公开(公告)号：US09522468B2

公开(公告)日：2016-12-20

申请号：US14273298

申请日：2014-05-08

Applicant: LuxVue Technology Corporation

Inventor： Paul Argus Parks ,  Nile Alexander Light ,  Stephen P. Bathurst ,  John A. Higginson ,  Andreas Bibl

IPC: B65G47/90 ,  B25J7/00 ,  B25J18/00 ,  B25J9/00

CPC classification number: B25J7/00 ,  B25J9/0015 ,  B25J18/007 ,  H01L2224/7565 ,  H01L2224/75822 ,  Y10T74/20354

Abstract: Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.

Abstract translation: 公开了用于将微器件或微阵列阵列转移到衬底或从衬底传送微阵列的系统和方法。 在一个实施例中，远程中心机器人允许微拾取阵列和目标基板之间的即时对准。 远程中心机器人可以包括独立移动并共享远程旋转中心的多个对称联动。 在一个实施例中，远程旋转中心可以定位在微拾取阵列的表面处，以防止在传送期间损坏微器件阵列。

公开(公告)号：US20160094160A1

公开(公告)日：2016-03-31

申请号：US14502994

申请日：2014-09-30

Applicant: LuxVue Technology Corporation

Inventor： Dariusz Golda ,  Stephen P. Bathurst ,  John A. Higginson ,  Andreas Bibl ,  Jeffrey Birkmeyer

IPC: H02N13/00

CPC classification number: B81C99/002 ,  H01H59/0009 ,  H01L41/113

Abstract: A compliant electrostatic transfer head and method of forming a compliant electrostatic transfer head are described. In an embodiment, a compliant electrostatic transfer head includes a base substrate, a cavity template layer on the base substrate, a first confinement layer between the base substrate and the cavity template layer, and a patterned device layer on the cavity template layer. The patterned device layer includes an electrode that is deflectable toward a cavity in the cavity template layer. In an embodiment, a second confinement layer is between the cavity template layer and the patterned device layer.

Abstract translation: 描述了柔性静电转印头和形成顺应性静电转印头的方法。 在一个实施例中，顺应性静电转印头包括基底衬底，在基底衬底上的空腔模板层，在基底衬底和腔模板层之间的第一限制层，以及腔模板层上的图案化器件层。 图案化器件层包括能够朝向空腔模板层中的空腔偏转的电极。 在一个实施例中，第二限制层位于空腔模板层和图案化器件层之间。

公开(公告)号：US09425151B2

公开(公告)日：2016-08-23

申请号：US14307325

申请日：2014-06-17

Applicant: LuxVue Technology Corporation

Inventor： Dariusz Golda ,  Stephen P. Bathurst ,  John A. Higginson ,  Andreas Bibl ,  Jeffrey Birkmeyer

IPC: H01L21/768 ,  H01L23/538 ,  H01L23/00

CPC classification number: H01L23/5384 ,  B81C99/002 ,  H01L21/76898 ,  H01L24/75 ,  H01L24/95

Abstract: A compliant electrostatic transfer head and method of forming a compliant electrostatic transfer head are described. In an embodiment, a compliant electrostatic transfer head includes a cavity in a base substrate, a spring support layer on the base substrate, and a patterned device layer on the spring support layer. The spring support layer includes a spring support layer beam profile that extends over and is deflectable toward the cavity, and the patterned device layer includes an electrode beam profile that is supported by the spring support layer beam profile and extends over and is deflectable toward the cavity.

Abstract translation: 描述了柔性静电转印头和形成顺应性静电转印头的方法。 在一个实施例中，顺应性静电转印头包括基底衬底中的空腔，在基底衬底上的弹簧支撑层，以及弹簧支撑层上的图案化器件层。 弹簧支撑层包括弹簧支撑层梁轮廓，该弹性支撑层梁型材向空腔延伸并且可偏转，并且图案化的装置层包括由弹簧支撑层梁轮廓支撑并且朝向腔体可偏转的电极梁轮廓 。

公开(公告)号：US09705432B2

公开(公告)日：2017-07-11

申请号：US14503065

申请日：2014-09-30

Applicant: LuxVue Technology Corporation

Inventor： Stephen P. Bathurst ,  Paul Argus Parks ,  Nile Alexander Light

IPC: H02N13/00 ,  H01L21/683 ,  B81C99/00

CPC classification number: H02N13/00 ,  B81C99/002 ,  H01L21/6833

Abstract: Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes primary spring arms and secondary spring arms extending between a pivot platform and a base of the pivot mount. The secondary spring arms are characterized by a lower stiffness than the primary spring arms, and strain sensing elements are located along the secondary spring arms.

公开(公告)号：US09624100B2

公开(公告)日：2017-04-18

申请号：US14303483

申请日：2014-06-12

Applicant: LuxVue Technology Corporation

Inventor： Stephen P. Bathurst ,  Paul Argus Parks ,  Nile Alexander Light

IPC: H01L21/683 ,  B81C99/00 ,  B25J7/00 ,  B25J15/00 ,  H02N13/00

CPC classification number: B81C99/002 ,  B25J7/00 ,  B25J15/0085 ,  B25J19/02 ,  B81B2203/0163 ,  H01L21/6831 ,  H02N13/00 ,  Y10T74/20006

Abstract: Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes a plurality of spring arms, with each spring arm including a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm are immediately adjacent the switch-back and are parallel to each other. A first strain sensing element is located at the first length, and a second strain sensing element is located at the second length.

公开(公告)号：US20150364424A1

公开(公告)日：2015-12-17

申请号：US14307325

申请日：2014-06-17

Applicant: LuxVue Technology Corporation

Inventor： Dariusz Golda ,  Stephen P. Bathurst ,  John A. Higginson ,  Andreas Bibl ,  Jeffrey Birkmeyer

IPC: H01L23/538 ,  H01L21/768

CPC classification number: H01L23/5384 ,  B81C99/002 ,  H01L21/76898 ,  H01L24/75 ,  H01L24/95

Abstract: A compliant electrostatic transfer head and method of forming a compliant electrostatic transfer head are described. In an embodiment, a compliant electrostatic transfer head includes a cavity in a base substrate, a spring support layer on the base substrate, and a patterned device layer on the spring support layer. The spring support layer includes a spring support layer beam profile that extends over and is deflectable toward the cavity, and the patterned device layer includes an electrode beam profile that is supported by the spring support layer beam profile and extends over and is deflectable toward the cavity.

Abstract translation: 描述了柔性静电转印头和形成顺应性静电转印头的方法。 在一个实施例中，顺应性静电转印头包括基底衬底中的空腔，在基底衬底上的弹簧支撑层，以及弹簧支撑层上的图案化器件层。 弹簧支撑层包括弹簧支撑层梁轮廓，该弹性支撑层梁型材向空腔延伸并且可偏转，并且图案化的装置层包括由弹簧支撑层梁轮廓支撑并且朝向腔体可偏转的电极梁轮廓 。

公开(公告)号：US20150321338A1

公开(公告)日：2015-11-12

申请号：US14273298

申请日：2014-05-08

Applicant: LuxVue Technology Corporation

Inventor： Paul Argus Parks ,  Nile Alexander Light ,  Stephen P. Bathurst ,  John A. Higginson ,  Andreas Bibl

IPC: B25J7/00

CPC classification number: B25J7/00 ,  B25J9/0015 ,  B25J18/007 ,  H01L2224/7565 ,  H01L2224/75822 ,  Y10T74/20354

Abstract: Systems and methods for transferring a micro device or an array of micro devices to or from a substrate are disclosed. In an embodiment, a remote center robot allows on-the-fly alignment between a micro pick up array and a target substrate. The remote center robot may include a plurality of symmetric linkages that move independently and share a remote rotational center. In an embodiment, the remote rotational center may be positioned at a surface of the micro pick up array to prevent damage to the array of micro devices during transfer.

Abstract translation: 公开了用于将微器件或微阵列阵列转移到衬底或从衬底传送微阵列的系统和方法。 在一个实施例中，远程中心机器人允许微拾取阵列和目标基板之间的即时对准。 远程中心机器人可以包括独立移动并共享远程旋转中心的多个对称联动。 在一个实施例中，远程旋转中心可以定位在微拾取阵列的表面处，以防止在传送期间损坏微器件阵列。

公开(公告)号：US20160094161A1

公开(公告)日：2016-03-31

申请号：US14503065

申请日：2014-09-30

Applicant: LuxVue Technology Corporation

Inventor： Stephen P. Bathurst ,  Paul Argus Parks ,  Nile Alexander Light

IPC: H02N13/00

CPC classification number: H02N13/00 ,  B81C99/002 ,  H01L21/6833

Abstract: Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes primary spring arms and secondary spring arms extending between a pivot platform and a base of the pivot mount. The secondary spring arms are characterized by a lower stiffness than the primary spring arms, and strain sensing elements are located along the secondary spring arms.

Abstract translation: 公开了用于将转印头组件与衬底对准的系统和方法。 在一个实施例中，枢轴安装件用于在闭环运动控制系统中产生反馈信号。 在一个实施例中，枢轴支架包括在枢转平台和枢转支架的基部之间延伸的主弹簧臂和次弹簧臂。 次级弹簧臂的特征在于比主弹簧臂更低的刚度，并且应变感测元件沿着次级弹簧臂定位。

公开(公告)号：US20150360940A1

公开(公告)日：2015-12-17

申请号：US14303483

申请日：2014-06-12

Applicant: LuxVue Technology Corporation

Inventor： Stephen P. Bathurst ,  Paul Argus Parks ,  Nile Alexander Light

IPC: B81C99/00

CPC classification number: B81C99/002 ,  B25J7/00 ,  B25J15/0085 ,  B25J19/02 ,  B81B2203/0163 ,  H01L21/6831 ,  H02N13/00 ,  Y10T74/20006

Abstract: Systems and methods for aligning a transfer head assembly with a substrate are disclosed. In an embodiment a pivot mount is used for generating a feedback signal in a closed-loop motion control system. In an embodiment, the pivot mount includes a plurality of spring arms, with each spring arm including a switch-back along an axial length of the spring arm such that a pair of first and second lengths of the spring arm are immediately adjacent the switch-back and are parallel to each other. A first strain sensing element is located at the first length, and a second strain sensing element is located at the second length.

Abstract translation: 公开了用于将转印头组件与衬底对准的系统和方法。 在一个实施例中，枢轴安装件用于在闭环运动控制系统中产生反馈信号。 在一个实施例中，枢轴支架包括多个弹簧臂，每个弹簧臂包括沿着弹簧臂的轴向长度的开关，使得弹簧臂的一对第一和第二长度紧邻开关 - 背部并且彼此平行。 第一应变传感元件位于第一长度，并且第二应变感测元件位于第二长度。