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    Robot for handling semiconductor wafers
    1.
    发明授权
    Robot for handling semiconductor wafers 有权
    用于处理半导体晶片的机器人

    公开(公告)号：US06582175B2

    公开(公告)日：2003-06-24

    申请号：US10135261

    申请日：2002-04-29

    申请人： Damon Cox ,  Martin R. Elliott ,  Chris Pencis ,  Jeffrey C. Hudgens ,  Michael Robert Rice

    发明人： Damon Cox ,  Martin R. Elliott ,  Chris Pencis ,  Jeffrey C. Hudgens ,  Michael Robert Rice

    IPC分类号： B65G100

    CPC分类号： H01L21/68707 ,  H01L21/67742

    摘要： A multi-set robot is provided that includes a first robot set having a first motor coupled to a first rotatable member that is rotatable about an axis; a second motor coupled to a second rotatable member that is rotatable about the axis; a first plurality of blades vertically spaced from one another; and a first linkage adapted to enable coordinated movement of the blades on rotation of the first and second rotatable members. The robot also includes a second robot set positioned above the first robot set having a third motor coupled to a third rotatable member that is rotatable about the axis; a fourth motor coupled to a fourth rotatable member that is rotatable about the axis; a second plurality of blades vertically spaced from one another; and a second linkage adapted to enable coordinated movement of the blades on rotation of the third and fourth rotatable members. Other aspects are provided.

    摘要翻译： 提供了一种多组机器人，其包括第一机器人组，其具有联接到可围绕轴线旋转的第一可旋转构件的第一电动机; 耦合到可围绕所述轴线旋转的第二可旋转构件的第二马达; 彼此垂直间隔开的第一组多个叶片; 以及第一连杆，其适于使所述叶片在所述第一和第二可旋转构件的旋转时能够协调地运动。 所述机器人还包括位于所述第一机器人组件上方的第二机器人组件，所述第二机器人组具有联接到可围绕所述轴线旋转的第三可旋转构件的第三 耦合到可围绕所述轴线旋转的第四可旋转构件的第四电动机; 第二多个叶片，彼此垂直间隔开; 以及第二联动装置，其适于在第三和第四可旋转构件旋转时实现叶片的协调运动。 提供其他方面。

    Robot for handling semiconductor wafers
    2.
    发明授权
    Robot for handling semiconductor wafers 有权
    用于处理半导体晶片的机器人

    公开(公告)号：US06379095B1

    公开(公告)日：2002-04-30

    申请号：US09549777

    申请日：2000-04-14

    申请人： Martin R. Elliott ,  Jeffrey C. Hudgens ,  Chris Pencis ,  Damon Cox

    发明人： Martin R. Elliott ,  Jeffrey C. Hudgens ,  Chris Pencis ,  Damon Cox

    IPC分类号： B65H160

    CPC分类号： H01L21/68707 ,  H01L21/67742

    摘要： An apparatus for processing semiconductor wafers has an automatic robot for independently and simultaneously handling two wafers (W) at the same time on two separate transfer planes. The robot comprises a first arm assembly having a left and a right arm each mounted at one end for independent rotation in a first horizontal plane about a center vertical axis, the other ends of the arms being movably joined together and holding a blade on which a wafer can be carried, the arms being horizontally bendable near their centers so they can be folded to retract the blade toward the center axis and rotated to a desired angular position, the arms being extendable along a radius from the center axis by moving the arms together near their centers to bring the arms nearly parallel to each other and to extend the blade from the center axis by a maximum amount; and a second arm assembly substantially identical to the first assembly and rotatable in a second horizontal plane closely spaced above the first plane, the operation of the second assembly being substantially identical to that of the first assembly but independent thereof.

    摘要翻译： 用于处理半导体晶片的设备具有自动机器人，用于在两个分开的转移平面上同时处理两个晶片（W）。 机器人包括第一臂组件，其具有左臂和右臂，每个臂在一端安装在围绕中心垂直轴线的第一水平平面中独立旋转，臂的另一端可移动地接合在一起， 可以承载晶片，臂可以在其中心附近水平弯曲，使得它们可以被折叠以使叶片朝向中心轴线缩回并且旋转到期望的角位置，臂可以通过将臂移动在一起而从中心轴线的半径延伸 靠近它们的中心以使臂几乎彼此平行，并且使叶片从中心轴线延伸最大量; 以及第二臂组件，其基本上与第一组件相同，并且可在紧邻第一平面的第二水平面中旋转，第二组件的操作基本上与第一组件的操作相同，但与之独立。

    Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event
    4.
    发明授权
    Wafer loading station that automatically retracts from a moving conveyor in response to an unscheduled event 有权
    晶圆加载站，响应于非计划事件，自动从运动的输送机回缩

    公开(公告)号：US07684895B2

    公开(公告)日：2010-03-23

    申请号：US10987452

    申请日：2004-11-12

    申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    IPC分类号： G06F19/00

    CPC分类号： H01L21/67769 ,  H01L21/67775 ,  H01L21/67778 ,  Y10S414/135 ,  Y10S414/136

    摘要： In a first aspect, a wafer loading station adapted to exchange wafer carriers with a wafer carrier transport system comprises a biasing element adapted to urge the end effector of the wafer loading station away from a moveable conveyor of the wafer carrier transport system upon the occurrence of a unscheduled event such as a power failure or an emergency shutdown. In a second aspect, an uninterruptible power supply commands a controller to cause the wafer carrier handler to retract the end effector from the wafer carrier transport system upon the occurrence of the unscheduled event, and provides the power necessary for the same. Numerous other aspects are provided.

    摘要翻译： 在第一方面，一种适于与晶片载体传输系统交换晶片载体的晶片装载站包括偏置元件，该偏置元件适于在晶片载体传输系统发生时将晶片载体站的末端执行器远离晶片载体传输系统的可移动传送器 一个非计划的事件，如停电或紧急停机。 在第二方面，不间断电源命令控制器使晶片载体处理器在发生非预定事件时从晶片载体传输系统缩回端部执行器，并提供其所需的功率。 提供了许多其他方面。

    Dynamically balanced substrate carrier handler
    10.
    发明授权
    Dynamically balanced substrate carrier handler 失效
    动态平衡衬底载体处理器

    公开(公告)号：US07168553B2

    公开(公告)日：2007-01-30

    申请号：US10988190

    申请日：2004-11-12

    申请人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    发明人： Michael R. Rice ,  Eric A. Englhardt ,  Robert B. Lowrance ,  Martin R. Elliott ,  Jeffrey C. Hudgens

    IPC分类号： B65G29/00

    CPC分类号： H01L21/67733 ,  H01J37/32743 ,  H01L21/67736 ,  H01L21/67766 ,  H01L21/67775

    摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. A balancing mass is coupled directly or indirectly to a frame on which the substrate carrier handler is mounted and is adapted to accelerate in a direction opposite to the direction of end effector acceleration, as the end effector accelerates. Thus, inertial loads may be substantially balanced, and frame vibration reduced, despite potentially high rates of acceleration. Numerous other aspects are provided.

    摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 平衡块直接或间接地耦合到其上安装有基底载体处理器的框架上，并且适于在端部执行器加速时沿与端部执行器加速度的方向相反的方向加速。 因此，惯性负载可以基本平衡，并且框架振动减小，尽管潜在的高加速率。 提供了许多其他方面。