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公开(公告)号：US06615510B2
公开(公告)日：2003-09-09
申请号：US10230846
申请日：2002-08-28
申请人： Oliver David Jones , Kenneth C. McMahon , Jonathan E. Borkowski , Scott Petersen , Donald E. Stephens , Yassin Mehmandoust , James M. Olivas
发明人： Oliver David Jones , Kenneth C. McMahon , Jonathan E. Borkowski , Scott Petersen , Donald E. Stephens , Yassin Mehmandoust , James M. Olivas
IPC分类号： F26B300
CPC分类号： H01L21/67057 , H01L21/67034 , H01L21/67046 , H01L21/6776
摘要： Liquid is removed from wafers for drying a wafer that has been wet in a liquid bath. The wafer and the bath are separated at a controlled rate as the wafer is positioned in a gas-filled volume. The controlled rate is generally not less than the maximum rate at which a meniscus will form between the liquid bath and the surface of the wafer when the liquid bath and the wafer are separated. The gas-filled volume is defined by a hot chamber that continuously transfers thermal energy to the wafer in the gas-filled volume. Hot gas directed into the volume and across the wafer and out of the volume continuously transfers thermal energy to the wafer.
摘要翻译： 将液体从晶片上除去，以干燥已在液体浴中湿润的晶片。 当晶片定位在气体填充的体积中时，以受控的速率分离晶片和浴。 控制速率通常不低于当液浴和晶片分离时在液槽和晶片表面之间形成弯液面的最大速率。 充气体积由热室定义，其在气体填充体积中将热能连续传递到晶片。 引导到体积中并跨越晶片并且离开体积的热气体将热能连续传递到晶片。
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公开(公告)号：US06625901B1
公开(公告)日：2003-09-30
申请号：US09717163
申请日：2000-11-20
IPC分类号： F26B300
CPC分类号： H01L21/6776 , H01L21/67034 , H01L21/67046 , H01L21/67057 , Y10S134/902
摘要： A dryer for drying a substrate includes: a bath containing a fluid; a chamber; and an isopropyl alcohol delivery system supplying isopropyl alcohol vapor to the interface between the substrate and the fluid when the substrate is removed from the fluid of the bath into the chamber. The isopropyl alcohol vapor is supplied perpendicularly to a vertical axis of the substrate. The dryer further includes a chamber environment control system that supplies a gas into the chamber to dry the substrate and controls temperature and humidity in the chamber and a chamber heater attached to the chamber to transfer thermal energy into the chamber. A drying method includes: immersing a substrate into a fluid contained in a bath; removing the substrate from the fluid into a chamber; and supplying isopropyl alcohol vapor into an interface between the substrate and the fluid perpendicularly to a vertical axis of the substrate. The method further includes: supplying a gas into the chamber to dry the substrate and to control temperature and humidity in the chamber; and heating the chamber to transfer thermal energy into the chamber and the substrate.
摘要翻译： 用于干燥基材的干燥器包括：含有流体的浴; 一个房间 以及异丙醇递送系统，当衬底从浴液中移出到室中时，将异丙醇蒸汽提供到衬底和流体之间的界面。 异丙醇蒸气垂直于基板的垂直轴线供应。 干燥器还包括室环境控制系统，其将气体供应到室中以干燥基板并控制室中的温度和湿度，以及附接到室的室加热器以将热能传递到室中。 干燥方法包括：将基材浸入包含在浴中的流体中; 将衬底从流体移除到腔室中; 并且将异丙醇蒸气供应到垂直于衬底的垂直轴线的衬底和流体之间的界面中。 该方法还包括：将气体供应到室中以干燥基底并控制腔室中的温度和湿度; 并加热室以将热能传递到室和衬底中。
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公开(公告)号：US5490809A
公开(公告)日：1996-02-13
申请号：US234778
申请日：1994-04-28
摘要： In the texturing unit of this invention a data storage disk is gripped between a pair of opposed, counter-rotating cylindrical abrasive mandrels, which are covered with soft, porous pads. The frictional force between the disk and the pads raises the edge of the disk against a pair of driven rollers which impart a rotational motion to the disk. A texture pattern of uniform grooves, having controlled peak heights and valley depths, is formed simultaneously on both sides of the disk. A system for delivering an abrasive slurry to the pads includes a closed loop in which the slurry is recirculated and a dispense section of that loop, from which a blast of pressurized air periodically expels the slurry through applicators and onto the pads. The continuous recirculation of the slurry prevents settling.A unique feature is that the groove length may be controlled by adjusting the ratio between the rotational speeds of the disk and mandrels. The groove pattern is primarily circular but a radial component may be added by varying the position at which the pads contact the surfaces of the disk.
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公开(公告)号：US3941487A
公开(公告)日：1976-03-02
申请号：US516008
申请日：1974-10-18
CPC分类号： G01N21/314 , G01J2003/1213 , G01J2003/1226 , G01N2021/3166 , G01N21/03 , G01N2201/0231 , G01N2201/069
摘要： A light beam is passed through a cuvette, through which flows liquid to be analyzed optically for concentration of color reacted amino acids. The emergent beam is directed through a series of dichroic beam separators and pass band filters to produce three beams of substantially three different wavelengths. Photoelectric detectors produce electrical signals corresponding to each of the three wavelengths. Two of the signals are characteristic of the substance to be detected. The third is subtracted from the other two wavelength signals to produce a pair of output signals from which base line noise has been substantially eliminated.
摘要翻译： 将光束通过比色皿，通过该比色液体流动待分析的液体以浓缩着色反应的氨基酸。 出射光束被引导通过一系列二向色光束分离器和通带滤光器以产生三个基本上三个不同波长的光束。 光电探测器产生对应于三个波长中的每一个的电信号。 两个信号是待检测物质的特征。 从其他两个波长信号中减去第三个，以产生基本上消除了基线噪声的一对输出信号。
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公开(公告)号：US4926702A
公开(公告)日：1990-05-22
申请号：US98573
申请日：1987-09-18
CPC分类号： G01N30/24
摘要： A detector for detecting the presence of an electrically conductive sample solution in a sample injection metering valve by electrical sensing the leading edge of the sample solution, wherein the amount of sample solution in excess of the metered amount required to cause detection is minimized. A conductive probe is positioned on the valve body just downstream of the sample metering passage of the valve, the probe being electrically insulated from the valve body. The probe and valve body form electrodes which will detect the arrival of the leading edge of a conductive sample solution which completes a conductive circuit between the electrodes.
摘要翻译： 一种用于通过电检测样品溶液的前沿来检测样品注射计量阀中导电样品溶液的存在的检测器，其中使超过所需测量量的样品溶液的量最小化。 导电探针位于阀体正好位于阀的样品计量通道下游的位置，探头与阀体电绝缘。 探针和阀体形成电极，其将检测在电极之间完成导电电路的导电样品溶液的前缘的到达。
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6.发明授权Method and apparatus for regulating the temperature of an analytical instrument reactor 失效用于调节分析仪器反应器温度的方法和装置
公开(公告)号：US4518700A
公开(公告)日：1985-05-21
申请号：US327378
申请日：1981-12-04
申请人： Donald E. Stephens
发明人： Donald E. Stephens
CPC分类号： G01N30/30 , G05D23/1919 , G05D23/24 , G01N30/6047 , Y10T436/117497
摘要： A temperature control apparatus for a high temperature reactor in an analytical instrument of the type in which a development reagent is added to a flowing stream as part of the detection process. The temperature control apparatus utilizes solid state heat transfer means to transfer heat between a thermoconductive block to which is mounted the reactor and an air exchange heat sink which obtains heat from or disposes heat into ambient air as required. The control apparatus regulates the temperature of the reactor at a very rapid rate in the high temperature range of approximately 90.degree. C. to 150.degree. C. without the use of a separately contained heat exchange medium. The ability of the apparatus to cool the reactor rapidly eliminates the requirement to keep reactor contents at elevated pressures to prevent vaporization of the stream being analyzed.
摘要翻译： 作为检测过程的一部分，将开发试剂添加到流动流中的类型的分析仪器中的高温反应器的温度控制装置。 温度控制装置利用固态传热装置，在安装有反应器的导热块和根据需要从其获得热量或将热量置于环境空气中的空气交换散热器之间传递热量。 控制装置在约90℃至150℃的高温范围内以非常快的速度调节反应器的温度，而不使用单独包含的热交换介质。 设备冷却反应器的能力快速消除了将反应器内容物保持在升高的压力下以防止正在分析的物流蒸发的要求。
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公开(公告)号：US4438070A
公开(公告)日：1984-03-20
申请号：US327379
申请日：1981-12-04
CPC分类号： G01N30/30 , G01N30/6052 , G01N2030/303 , G01N2030/3084 , G01N30/6026
摘要： An elongate straight column for use as a reactor in an analytical instrument. The column contains inert packed material which provides for the necessary flow path length for a fluid stream entering the reactor. Fittings are incorporated onto the ends of the column in such a manner that their width is no larger than the width of the column. The column configuration for a reactor allows more versatility in the type of temperature regulator mechanisms used to heat and cool the reactor.
摘要翻译： 用作分析仪器中的反应器的细长直柱。 该柱包含惰性填充材料，其为进入反应器的流体流提供必要的流动路径长度。 将配件以这样的方式结合到柱的端部上，使得它们的宽度不大于柱的宽度。 反应器的色谱柱配置允许在用于加热和冷却反应器的温度调节器机构的类型中具有更多的通用性。
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公开(公告)号：US4372150A
公开(公告)日：1983-02-08
申请号：US156718
申请日：1980-06-05
CPC分类号： G01N30/32 , B01D15/163 , G01F3/00 , G01P13/0086 , G05D7/0676
摘要： A method and apparatus for monitoring flow rate through a conduit. A flow number indicative of the flow rate of a liquid through the conduit is compared with a preselected reference number. The actual liquid flow through the conduit provides a clocking signal which determines the time span during which a count signal, indicative of the intended flow rate into the conduit, is accumulated thereby providing the flow number.
摘要翻译： 一种用于监测通过导管的流速的方法和装置。 将指示通过导管的液体的流量的流量数字与预先选定的参考号进行比较。 通过导管的实际液体流量提供了时钟信号，其确定了累积来自指示进入导管的预期流量的计数信号的时间跨度，从而提供流量。
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9.发明授权
公开(公告)号：US4188464A
公开(公告)日：1980-02-12
申请号：US929589
申请日：1978-07-31
CPC分类号： C25B11/00 , C25B11/0478
摘要： A composite bipolar electrode structure is described. The structure includes an anode face comprised of a layer of a platinum group metal, metal oxide, or mixtures thereof, deposited on a layer of a valve metal, preferably titanium, a cathode face comprised of a cathode material, suitably a ferrous material, and an intermediate layer of conductive, porous material, such as graphite, positioned to be in electrical contact between the valve metal layer and the cathode material layer. The electrode is assembled by applying a thin layer of a polymeric material on the interfaces of the porous intermediate layers and pressing the components with sufficient pressure to force the polymeric material into the interstices of the intermediate layers.
摘要翻译： 描述了复合双极电极结构。 该结构包括阳极面，其由铂金属层，金属氧化物层或其混合物层组成，沉积在阀金属层，优选钛层上，阴极表面由合适的黑色金属材料构成，以及 诸如石墨的导电多孔材料的中间层被定位成在阀金属层和阴极材料层之间电接触。 通过在多孔中间层的界面上施加薄层的聚合材料并以足够的压力挤压组分以迫使聚合物材料进入中间层的间隙来组装电极。
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公开(公告)号：US3969217A
公开(公告)日：1976-07-13
申请号：US513009
申请日：1974-10-07
CPC分类号： C25B11/0484
摘要： An improved electrode, useful as an anode for the electrolysis of brines comprises an electrically conductive substrate having adhered thereto and extending over at least a portion of the surface thereof, a coating of mixed oxides comprising about 10 to about 80 mole percent indium oxide and about 10 to about 90 mole percent of a platinum group metal oxide. Up to about 20 mole percent of tin oxide may be incorporated in the coating to lower the electrical resistivity thereof.
摘要翻译： 可用作电解盐水的阳极的改进的电极包括粘附到其上并在其表面的至少一部分上延伸的导电基底，包含约10至约80摩尔％的氧化铟和约 10至约90摩尔％的铂族金属氧化物。 可以在涂层中加入高达约20摩尔％的氧化锡以降低其电阻率。
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