公开(公告)号：US20160163514A1

公开(公告)日：2016-06-09

申请号：US14953917

申请日：2015-11-30

Applicant: MKS Instruments, Inc.

Inventor： Larry J. FISK, II ,  Aaron T. RADOMSKI ,  Jonathan SMYKA

IPC: H01J37/32

CPC classification number: H01J37/32155 ,  H01J37/32146 ,  H01J37/32174 ,  H01J37/32935 ,  H01J37/3299 ,  H01J2237/332 ,  H01J2237/334

Abstract: A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.

Abstract translation: 重复设定点发生器模块根据在连续时间间隔期间重复的预定模式选择性地改变输出参数的设定点。 在第一时间间隔期间，闭环模块基于在（i）在第一时间间隔内N次的设定点的N个值之间的N个差异产生N个闭环值，以及（ii）N 分别在第一个时间间隔内的N次输出参数的测量。 在第一时间间隔期间，调整模块基于在（i）在第二时间间隔期间的N次的设定点的N个值之间的N个差异产生N个调整值，以及（ii） 输出参数分别在第二个时间间隔内的N次。

公开(公告)号：US20240258071A1

公开(公告)日：2024-08-01

申请号：US18390694

申请日：2023-12-20

Applicant: MKS Instruments, Inc.

Inventor： Ky LUU ,  Jonathan SMYKA ,  Aaron RADOMSKI

IPC: H01J37/32

CPC classification number: H01J37/32146 ,  H01J37/32183 ,  H01J2237/3343

Abstract: A RF power generator having a fixed power generation section. The fixed power generation section includes a first plurality of power amplifiers each configured to receive a supply voltage and to output a respective first voltage. The RF power generator also includes a weighted power generation section including a plurality of weighted power amplifier modules. Each weighted power amplifier module includes a weighted power amplifier and an associated transformer. Each weighted power amplifier of the weighted power amplifier module receives a respective weighted supply voltage. The voltage across the transformer of each weighted power amplifier module is a fraction of the first voltage.

公开(公告)号：US20230326721A1

公开(公告)日：2023-10-12

申请号：US18209243

申请日：2023-06-13

Applicant: MKS Instruments, Inc.

Inventor： Jonathan SMYKA ,  Aaron RADOMSKI ,  Peter PAUL ,  Aaron BURRY

IPC: H01J37/32

CPC classification number: H01J37/32183 ,  H01J37/32155 ,  H01J37/32146

Abstract: A power generator includes a power source and a control module coupled to the power source. The control module is configured to generate at least one control signal to vary a respective at least one of an output signal from the power source or an impedance between the power source and a load. The output signal includes a signal modulated by a pulse signal, and the control module is further configured to adjust the at least one control signal to vary at least one of an amplitude or a frequency of the output signal or the impedance between the power source and the load to control a shape of the pulse signal. The at least one of the amplitude, the frequency, or the impedance is adjusted in accordance with respective feedforward adjustments that vary in accordance with a respective sensed pulse parameter detected between a matching network and the load.

公开(公告)号：US20140218076A1

公开(公告)日：2014-08-07

申请号：US13761955

申请日：2013-02-07

Applicant: MKS INSTRUMENTS, INC.

Inventor： David J. COUMOU ,  Larry J. FISK, II ,  Aaron T. RADOMSKI ,  Jaehyun KIM ,  Sang-Won LEE ,  Jonathan SMYKA

IPC: H01J37/32 ,  H03L7/00

CPC classification number: H01J37/32174 ,  H01J37/3299

Abstract: A radio frequency (RF) system is disclosed. The RF system includes an RF sensor, an analog to digital converter (ADC) module, a processing module, and a synchronization module. The RF sensor measures a parameter of an RF output and generates an RF signal based on the parameter. The ADC module converts samples of the RF signal into digital values. The processing module generates processed values based on the digital values. The synchronization module outputs one of the processed values in response to a transition in the RF output.

Abstract translation: 公开了射频（RF）系统。 RF系统包括RF传感器，模数转换器（ADC）模块，处理模块和同步模块。 RF传感器测量RF输出的参数，并根据参数产生RF信号。 ADC模块将RF信号的采样转换为数字值。 处理模块基于数字值产生处理的值。 响应于RF输出中的转换，同步模块输出其中一个处理值。