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1.发明授权
公开(公告)号：US5807416A
公开(公告)日：1998-09-15
申请号：US714209
申请日：1996-09-16
CPC分类号： C03C17/3488 , C03C17/22 , C03C17/3435 , C03C17/3441 , C03C17/3482 , C03C2217/282
摘要： A silica glass member shows a glassy carbon coating wherein a surface of a silica glass substrate of the silica glass member shows a mean surface roughness (R.sub.a) in a range of 0.03 .mu.m to 2 .mu.m and it is coated with a glassy carbon coating. The member is manufactured by chemically roughening the substrate to a surface roughness in the above recited range; coating the surface of the silica glass substrate with an organic raw material containing carbon, curing and thereafter carbonizing the film of the organic raw material by forming a glassy carbon coating.
摘要翻译： 石英玻璃构件显示玻璃碳涂层，其中石英玻璃构件的石英玻璃基板的表面的平均表面粗糙度（Ra）在0.03μm至2μm的范围内，并且涂覆有玻璃碳涂层 。 该构件通过以下方式制造：将基底化学粗化至上述范围内的表面粗糙度; 用含碳的有机原料涂覆石英玻璃基板的表面，固化，然后通过形成玻璃碳涂层对有机原料的膜进行碳化。
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2.发明申请SILICA CRUCIBLE WITH PURE AND BUBBLE FREE INNER CRUCIBLE LAYER AND METHOD OF MAKING THE SAME 失效二氧化硅与纯净和无泡内部可溶层的可溶性及其制备方法公开(公告)号：US20100154701A1
公开(公告)日：2010-06-24
申请号：US12370517
申请日：2009-02-12
CPC分类号： C03B19/095 , Y10T117/1032
摘要： A method of making a silica crucible in a mold cavity of the type in which air is drawing through silica grain placed in the mold cavity. A pure silica grain layer is formed on top of a natural silica grain layer. At least a portion of the purse silica grain layer is fused while substantially no air is drawn through the silica grain. Any remaining pure silica grain and a least a portion of the natural silica grain layer is fused while drawing a substantially higher volume of air through the silica. At least a portion of the fused pure silica grain layer is then sublimated.
摘要翻译： 一种将二氧化硅坩埚制成在通过置于模腔中的二氧化硅颗粒吸入空气的类型的模腔中的方法。 在天然二氧化硅颗粒层的顶部形成纯二氧化硅颗粒层。 将二氧化硅颗粒层的至少一部分熔融，而基本上没有空气通过二氧化硅颗粒。 任何剩余的纯二氧化硅颗粒和至少一部分天然二氧化硅颗粒层在通过二氧化硅吸收大体积的空气的同时被熔化。 然后将熔融的纯二氧化硅颗粒层的至少一部分升华。
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公开(公告)号：US20070051297A1
公开(公告)日：2007-03-08
申请号：US11536517
申请日：2006-09-28
申请人： Katsuhiko Kemmochi , Yasuo Ohama
发明人： Katsuhiko Kemmochi , Yasuo Ohama
CPC分类号： C03B19/095 , C30B15/10 , Y10S65/08 , Y10T117/10 , Y10T117/1068
摘要： A silica glass crucible includes a thin barium-doped inner layer, a stable, bubble-free intermediate layer, and a stable opaque outer layer. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted to dense fused silica. The crucible demonstrates reduced bubble growth during a Czochralski process. As a result of the thin barium-doped layer and the reduced bubble growth, the inner surface of the crucible is uniformly minimally textured during a CZ process. The present crucible is especially suited for intense CZ processes for manufacturing silicon ingots used for solar cells or with silicon that is heavily doped with antimony, boron, or arsenic.
摘要翻译： 石英玻璃坩埚包括薄的钡掺杂内层，稳定的无气泡中间层和稳定的不透明外层。 本发明的融合方法控制熔融前沿处的动态气体平衡，其中形成的晶粒被熔化成致密的熔融二氧化硅。 坩埚在切克劳斯基（Czochralski）工艺中表现出减少的气泡生长。 由于薄的钡掺杂层和减少的气泡生长，坩埚的内表面在CZ工艺期间均匀地最小化。 本坩埚特别适用于制造用于太阳能电池的硅锭或重掺杂锑，硼或砷的硅的强CZ工艺。
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公开(公告)号：US09216923B2
公开(公告)日：2015-12-22
申请号：US13189897
申请日：2011-07-25
申请人： Katsuhiko Kemmochi , Larry Baer , Carl Hagstrom
发明人： Katsuhiko Kemmochi , Larry Baer , Carl Hagstrom
CPC分类号： C03B19/095 , Y02P40/57
摘要： A mold for making a fused silica crucible includes a cylindrical can having an interior bore. A graphite insert is received in the bore and has an upper surface adapted to form the lower surface of the crucible while the interior bore of the can forms the side wall of the crucible. Silica grain is deposited in the mold while it rotates. Bores formed in the can above the insert and in the insert draw air through the silica during fusion.
摘要翻译： 用于制造石英玻璃坩埚的模具包括具有内孔的圆筒形罐。 石墨插入件容纳在孔中并且具有适于形成坩埚的下表面的上表面，同时罐的内孔形成坩埚的侧壁。 二氧化硅颗粒在其旋转时沉积在模具中。 在插入件上方的罐中形成的孔和插入件中的孔在熔化期间通过二氧化硅吸入空气。
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公开(公告)号：US09003832B2
公开(公告)日：2015-04-14
申请号：US12623140
申请日：2009-11-20
IPC分类号： C03B19/09
CPC分类号： C03B19/095 , Y10T428/131
摘要： A silica crucible is made in a mold cavity of the type in which ambient atmosphere can be drawn through silica grain in the cavity. In one embodiment, a silica grain layer is formed in the mold cavity and gas, which may comprise helium, nitrogen, hydrogen, or a mixture thereof, is introduced into the mold cavity. The silica grain layer is heated while substantially no ambient atmosphere is drawn through the silica grain. Thereafter, at least a portion of the silica grain layer is fused while drawing ambient atmosphere through the silica grain. The gas displaces air in the mold cavity thereby reducing nitrogen oxides and ozone.
摘要翻译： 一种二氧化硅坩埚制成在这样的模腔中，其中环境气氛可以通过空腔中的二氧化硅颗粒被吸入。 在一个实施方案中，在模腔中形成二氧化硅颗粒层，并且将可能包含氦，氮，氢或其混合物的气体引入模腔中。 加热二氧化硅颗粒层，同时基本上没有环境气氛通过二氧化硅颗粒。 此后，将二氧化硅粒子层的至少一部分熔融，同时通过二氧化硅粒子吸收环境气氛。 气体置换模腔中的空气，从而减少氮氧化物和臭氧。
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公开(公告)号：US20130025319A1
公开(公告)日：2013-01-31
申请号：US13189897
申请日：2011-07-25
申请人： Katsuhiko Kemmochi , Larry Baer , Carl Hagstrom
发明人： Katsuhiko Kemmochi , Larry Baer , Carl Hagstrom
CPC分类号： C03B19/095 , Y02P40/57
摘要： A mold for making a fused silica crucible includes a cylindrical can having an interior bore. A graphite insert is received in the bore and has an upper surface adapted to form the lower surface of the crucible while the interior bore of the can forms the side wall of the crucible. Silica grain is deposited in the mold while it rotates. Bores formed in the can above the insert and in the insert draw air through the silica during fusion.
摘要翻译： 用于制造石英玻璃坩埚的模具包括具有内孔的圆筒形罐。 石墨插入件容纳在孔中，并且具有适于形成坩埚下表面的上表面，同时罐的内孔形成坩埚的侧壁。 二氧化硅颗粒在其旋转时沉积在模具中。 在插入件上方的罐中形成的孔和插入件中的孔在熔化期间通过二氧化硅吸入空气。
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公开(公告)号：US20110123738A1
公开(公告)日：2011-05-26
申请号：US12623140
申请日：2009-11-20
CPC分类号： C03B19/095 , Y10T428/131
摘要： A silica crucible is made in a mold cavity of the type in which ambient atmosphere can be drawn through silica grain in the cavity. In one embodiment, a silica grain layer is formed in the mold cavity and gas, which may comprise helium, nitrogen, hydrogen, or a mixture thereof, is introduced into the mold cavity. The silica grain layer is heated while substantially no ambient atmosphere is drawn through the silica grain. Thereafter, at least a portion of the silica grain layer is fused while drawing ambient atmosphere through the silica grain. The gas displaces air in the mold cavity thereby reducing nitrogen oxides and ozone.
摘要翻译： 一种二氧化硅坩埚制成在这样的模腔中，其中环境气氛可以通过空腔中的二氧化硅颗粒被吸入。 在一个实施例中，在模腔中形成二氧化硅颗粒层，并且可以将包含氦，氮，氢或其混合物的气体引入模腔中。 加热二氧化硅颗粒层，同时基本上没有环境气氛通过二氧化硅颗粒。 此后，将二氧化硅粒子层的至少一部分熔融，同时通过二氧化硅粒子吸收环境气氛。 气体置换模腔中的空气，从而减少氮氧化物和臭氧。
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8.发明申请公开(公告)号：US20100186662A1
公开(公告)日：2010-07-29
申请号：US12752998
申请日：2010-04-01
申请人： Katsuhiko Kemmochi , Yasuo Ohama
发明人： Katsuhiko Kemmochi , Yasuo Ohama
IPC分类号： C30B15/10
CPC分类号： C03B19/095 , C03B2201/32 , C30B15/10 , C30B29/06 , Y10T117/10 , Y10T117/1032 , Y10T117/1052 , Y10T117/1072
摘要： A fused glass crucible includes a collar of doped aluminum silica that defines uppermost and outermost surfaces of the crucible. The melt line that defines the surface of molten silicon in the crucible may be substantially at the lower end of the collar or slightly above it. Crystallization of the collar makes it hard and therefore supports the remaining uncrystallized portion of the crucible above the melt line. The melt line may also be below the lower end of the collar, especially if the melt is drawn down or poured early in the process. Because there is little or no overlap or because the overlap does not last long, the doped aluminum collar is not damaged by the heat of from the melt.
摘要翻译： 熔融玻璃坩埚包括限定坩埚的最上表面和最外表面的掺杂铝二氧化硅的环。 限定坩埚中的熔融硅表面的熔体线可以基本上在套环的下端或略高于其上。 轴环的结晶使其变硬，因此支撑坩埚在熔融线之上的剩余未结晶部分。 熔体管线也可以在套环的下端下方，特别是如果熔体在该过程中被提拉或者早期浇注。 因为很少或没有重叠，或者由于重叠不会持续很长时间，所以掺杂的铝合金套环不会被熔体的热量损坏。
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9.发明授权公开(公告)号：US07383696B2
公开(公告)日：2008-06-10
申请号：US11223158
申请日：2005-09-08
申请人： Katsuhiko Kemmochi , Robert Mosier , Yasuo Ohama
发明人： Katsuhiko Kemmochi , Robert Mosier , Yasuo Ohama
IPC分类号： C30B35/00
CPC分类号： C03B19/095 , C30B15/10 , Y02P40/57 , Y10S65/08 , Y10S117/90 , Y10T117/10
摘要： A silica glass crucible includes a stable, bubble-free inner layer and an opaque outer layer, both layers demonstrating reduced bubble growth during a Czochralski process. When used in the CZ process, little volume change is observed in the crucible wall, and the crucible has little influence on melt level. The present crucible is especially suited for slow silicon ingot pulling with reduced crystalline defects. The fusion process of the present invention controls the dynamic gas balance at the fusion front where formed grain is melted to dense fused silica.
摘要翻译： 石英玻璃坩埚包括稳定的无气泡的内层和不透明的外层，两层都表明在切克劳斯基工艺过程中气泡生长减少。 当在CZ工艺中使用时，在坩埚壁中观察到很小的体积变化，并且坩埚对熔体水平几乎没有影响。 本坩埚特别适用于具有减少的晶体缺陷的缓慢的硅锭拉动。 本发明的融合方法控制熔融前沿处的动态气体平衡，其中形成的晶粒被熔化成致密的熔融二氧化硅。
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公开(公告)号：US06641663B2
公开(公告)日：2003-11-04
申请号：US10021631
申请日：2001-12-12
申请人： Katsuhiko Kemmochi , Robert Mosier , Paul Spencer
发明人： Katsuhiko Kemmochi , Robert Mosier , Paul Spencer
IPC分类号： C30B3500
CPC分类号： C30B35/002 , C03B19/095 , C30B15/10 , Y10S65/08 , Y10S117/90 , Y10T117/10
摘要： A silica glass crucible is disclosed comprising a barium-doped inner wall layer. The crucible is made by introducing into a rotating crucible mold bulk silica grain to form a bulky wall. After heating the interior of the mold to fuse the bulk silica grains, an inner silica grain, doped with barium, is introduced. The heat at least partially melts the inner silica grain, allowing it to fuse to the wall to form an inner layer. The inner layer of the crucible crystallizes when used in a CZ process, extending the operating life of the crucible.
摘要翻译： 公开了一种二氧化硅玻璃坩埚，其包括掺杂钡的内壁层。 通过将坩埚引入旋转的坩埚模块体二氧化硅颗粒中以形成较大的壁，制成坩埚。 在加热模具内部以熔化体二氧化硅颗粒之后，引入掺杂有钡的内部二氧化硅颗粒。 热量至少部分地熔化内部二氧化硅颗粒，使其与壁融合以形成内层。 当在CZ工艺中使用时，坩埚的内层结晶，延长了坩埚的使用寿命。
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