公开(公告)号：US09105676B2

公开(公告)日：2015-08-11

申请号：US13624822

申请日：2012-09-21

Applicant: LAM RESEARCH CORPORATION

Inventor： Hong Shih ,  Tuochuan Huang ,  Yan Fang ,  Cliff LaCroix ,  Neal Newton ,  Rish Chhatre

IPC: B08B7/00 ,  H01L21/683 ,  B08B1/00 ,  B08B5/00 ,  B08B5/02

CPC classification number: H01L21/6833 ,  B08B1/00 ,  B08B5/00 ,  B08B5/02 ,  B08B7/00 ,  B08B7/0071

Abstract: A method of removing an epoxy band from an electrostatic chuck includes securing the electrostatic chuck in a servicing fixture, applying a thermal source to the epoxy band to breakdown a plurality of adhesive bonds securing the epoxy band to the electrostatic chuck, forming a hole in the epoxy band and pulling the epoxy band from the electrostatic chuck. A system for removing an epoxy band from an electrostatic chuck is also described.

Abstract translation: 从静电卡盘去除环氧树脂带的方法包括将静电卡盘固定在维修夹具中，将热源施加到环氧树脂带上，以将多个粘合剂固定到静电卡盘上，从而在环形带中形成孔 环氧树脂带，并从静电吸盘拉环氧树脂带。 还描述了用于从静电卡盘除去环氧树脂带的系统。

公开(公告)号：US20140083461A1

公开(公告)日：2014-03-27

申请号：US13624822

申请日：2012-09-21

Applicant: LAM RESEARCH CORPORATION

Inventor： Hong Shih ,  Tuochuan Huang ,  Yan Fang ,  Cliff LaCroix ,  Neal Newton ,  Rish Chhatre

IPC: B08B7/00

CPC classification number: H01L21/6833 ,  B08B1/00 ,  B08B5/00 ,  B08B5/02 ,  B08B7/00 ,  B08B7/0071

Abstract: A method of removing an epoxy band from an electrostatic chuck includes securing the electrostatic chuck in a servicing fixture, applying a thermal source to the epoxy band to breakdown a plurality of adhesive bonds securing the epoxy band to the electrostatic chuck, forming a hole in the epoxy band and pulling the epoxy band from the electrostatic chuck. A system for removing an epoxy band from an electrostatic chuck is also described.

Abstract translation: 从静电卡盘去除环氧树脂带的方法包括将静电卡盘固定在维修夹具中，将热源施加到环氧树脂带上，以将多个粘合剂固定到静电卡盘上，从而在环形带中形成孔 环氧树脂带，并从静电吸盘拉环氧树脂带。 还描述了用于从静电卡盘除去环氧树脂带的系统。

公开(公告)号：US20150235889A1

公开(公告)日：2015-08-20

申请号：US14704602

申请日：2015-05-05

Applicant: Lam Research Corporation

Inventor： Hong Shih ,  Tuochuan Huang ,  David Schaefer ,  Ambarish Chhatre ,  John Daugherty ,  MingHang Wu ,  Clifford La Croix

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  B05D5/12 ,  B05D7/52 ,  C23C8/02 ,  C23C22/66 ,  H01L21/6831 ,  Y10T279/23

Abstract: A method is provided for treating a bipolar ESC having a front surface and a back surface, the front surface including an anodized layer. The method includes eliminating the anodized layer, disposing a new anodized layer onto the front surface, and treating the new anodized layer with water to seal the new anodized layer.

Abstract translation: 提供了一种用于处理具有前表面和后表面的双极ESC的方法，前表面包括阳极氧化层。 该方法包括消除阳极氧化层，将新的阳极氧化层设置在前表面上，以及用水处理新的阳极氧化层以密封新的阳极氧化层。

公开(公告)号：US20140150819A1

公开(公告)日：2014-06-05

申请号：US14041385

申请日：2013-09-30

Applicant: Lam Research Corporation

Inventor： Hong Shih ,  Fan-Cheung Sze ,  Brian McMillin ,  John Daugherty ,  Yan Fang ,  Duane Outka ,  Tuochuan Huang ,  Sivakami Ramanathan

IPC: H01L21/67

CPC classification number: B08B7/04 ,  B08B7/0021 ,  B08B7/028 ,  B24C1/003 ,  H01L21/67051

Abstract: A method of wet cleaning an aluminum part having bare aluminum surfaces and anodized aluminum surfaces. The method includes CO2 dry ice blasting the surfaces of the aluminum part at approximately 35 to approximately 45 psi, masking the aluminum part to conceal the bare aluminum surfaces, soaking the dry ice blasted and masked aluminum part in deionized water at or above approximately 60° C., scrubbing the aluminum part with an abrasive pad and deionized water after completion of the soaking in deionized water, and repeating the soaking and scrubbing in the recited order at least three additional times.

Abstract translation: 一种湿式清洁铝部件的方法，该部件具有裸铝表面和阳极氧化铝表面。 该方法包括将铝部件的表面以约35至约45psi的二氧化碳干冰喷砂，掩蔽铝部分以隐藏裸铝表面，将干冰喷砂和掩蔽的铝部分浸入等于或高于约60°的去离子水 C.在完成在去离子水中浸泡之后用研磨垫和去离子水洗涤铝部分，并按照所述顺序重复浸泡和洗涤至少三次。

公开(公告)号：US09387521B2

公开(公告)日：2016-07-12

申请号：US14041385

申请日：2013-09-30

Applicant: Lam Research Corporation

Inventor： Hong Shih ,  Fan-Cheung Sze ,  Brian McMillin ,  John Daugherty ,  Yan Fang ,  Duane Outka ,  Tuochuan Huang ,  Sivakami Ramanathan

IPC: B08B7/04 ,  B08B7/02 ,  B24C1/00 ,  B08B7/00 ,  H01L21/67

CPC classification number: B08B7/04 ,  B08B7/0021 ,  B08B7/028 ,  B24C1/003 ,  H01L21/67051

Abstract: A method of wet cleaning an aluminum part having bare aluminum surfaces and anodized aluminum surfaces. The method includes CO2 dry ice blasting the surfaces of the aluminum part at approximately 35 to approximately 45 psi, masking the aluminum part to conceal the bare aluminum surfaces, soaking the dry ice blasted and masked aluminum part in deionized water at or above approximately 60° C., scrubbing the aluminum part with an abrasive pad and deionized water after completion of the soaking in deionized water, and repeating the soaking and scrubbing in the recited order at least three additional times.

Abstract translation: 一种湿式清洁铝部件的方法，该部件具有裸铝表面和阳极氧化铝表面。 该方法包括将铝部件的表面以约35至约45psi的二氧化碳干冰喷砂，掩蔽铝部分以隐藏裸铝表面，将干冰喷砂和掩蔽的铝部分浸入等于或高于约60°的去离子水 C.在完成在去离子水中浸泡之后用研磨垫和去离子水洗涤铝部分，并按照所述顺序重复浸泡和洗涤至少三次。