Spin-valve element having fixed layer containing nano-oxide layer
    2.
    发明授权
    Spin-valve element having fixed layer containing nano-oxide layer 失效
    旋转阀元件具有含有纳米氧化物层的固定层

    公开(公告)号:US07433161B2

    公开(公告)日:2008-10-07

    申请号:US11034386

    申请日:2005-01-12

    IPC分类号: G11B5/39

    摘要: A nonmagnetic material-noncontact layer forming a fixed magnetic layer is formed using CoFe, a nonmagnetic material-contact layer is formed using Co, and an NOL (Nano-Oxide Layer) is provided between the nonmagnetic material-noncontact layer and the nonmagnetic material-contact layer. In addition, the average film thickness of the nonmagnetic material-contact layer is set in the range of 16 to 19 Å. Accordingly, compared to a three-layered structure composed of CoFe, an NOL, and CoFe or a three-layered structure composed of Co, an NOL, and Co, which has been conventionally used, the rate (ΔR/R) of change in resistance and the unidirectional exchange bias magnetic field (Hex*) can both be improved.

    摘要翻译: 使用CoFe形成形成固定磁性层的非磁性材料非接触层,使用Co形成非磁性材料接触层,在非磁性材料 - 非接触层和非磁性材料 - 非接触层之间设置NOL(纳米氧化物层) 接触层。 此外,非磁性材料接触层的平均膜厚设定在16〜19的范围内。 因此,与通常使用的CoFe,NOL,CoFe或由Co,NOL,Co构成的三层结构体构成的三层结构相比,变化率(ΔR/ R) 电阻和单向交流偏置磁场(Hex *)都可以提高。

    SPIN-VALVE ELEMENT HAVING FIXED LAYER CONTAINING NANO-OXIDE LAYER
    3.
    发明申请
    SPIN-VALVE ELEMENT HAVING FIXED LAYER CONTAINING NANO-OXIDE LAYER 审中-公开
    具有包含纳米氧化层的固定层的旋转阀元件

    公开(公告)号:US20080145523A1

    公开(公告)日:2008-06-19

    申请号:US12033272

    申请日:2008-02-19

    IPC分类号: B05D5/12

    摘要: A nonmagnetic material-noncontact layer forming a fixed magnetic layer is formed using CoFe, a nonmagnetic material-contact layer is formed using Co, and an NOL (Nano-Oxide Layer) is provided between the nonmagnetic material-noncontact layer and the nonmagnetic material-contact layer. In addition, the average film thickness of the nonmagnetic material-contact layer is set in the range of 16 to 19 Å. Accordingly, compared to a three-layered structure composed of CoFe, an NOL, and CoFe or a three-layered structure composed of Co, an NOL, and Co, which has been conventionally used, the rate (ΔR/R) of change in resistance and the unidirectional exchange bias magnetic field (Hex*) can both be improved.

    摘要翻译: 使用CoFe形成形成固定磁性层的非磁性材料非接触层,使用Co形成非磁性材料接触层,在非磁性材料 - 非接触层和非磁性材料 - 非接触层之间设置NOL(纳米氧化物层) 接触层。 此外,非磁性材料接触层的平均膜厚设定在16〜19的范围内。 因此,与通常使用的CoFe,NOL,CoFe或由Co,NOL,Co构成的三层结构体构成的三层结构相比,变化率(ΔR/ R) 电阻和单向交流偏置磁场(Hex *)都可以提高。

    Spin-valve element having fixed layer containing nano-oxide layer
    5.
    发明申请
    Spin-valve element having fixed layer containing nano-oxide layer 失效
    旋转阀元件具有含有纳米氧化物层的固定层

    公开(公告)号:US20050157435A1

    公开(公告)日:2005-07-21

    申请号:US11034386

    申请日:2005-01-12

    摘要: A nonmagnetic material-noncontact layer forming a fixed magnetic layer is formed using CoFe, a nonmagnetic material-contact layer is formed using Co, and an NOL (Nano-Oxide Layer) is provided between the nonmagnetic material-noncontact layer and the nonmagnetic material-contact layer. In addition, the average film thickness of the nonmagnetic material-contact layer is set in the range of 16 to 19 Å. Accordingly, compared to a three-layered structure composed of CoFe, an NOL, and CoFe or a three-layered structure composed of Co, an NOL, and Co, which has been conventionally used, the rate (ΔR/R) of change in resistance and the unidirectional exchange bias magnetic field (Hex*) can both be improved.

    摘要翻译: 使用CoFe形成形成固定磁性层的非磁性材料非接触层,使用Co形成非磁性材料接触层,在非磁性材料 - 非接触层和非磁性材料 - 非接触层之间设置NOL(纳米氧化物层) 接触层。 此外,非磁性材料接触层的平均膜厚设定在16〜19的范围内。 因此,与通常使用的CoFe,NOL,CoFe或由Co,NOL,Co构成的三层结构体构成的三层结构相比,变化率(ΔR/ R) 电阻和单向交流偏置磁场(Hex *)都可以提高。

    Force sensor and method of manufacturing the same
    7.
    发明授权
    Force sensor and method of manufacturing the same 有权
    力传感器及其制造方法

    公开(公告)号:US08516906B2

    公开(公告)日:2013-08-27

    申请号:US13475579

    申请日:2012-05-18

    IPC分类号: G01L1/04 G01L1/10 H01L21/00

    CPC分类号: G01L1/18 G01L5/162

    摘要: A sensor substrate includes a plurality of piezoresistance elements. The electrical resistance of each piezoresistance element changes in accordance with an amount of displacement of a displacement portion displaced by an external load applied through a pressure receiving unit. A base substrate supports the sensor substrate. The sensor substrate and the base substrate each include a support supporting the displacement portion such that the displacement portion can be displaced and a plurality of electrically connecting portions electrically connected to the plurality of piezoresistance elements. The supports of the sensor and base substrates are joined to each other and the plurality of electrically connecting portions of the sensor and base substrates are joined to each other. Furthermore, in each of the sensor and base substrates, either the support or the plurality of electrically connecting portions or both extend to the periphery of the sensor substrate or the base substrate.

    摘要翻译: 传感器基板包括多个压阻元件。 每个压电元件的电阻根据通过压力接收单元施加的外部负载而移位的位移部分的位移量而变化。 基底支撑传感器基底。 传感器基板和基板各自包括支撑位移部分的支撑件,使得位移部分可以移位,并且多个电连接部分电连接到多个压阻元件。 传感器和基底基板的支撑件彼此接合,并且传感器和基底基板的多个电连接部分彼此接合。 此外,在每个传感器和基底基板中,支撑件或多个电连接部分或两者都延伸到传感器基板或基底基板的周边。