公开(公告)号：US20250069853A1

公开(公告)日：2025-02-27

申请号：US18948593

申请日：2024-11-15

Applicant: MKS Instruments, Inc.

Inventor： Aaron M. BURRY ,  Aaron T. RADOMSKI ,  Mariusz OLDZIEJ ,  Peter PAUL ,  Ross REINHARDT

IPC: H01J37/32

Abstract: A radio frequency (RF) generator includes a power source configured to generate an RF signal applied to the load and a power controller coupled to the power source. The power controller is configured to generate a control signal to vary the RF signal, wherein the control signal adjusts a frequency of the RF signal in accordance with an external RF signal applied to the load. The frequency adjustment is variable in accordance with a cost responsive to a perturbation of the frequency of the RF signal.

公开(公告)号：US20230041177A1

公开(公告)日：2023-02-09

申请号：US17396901

申请日：2021-08-09

Applicant: MKS Instruments, Inc.

Inventor： Jonathan W. SMYKA ,  Aaron T. RADOMSKI ,  Peter PAUL ,  Aaron M. BURRY

IPC: H01J37/32

Abstract: A RF generator includes a RF power source and a RF control module coupled to the RF power source. The RF control module is configured to generate at least one control signal to vary a respective at least one of an RF output signal from the RF power source or an impedance between the RF power source and a load. The RF output signal includes a RF signal modulated by a pulse signal, and the RF control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the RF output signal or the impedance between the RF power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.

公开(公告)号：US20240355585A1

公开(公告)日：2024-10-24

申请号：US18302141

申请日：2023-04-18

Applicant: MKS Instruments, Inc.

Inventor： Aaron BURRY ,  Peter PAUL ,  Aaron RADOMSKI

IPC: H01J37/32

CPC classification number: H01J37/32174 ,  H01J37/32128 ,  H01J2237/334

Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted over a predetermined number of bins. The parameter is adjusted in accordance with a cost function, and the cost function is determined by introducing a perturbation for each bin into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal. The perturbation is determined in accordance with a basis set having fewer dimensions than the number of bins.

公开(公告)号：US20230326721A1

公开(公告)日：2023-10-12

申请号：US18209243

申请日：2023-06-13

Applicant: MKS Instruments, Inc.

Inventor： Jonathan SMYKA ,  Aaron RADOMSKI ,  Peter PAUL ,  Aaron BURRY

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J37/32155 ,  H01J37/32146

Abstract: A power generator includes a power source and a control module coupled to the power source. The control module is configured to generate at least one control signal to vary a respective at least one of an output signal from the power source or an impedance between the power source and a load. The output signal includes a signal modulated by a pulse signal, and the control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the output signal or the impedance between the power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.

公开(公告)号：US20220165545A1

公开(公告)日：2022-05-26

申请号：US17102598

申请日：2020-11-24

Applicant: MKS Instruments, Inc.

Inventor： Aaron M. BURRY ,  Aaron T. RADOMSKI ,  Mariusz OLDZIEJ ,  Peter PAUL ,  Ross REINHARDT

IPC: H01J37/32

Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.

公开(公告)号：US20230326727A1

公开(公告)日：2023-10-12

申请号：US17715672

申请日：2022-04-07

Applicant: MKS Instruments, Inc.

Inventor： Linnell MARTINEZ ,  David MILLER ,  Eldridge MOUNT, IV ,  Peter PAUL ,  Aaron RADOMSKI

IPC: H01J37/32

CPC classification number: H01J37/32935 ,  H01J37/32183 ,  H01J37/32128 ,  H01J37/3299

Abstract: A controller for a plasma generation system includes a model evaluation module receives a sensed value that varies in accordance with a state of a plasma controlled by a RF power generator. The model evaluation module generates a plasma parameter that varies in accordance with the sensed value. A model integration module receives the plasma parameter, integrates the plasma parameter, and outputs an integrated model parameter. An IEDF evaluation module receives the integrated model parameter and generates an ion energy distribution function (IEDF) in accordance with the integrated model parameter. An IEDF controller module receives the IEDF and generates a signal for controlling a RF generator. A RF generator control module receives the signal and generates an RF generator control signal to control at least one of power, frequency, or phase of the RF power generator.

公开(公告)号：US20230049104A1

公开(公告)日：2023-02-16

申请号：US17979129

申请日：2022-11-02

Applicant: MKS Instruments, Inc.

Inventor： Aaron BURRY ,  Aaron RADOMSKI ,  Mariusz OLDZIEJ ,  Peter PAUL ,  Ross REINHARDT

IPC: H01J37/32

Abstract: A radio frequency (RF) power generation system includes a RF power source that generates a RF output signal delivered to a load. A RF power controller is configured to generate a control signal to vary the RF output signal. The controller adjusts a parameter associated with the RF output signal, and the parameter is controlled in accordance with a trigger signal. The parameter is adjusted in accordance with a cost function, and the cost function is determined by intruding a perturbation into an actuator that affects the cost function. The actuator may control an external RF output signal, and the trigger signal may vary in accordance with the external RF output signal.