公开(公告)号：US20180127272A1

公开(公告)日：2018-05-10

申请号：US15806938

申请日：2017-11-08

Applicant: Matheson Tri-Gas, Inc.

Inventor： Hideharu Shimizu ,  Mark Raynor ,  Daniel Tempel ,  Robin Gardiner ,  Daniel Alvarez, JR.

IPC: C01B21/16 ,  B01J20/04 ,  B01J20/26 ,  B01J20/10 ,  B01J20/08 ,  B01J20/28 ,  B01J20/282 ,  B01J20/283 ,  B01J20/284 ,  B01J20/285 ,  B01D53/26 ,  B01D53/28

CPC classification number: C01B21/16 ,  B01D53/261 ,  B01D53/263 ,  B01D53/28 ,  B01D2251/30 ,  B01D2251/302 ,  B01D2251/304 ,  B01D2251/306 ,  B01D2251/402 ,  B01D2251/404 ,  B01D2251/406 ,  B01D2251/408 ,  B01D2252/30 ,  B01D2253/104 ,  B01D2253/106 ,  B01D2253/1085 ,  B01D2253/112 ,  B01D2253/1122 ,  B01D2253/1124 ,  B01D2253/306 ,  B01D2253/311 ,  B01D2256/00 ,  B01J20/04 ,  B01J20/041 ,  B01J20/08 ,  B01J20/103 ,  B01J20/26 ,  B01J20/28061 ,  B01J20/28064 ,  B01J20/28071 ,  B01J20/28073 ,  B01J20/28076 ,  B01J20/282 ,  B01J20/283 ,  B01J20/284 ,  B01J20/285 ,  B01J2220/52 ,  C01P2006/82

Abstract: The present invention generally relates to the field of gas and liquid phase desiccation. In particular, the present invention relates to methods for removing moisture (and hence oxygen precursors) from hydrazine, thereby providing a high purity source gas suitable for use in vapor deposition processes, such as but not limited to, chemical vapor deposition (CVD) or an atomic layer deposition (ALD).

公开(公告)号：US20220299170A1

公开(公告)日：2022-09-22

申请号：US17654952

申请日：2022-03-15

Applicant: Matheson Tri-Gas, Inc.

Inventor： Mark Raynor ,  Rikard Wind

IPC: F17C13/04 ,  F16K24/04 ,  F17C11/00 ,  B01J20/28 ,  B01J20/08 ,  B01J20/02 ,  B01J20/04 ,  B01J20/22 ,  B01J20/10 ,  B01J20/20 ,  B01J20/18

Abstract: The present invention relates to cylinder packages utilized in the delivery of highly toxic and/or flammable compounds to semiconductor manufacturers. More specifically, the present invention provides a cartridge adapted to removably attach to the gas outlet of a gas discharge passageway in a cylinder valve provided on a toxic gas containing cylinder package, the cartridge comprising a cylindrically shaped housing having at least one end fitted with a barrier member permeable to the toxic gas contained within the cylinder package and the housing containing a toxic-gas getter material.

公开(公告)号：US11027974B2

公开(公告)日：2021-06-08

申请号：US15806938

申请日：2017-11-08

Applicant: Matheson Tri-Gas, Inc.

Inventor： Hideharu Shimizu ,  Mark Raynor ,  Daniel Tempel ,  Robin Gardiner ,  Daniel Alvarez, Jr.

IPC: B01D53/26 ,  C01B21/16 ,  B01D53/28 ,  B01J20/04 ,  B01J20/08 ,  B01J20/10 ,  B01J20/26 ,  B01J20/28 ,  B01J20/282 ,  B01J20/283 ,  B01J20/284 ,  B01J20/285

Abstract: The present invention generally relates to the field of gas and liquid phase desiccation. In particular, the present invention relates to methods for removing moisture (and hence oxygen precursors) from hydrazine, thereby providing a high purity source gas suitable for use in vapor deposition processes, such as but not limited to, chemical vapor deposition (CVD) or an atomic layer deposition (ALD).