公开(公告)号：US20240030892A1

公开(公告)日：2024-01-25

申请号：US18478406

申请日：2023-09-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Bryant GARCIA ,  Robert B. HAMMOND ,  Patrick TURNER ,  Viktor PLESSKI ,  Ventsislav YANTCHEV ,  Neal FENZI

IPC: H03H9/17 ,  H03H9/54 ,  H03H9/02

CPC classification number: H03H9/171 ,  H03H9/54 ,  H03H9/02 ,  H03H9/13

Abstract: Acoustic resonators and filter devices. An acoustic resonator includes a piezoelectric plate having front and back surfaces, a portion of the piezoelectric plate forming a diaphragm, and a conductor pattern on the front surface, the conductor pattern including an interdigital transducer (IDT), fingers of the IDT on the diaphragm. A thickness of the interleaved fingers is greater than or equal to 0.85 times a thickness of the piezoelectric plate and less than or equal to 2.5 times the thickness of the piezoelectric plate. The IDT comprises a first portion having a first pitch and a first mark and a second portion having a second pitch and a second mark not equal to the first pitch and first mark.

公开(公告)号：US20240154597A1

公开(公告)日：2024-05-09

申请号：US18412131

申请日：2024-01-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Greg DYER ,  Bryant GARCIA ,  Doug JACHOWSKI ,  Robert HAMMOND ,  Neal FENZI ,  Ryo WAKABAYASHI

IPC: H03H9/02 ,  H03H9/17 ,  H03H9/205 ,  H03H9/54

CPC classification number: H03H9/02228 ,  H03H9/02015 ,  H03H9/02133 ,  H03H9/174 ,  H03H9/205 ,  H03H9/54

Abstract: An acoustic resonator is provided that includes a substrate; a piezoelectric layer having a portion that forms a diaphragm over a cavity; and IDT on the piezoelectric layer that includes a first conductor level including first and second busbars disposed on respective portions of the piezoelectric layer, a first set of elongated fingers extending from the first bus bar onto the diaphragm, and a second set of elongated fingers extending from the second bus bar onto the diaphragm, the second set of elongated fingers interleaved with the first set of elongated fingers. The acoustic resonator also includes a second conductor level over the piezoelectric layer and covering at least portions of the first and second busbars.

公开(公告)号：US20240113681A1

公开(公告)日：2024-04-04

申请号：US18538939

申请日：2023-12-13

Applicant: MURATA MANUFACTURING CO., LTD

Inventor： Andrew GUYETTE ,  Neal FENZI ,  Patrick TURNER

IPC: H03H9/13 ,  H03H3/02 ,  H03H9/02 ,  H03H9/17 ,  H03H9/56

CPC classification number: H03H9/132 ,  H03H3/02 ,  H03H9/02031 ,  H03H9/02228 ,  H03H9/174 ,  H03H9/176 ,  H03H9/562 ,  H03H9/564 ,  H03H9/568 ,  H03H2003/023

Abstract: Filter devices and methods are disclosed. A single-crystal piezoelectric plate is attached to substrate, portions of the piezoelectric plate forming a plurality of diaphragms spanning respective cavities in the substrate. A conductor pattern formed on the piezoelectric plate defines a low band filter including low band shunt resonators and low band series resonators and a high band filter including high band shunt resonators and high band series resonators. Interleaved fingers of interdigital transducers (IDTs) of the low band shunt resonators are disposed on respective diaphragms having a first thickness, interleaved fingers of IDTs of the high band series resonators are disposed on respective diaphragms having a second thickness less than the first thickness, and interleaved fingers of IDTs of the low band series resonators and the high band shunt resonators are disposed on respective diaphragms having thicknesses intermediate the first thickness and the second thickness.

公开(公告)号：US20250150053A1

公开(公告)日：2025-05-08

申请号：US19014478

申请日：2025-01-09

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Gregory L. HEY-SHIPTON ,  Neal FENZI ,  Mike EDDY ,  Ventsislav YANTCHEV

IPC: H03H9/02 ,  H03H3/02 ,  H03H9/13 ,  H03H9/17 ,  H03H9/56

Abstract: Resonator devices and filter devices are disclosed. A radio frequency filter includes substrate; a piezoelectric layer; a conductor pattern comprising a plurality of interdigital transducers (IDTs) on the piezoelectric layer; and an acoustic Bragg reflector between the substrate and the piezoelectric layer. The plurality of IDTs comprises a first IDT of first acoustic resonator and a second IDT of a second acoustic resonator. Moreover, a first thickness of the piezoelectric layer under the first IDT is greater than a second thickness of piezoelectric layer under the second IDT.

公开(公告)号：US20240162886A1

公开(公告)日：2024-05-16

申请号：US18410699

申请日：2024-01-11

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Viktor PLESSKI ,  Patrick TURNER ,  Robert HAMMOND ,  Bryant GARCIA ,  Ventsislav YANTCHEV ,  Neal FENZI ,  Julius KOSKELA

IPC: H03H9/54 ,  H03H3/04 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/547 ,  H03H3/04 ,  H03H9/02228 ,  H03H9/02559 ,  H03H9/132

Abstract: An acoustic resonator device, filter devices, and methods of making the same. An acoustic resonator device includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, where the back surface is attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. The device further includes an interdigital transducer formed on the front surface of the piezoelectric plate, where interleaved fingers of the IDT disposed on the diaphragm are configured such that a radio frequency signal applied to the IDT excites a primary shear acoustic mode in the diaphragm. The interleaved fingers include a first layer adjacent the diaphragm and a second layer over the first layer, the second layer having a narrower width than the first layer.

公开(公告)号：US20240030895A1

公开(公告)日：2024-01-25

申请号：US18478193

申请日：2023-09-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Pintu ADHIKARI ,  Neal FENZI ,  Andrew GUYETTE

IPC: H03H9/56 ,  H03H3/02 ,  H03H9/17 ,  H03H9/54 ,  H03H9/02

CPC classification number: H03H9/564 ,  H03H3/02 ,  H03H9/174 ,  H03H9/542 ,  H03H9/02228 ,  H03H2003/023

Abstract: Radio frequency filters. A radio frequency filter includes a substrate attached to a piezoelectric plate, portions of the piezoelectric plate forming a plurality of diaphragms spanning respective cavities in the substrate. A conductor pattern formed on the piezoelectric plate includes a plurality of interdigital transducers (IDTs) of a respective plurality of resonators, interleaved fingers of each IDT disposed on a respective diaphragm of the plurality of diaphragms. The conductor pattern connects the plurality of resonators in a matrix filter circuit including a first sub-filter and a second sub-filter, each sub-filter comprising two or more resonators from the plurality of resonators.