摘要:
A resonator element includes: drive beams including a first beam and a second beam that vibrate in torsional vibration modes and are elongated side by side in a first direction; support parts that couple one ends and the other ends of the first beam and the second beam; and detection arms elongated from the respective first beam and second beam in a second direction orthogonal to the first direction in a plan view, wherein, in a drive mode, the first beam and the second beam torsionally vibrate in opposite directions to each other, the respective detection arms vibrate in a normal direction of a plane containing the first direction and the second direction, and the detection arm elongated from the first beam and the detection arm elongated from the second beam vibrate in the same direction as each other.
摘要:
A signal processing circuit includes an I/V conversion circuit (current/voltage conversion section) that converts an oscillation current of a vibrator into a voltage, an RC filter (phase shift section) that shifts a phase of the output signal of the I/V conversion circuit, a full-wave rectifier (part of a drive amplitude control section) that binarizes a signal that has been shifted in phase to generate a switch control signal, a comparator (reference signal generation section) that generates a reference signal for synchronous detection based on the output signal of the I/V conversion circuit, and an EXOR circuit (clock signal generation section) that generates a clock signal for a switched capacitor filter (SCF) that has a frequency twice a frequency of a drive signal based on a phase difference between the reference signal and the switch control signal.
摘要:
An acceleration sensor includes: a support member; a fixed electrode provided on the support member; a movable unit; a movable electrode provided on the movable unit and disposed opposed to the fixed electrode to generate capacity; and a projection extending from the opposed surface of at least either the fixed electrode or the movable electrode in one direction within the surface.
摘要:
A driver circuit includes a comparator (drive signal generation section) that generates a drive signal based on a signal obtained by converting an oscillation current of a vibrator that has been input via a first signal line into a voltage using an I/V conversion circuit (current/voltage conversion section), and supplies the drive signal to the vibrator via a second signal line, an oscillation detection circuit (oscillation detection section) that detects whether or not the oscillation current has reached a predetermined value after the vibrator has started to oscillate, a startup oscillation circuit (startup oscillation section) that assists an oscillation operation of the vibrator until the oscillation current reaches the predetermined value, and a switch that separates a capacitor from the second signal line until the oscillation current reaches the predetermined value, and connects the capacitor to the second signal line when the oscillation current has reached the predetermined value.
摘要:
A detection circuit includes a synchronous detection circuit (synchronous detection section) that synchronously detects a signal that includes a detection signal of a vibrator (an output signal of an amplifier), a switched capacitor filter (SCF) circuit that filters a signal that has been synchronously detected by the synchronous detection circuit (an output signal of a programmable gain amplifier), and an output buffer that buffers and outputs a signal that has been filtered by the SCF circuit, the gain of the SCF circuit being larger than 1.
摘要:
A vibrating element includes: a first support portion and a second support portion; a first vibrating arm which extends along a first axis, one end of the first vibrating arm being connected to the first support portion; a second vibrating arm which extends along the first axis, one end of the second vibrating arm being connected to the second support portion; an oscillating member which is sandwiched between the other ends of the first vibrating arm and the second vibrating arm, and has openings; and detection arms which extend along a second axis perpendicular to the first axis from the inner walls of the openings of the oscillating member in plan view.
摘要:
A composite sensor includes: a package including a container and a lid; a plurality of spaces that is partitioned by at least the container and the lid, and has different pressures, the plurality of the spaces including a first space sealed at around an atmospheric pressure and a second space sealed at a depressurized state; an acceleration sensor element disposed in the first space; and a vibration type angular velocity sensor element disposed in the second space. In the sensor, the first space has a volume smaller than a volume of the second space.