且从基板的装置表面的暴露部分去除非反射材料。

    Nozzle members, compositions and methods for micro-fluid ejection heads
    7.
    发明申请
    Nozzle members, compositions and methods for micro-fluid ejection heads 有权
    用于微流体喷射头的喷嘴构件,组合物和方法

    公开(公告)号:US20070076053A1

    公开(公告)日:2007-04-05

    申请号:US11239799

    申请日:2005-09-30

    摘要: Improved photoimaged nozzle members for a micro-fluid ejection head, micro-fluid ejection heads containing such nozzle members, and methods for making any of the same. One such nozzle member is provided by a photoresist nozzle layer applied adjacent a thick film layer on a substrate having fluid ejector actuators. The photoresist nozzle layer has a plurality of nozzles therein. The nozzles are formed in the nozzle layer from an exit surface of the nozzle layer to an entrance surface of the nozzle layer. The nozzles have a reentrant hole profile with a wall angle greater than about 40 up to about 30° measured from an axis orthogonal to a plane defined by the exit surface of the nozzle layer.

    摘要翻译: 用于微流体喷射头的改进的光成像喷嘴构件,包含这种喷嘴构件的微流体喷射头及其制造方法。 一个这样的喷嘴构件由邻近具有流体喷射器致动器的基板上的厚膜层施加的光致抗蚀剂喷涂层提供。 光致抗蚀剂喷涂层在其中具有多个喷嘴。 喷嘴从喷嘴层的出射面到喷嘴层的入射面形成在喷嘴层中。 喷嘴具有从垂直于由喷嘴层的出射表面限定的平面的轴测量的壁角大于约40至约30°的折入孔轮廓。

    Flexible Adhesive Materials for Micro-Fluid Ejection Heads and Methods Relating Thereto
    10.
    发明申请
    Flexible Adhesive Materials for Micro-Fluid Ejection Heads and Methods Relating Thereto 有权
    用于微流体喷射头的柔性粘合材料及其相关方法

    公开(公告)号:US20070229594A1

    公开(公告)日:2007-10-04

    申请号:US11556246

    申请日:2006-11-03

    IPC分类号: B41J2/16

    摘要: Micro-fluid ejection head structures, methods of making micro-fluid ejection head structures having improved operability, and methods for improving the durability of micro-fluid ejection head structures are provided. One such micro-fluid ejection head structure includes a micro-fluid ejection head having a substrate and nozzle plate assembly adhesively attached adjacent to a substrate support using a substrate adhesive. The nozzle plate is adhesively attached adjacent to the substrate with a nozzle plate adhesive. A thermally, UV or other cure mechanism encapsulant material is attached adjacent to the ejection head and substrate support. Each of the substrate adhesive, and the encapsulant material, after curing, have a Young's modulus of less than about 2000 MPa, a shear modulus at 25° C. of less than about 15 MPa, and a glass transition temperature of less than about 90° C.

    摘要翻译: 提供微流体喷射头结构,制造具有改进的可操作性的微流体喷射头结构的方法,以及用于提高微流体喷射头结构的耐久性的方法。 一种这样的微流体喷射头结构包括具有基板的微流体喷射头和使用基底粘合剂与基底支撑件附近粘附地附接的喷嘴板组件。 喷嘴板用喷嘴板粘合剂粘附在基板附近。 热,UV或其它固化机构的密封剂材料邻近喷射头和基底支撑附着。 每个基底粘合剂和密封剂材料在固化后具有小于约2000MPa的杨氏模量,25℃下的剪切模量小于约15MPa,玻璃化转变温度低于约90MPa C。