Chromatic confocal sensor
    1.
    发明授权

    公开(公告)号:US10197382B2

    公开(公告)日:2019-02-05

    申请号:US15724328

    申请日:2017-10-04

    Abstract: A chromatic confocal sensor includes a light source portion that emits a plurality of light beams having different wavelengths; an objective lens that converges the plurality of light beams at different focal positions; an emission port from which measurement light reflected by an object to be measured at the focal positions out of the plurality of light beams is emitted; a position calculation portion that calculates a position of the object to be measured based on the emitted measurement light; an observation portion including an observation light source that emits observation light and an image sensor; and a beam splitter that emits at least a part of the measurement light that passes through the objective lens to the emission port and emits at least a part of the observation light that passes through the objective lens and is reflected by the object to be measured to the image sensor.

    Telecentric optical apparatus
    2.
    发明授权

    公开(公告)号:US11467384B2

    公开(公告)日:2022-10-11

    申请号:US16679731

    申请日:2019-11-11

    Abstract: A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.

    Telecentric optical apparatus
    3.
    发明授权

    公开(公告)号:US10520710B2

    公开(公告)日:2019-12-31

    申请号:US15139543

    申请日:2016-04-27

    Abstract: A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.

    Measurement system and method for switching set value for adjustment

    公开(公告)号:US10088420B2

    公开(公告)日:2018-10-02

    申请号:US15597856

    申请日:2017-05-17

    Abstract: A measurement system includes detachable parts, on which one filter module out of a plurality of filter modules including optical filters that each transmit different types of special light is detachably mounted, a specification part that specifies the optical filter of the one filter module mounted on the detachable parts, and a set value switching part that switches, according to the specified optical filter specified by the specification part, set values for adjustment used in a measurement using a specific optical filter.

    Light interference measuring device and program therefor

    公开(公告)号:US09726473B2

    公开(公告)日:2017-08-08

    申请号:US14570376

    申请日:2014-12-15

    CPC classification number: G01B9/02077 G01B9/0209 G01B11/2441

    Abstract: A light interference measuring device comprises: a light source 20 that outputs light; a beam splitter 222 that causes the light output from the light source to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light that has passed through the reference optical path and reflection light that has passed through a measuring object arranged in the measurement optical path are combined; a reference mirror 231 that is arranged in the reference optical path and that reflects light which is diverged into the reference optical path by the beam splitter 222; a stage 12 that is arranged in the measurement optical path and that has the work W placed thereon; an imaging part 25 that images an image in which the combined wave is formed; a reference mirror adjustment mechanism (234, 238, 239) that adjusts a posture of the reference mirror 231; and a control part that controls the reference mirror adjustment mechanism such that a reflecting surface of the reference mirror 231 corresponds to a measurement surface of the work W, based on an image imaged in a condition where a work W is placed on the stage.

    Optical measuring device
    6.
    发明授权

    公开(公告)号:US09170196B2

    公开(公告)日:2015-10-27

    申请号:US14167562

    申请日:2014-01-29

    CPC classification number: G01N21/64 G01N21/25 G02B21/248

    Abstract: In an optical measuring device, the visual observation section includes: a white light source which emits white light; a first objective lens arranged between the white light source and measurement object, through which the white light emitted from the white light source and return light from the measurement object transmit; a plurality of tube lenses which change a magnification of the return light passing through the first objective lens to a predetermined magnification; and a lens switching mechanism which can selectively switch the tube lenses so as to select one of the tube lenses to be arranged on the return light, and the special observation section includes: a special light source which emits special light; and a second objective lens arranged between the special light source and measurement object, through which the special light emitted from the special light source and return light from the measurement object transmit.

    TELECENTRIC OPTICAL APPARATUS
    8.
    发明申请

    公开(公告)号:US20200073093A1

    公开(公告)日:2020-03-05

    申请号:US16679731

    申请日:2019-11-11

    Abstract: A telecentric optical apparatus that is capable of suppressing an increase in the number of components as well as achieving high precision optical axis alignment, is provided. The telecentric optical apparatus of the present invention is characterized in that it is provided with: a first telecentric lens surface that is provided on an object side; a second telecentric lens surface that is provided on an image side and that shares a focus position with the first telecentric lens surface; and an optical path trimming part that is provided, between the first telecentric lens surface and the second telecentric lens surface, in an outside region, which is located on a side further out than a light passing region having a center thereof located at the focus position, and that changes an optical path such that a light beam incident on the outside region is prevented from contributing to image formation.

    INCLINATION ADJUSTING MECHANISM
    9.
    发明申请

    公开(公告)号:US20190146176A1

    公开(公告)日:2019-05-16

    申请号:US16159976

    申请日:2018-10-15

    Abstract: An inclination adjusting mechanism includes a first member that is attachable to a connection portion of a lens unit that is connectable to a lens barrel; a second member that faces the first member and that is attachable to a connection portion of the lens barrel that is connectable to the lens unit; contact members that are fixed to the first member, that protrude from the first member toward the second member, and that contact the second member; and adjusting/fixing members that are capable of adjusting an inclination of the first member relative to the second member and capable of fixing the first member to the second member. The second member has an inclined surface that the contact members contact, and each of the contact members has a curved surface that contacts the inclined surface.

    CHROMATIC CONFOCAL SENSOR
    10.
    发明申请

    公开(公告)号:US20180112966A1

    公开(公告)日:2018-04-26

    申请号:US15724328

    申请日:2017-10-04

    Abstract: A chromatic confocal sensor includes a light source portion that emits a plurality of light beams having different wavelengths; an objective lens that converges the plurality of light beams at different focal positions; an emission port from which measurement light reflected by an object to be measured at the focal positions out of the plurality of light beams is emitted; a position calculation portion that calculates a position of the object to be measured based on the emitted measurement light; an observation portion including an observation light source that emits observation light and an image sensor; and a beam splitter that emits at least a part of the measurement light that passes through the objective lens to the emission port and emits at least a part of the observation light that passes through the objective lens and is reflected by the object to be measured to the image sensor.

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