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公开(公告)号：US4804852A
公开(公告)日：1989-02-14
申请号：US32513
申请日：1987-03-30
申请人： Peter H. Rose , Marvin Farley , Lee Grodzins
发明人： Peter H. Rose , Marvin Farley , Lee Grodzins
IPC分类号： H01J37/317 , G21K5/02
CPC分类号： H01J37/3172
摘要： A magnetic scanning technique for sweeping an ion beam across an implantation target, such as a semiconductor wafer, by means of modulating the energy of a beam and directing it through an analyzer magnet, which effects a scanning motion of the beam of constant intensity, the wave form for the modulation being selected to take into account that the areal density of the ions in the scanned beam varies dependently with the amount of displacement of the beam from a reference point. An ion scan can be obtained in which the ions travel in parallel paths and enter the target at a constant desired angle throughout the scan. The technique is applicable to targets held stationary or rotated during implant. By employing predetermined modulation wave forms which are adapted to other parameters of the selected system, a desired scan distribution of ions can be obtained, for instance a uniform distribution in X and Y directions. As applied to a semiconductor wafer rotated on a disc past the ion beam, the technique solves the problem of compensating for the fact that the area of a ring on the spinning disc depends linearly on the radius of the ring. The technique makes use of the properties of ion beams in uniform magnetic fields to produce a radial dependence of the density of the ion beam on the wafer which precisely cancels the radial dependence of circumferential length as a function of radius. The magnetic scanning technique is well adapted for use with large wafers held on rotating discs and has advantages over the conventional techniques of either electrostatic or mechanical scanning. The technique is readily adapted to a variety of other wafer transport systems including rotating conveyors and linear transports.
摘要翻译： 一种磁扫描技术，用于通过调制光束的能量并引导其通过分析器磁体来影响离子束穿过诸如半导体晶片的注入靶，其实现恒定强度的束的扫描运动， 波形被选择以考虑扫描光束中的离子的面密度随着光束从参考点的位移量而变化。 可以获得离子扫描，其中离子在平行路径中行进并且在整个扫描期间以恒定的期望角度进入目标。 该技术适用于在植入期间保持静止或旋转的目标。 通过采用适合于所选系统的其它参数的预定调制波形，可以获得所需的离子扫描分布，例如在X和Y方向上的均匀分布。 当应用于在盘上经过离子束旋转的半导体晶片时，该技术解决了补偿旋转盘上的环的面积与环的半径成线性关系的问题。 该技术利用均匀磁场中的离子束的性质来产生离子束在晶片上的密度的径向依赖性，其精确地抵消作为半径的函数的圆周长度的径向依赖性。 磁扫描技术非常适合用于保持在旋转盘上的大晶片，并且具有优于静电或机械扫描的常规技术的优点。 该技术易于适用于各种其他晶片输送系统，包括旋转输送机和线性输送机。
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公开(公告)号：US20170245819A1
公开(公告)日：2017-08-31
申请号：US15444135
申请日：2017-02-27
申请人： Peter J. Rothschild , Lee Grodzins
发明人： Peter J. Rothschild , Lee Grodzins
CPC分类号： A61B6/505 , A61B6/06 , A61B6/4071 , A61B6/4078 , A61B6/4241 , A61B6/4258 , A61B6/4291 , A61B6/4429 , A61B6/4441 , A61B6/4476 , A61B6/482 , A61B6/485 , A61B6/5217 , A61B6/5282 , A61B6/542 , G01N23/087 , G01N2223/076 , G01N2223/0763 , G01N2223/1013 , G01N2223/1016 , H01J35/00
摘要： A system and corresponding method for detecting one or more high-atomic-number elements in a patient includes a Bremsstrahlung x-ray source that produces x-rays in an energy spectrum including an energy of at least 160 kiloelectron-volts (keV), a filter configured to absorb the x-rays in a region of the energy spectrum, and a collimator configured to receive the x-rays and output a collimated x-ray beam to be incident on a patient. The system and method can also include one or more collimated, energy-resolving x-ray detectors to detect fluorescent radiation emitted from the one or more high-atomic-number elements in the patient in response to the collimated x-ray beam incident on the patient. An alternative x-ray source can include a radioactive isotope. Scanning of the x-ray beam may also be performed. Embodiments enable practical clinical, in vivo measurements of lead in bone.
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公开(公告)号：US09291582B2
公开(公告)日：2016-03-22
申请号：US13616253
申请日：2012-09-14
摘要： An adjustable collimator for shaping a beam of particles, such as for purposes of inspecting contents of a container. The adjustable collimator has an obscuring element substantially opaque to passage of the particles in a propagation direction that is radial with respect to the axis of rotation of a ring of apertures. A gap in the obscuring element may be characterized by a length taken along a long dimension and a jaw spacing taken along narrow dimension, and at least one of the length of the gap and the jaw spacing is subject to adjustment, either manual or automatic. The adjustable collimator may be disposed either inside or outside the ring of apertures, and, in some embodiments, the jaw spacing may be a function of distance along the long dimension relative to an edge of the gap.
摘要翻译： 用于成形颗粒束的可调节准直器，例如用于检查容器内容物的目的。 可调节准直器具有基本上不透明的元件，该透明元件在相对于孔环的旋转轴线径向的传播方向上通过颗粒。 模糊元件中的间隙的特征在于沿着长度取长度，并且沿着狭窄的尺寸取得钳口间隔，并且间隙和钳口间隔的长度中的至少一个可以手动或自动地进行调节。 可调整的准直器可以设置在孔的环的内部或外部，并且在一些实施例中，钳口间隔可以是沿着间隔相对于边缘的长度的距离的函数。
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4.发明授权Localization of an element of interest by XRF analysis of different inspection volumes 有权通过XRF对不同检验量的分析来定位感兴趣的元素公开(公告)号：US08433034B2
公开(公告)日：2013-04-30
申请号：US13529471
申请日：2012-06-21
申请人： Lee Grodzins
发明人： Lee Grodzins
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： An apparatus and method are disclosed for localizing an element of interest in a sample by comparing XRF spectra acquired from at least two distinct but overlapping inspection volumes. The inspection volumes are varied by changing the geometry of the exciting x-ray and/or fluoresced x-ray beam(s), which may be accomplished by repositioning multi-apertured collimators. Comparison of the XRF spectra acquired from different inspection volumes provides an indication as to whether the element of interest (e.g., lead) is present in a coating layer, in the underlying bulk material, or in both.
摘要翻译： 公开了一种用于通过比较从至少两个不同但重叠的检查体积获取的XRF光谱来定位样品中感兴趣的元件的装置和方法。 通过改变激发的x射线和/或荧光X射线束的几何形状来改变检查体积，这可以通过重新定位多孔准直器来实现。 从不同检查体积获得的XRF光谱的比较提供关于感兴趣的元素（例如，铅）是否存在于涂层中，潜在的散装材料中或两者中的指示。
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公开(公告)号：US20130003936A1
公开(公告)日：2013-01-03
申请号：US13616253
申请日：2012-09-14
IPC分类号： G21K1/04
摘要： An adjustable collimator for shaping a beam of particles, such as for purposes of inspecting contents of a container. The adjustable collimator has an obscuring element substantially opaque to passage of the particles in a propagation direction that is radial with respect to the axis of rotation of a ring of apertures. A gap in the obscuring element may be characterized by a length taken along a long dimension and a jaw spacing taken along narrow dimension, and at least one of the length of the gap and the jaw spacing is subject to adjustment, either manual or automatic. The adjustable collimator may be disposed either inside or outside the ring of apertures, and, in some embodiments, the jaw spacing may be a function of distance along the long dimension relative to an edge of the gap.
摘要翻译： 用于成形颗粒束的可调节准直器，例如用于检查容器内容物的目的。 可调节准直器具有基本上不透明的元件，该透明元件在相对于孔环的旋转轴线径向的传播方向上通过颗粒。 模糊元件中的间隙的特征在于沿着长度取长度，并且沿着狭窄的尺寸取得钳口间隔，并且间隙和钳口间隔的长度中的至少一个可以手动或自动地进行调节。 可调整的准直器可以设置在孔的环的内部或外部，并且在一些实施例中，钳口间隔可以是沿着间隔相对于边缘的长度的距离的函数。
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公开(公告)号：US07671350B2
公开(公告)日：2010-03-02
申请号：US12300790
申请日：2007-05-25
申请人： Lee Grodzins
发明人： Lee Grodzins
IPC分类号： G01N23/223
CPC分类号： G01N23/223 , G01N2223/076
摘要： An instrument and method for measuring the elemental composition of a test material. The instrument has a source of penetrating radiation for irradiating an irradiated region of the test material, a detector for detecting fluorescence emission by the test material and for generating a detector signal, and a controller for converting the detector signal into a spectrum characterizing the composition of the test material. A platen of attenuating material extends outward from adjacent to, and surrounding, the irradiated surface of the test material. In certain embodiments, the thickness of the attenuating platen is tapered such as to decrease with increasing radial distance from the central irradiated region of the test material.
摘要翻译： 用于测量测试材料的元素组成的仪器和方法。 仪器具有用于照射测试材料的照射区域的穿透辐射源，用于检测测试材料的荧光发射和产生检测器信号的检测器，以及用于将检测器信号转换成表征组成的光谱的控制器 测试材料。 衰减材料的压板从测试材料的照射表面的相邻并且围绕其向外延伸。 在某些实施例中，衰减台板的厚度是锥形的，以便随着与测试材料的中心照射区域的径向距离的增加而减小。
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公开(公告)号：US20080192897A1
公开(公告)日：2008-08-14
申请号：US12029410
申请日：2008-02-11
申请人： Stanislaw Piorek , Mark Hamilton , Kenneth P. Martin , Pratheev Sreetharan , Michael E. Dugas , Paul Estabrooks , Lee Grodzins
发明人： Stanislaw Piorek , Mark Hamilton , Kenneth P. Martin , Pratheev Sreetharan , Michael E. Dugas , Paul Estabrooks , Lee Grodzins
CPC分类号： G01N23/223 , G01N2223/076
摘要： A hand-held, self-contained x-ray fluorescence (XRF) analyzer produces a small x-ray spot on a sample to interrogate the elemental composition of a sample region of millimeter-size characteristic dimension. The analyzer includes a collimator for aiming an x-ray beam toward a desired location on the sample and for determining the size of the spot produced on the sample. The analyzer may include a digital camera oriented toward the portion of the sample that is, or would be, interrogated by the x-ray spot to facilitate aiming the analyzer. The analyzer may generate a reticule in a displayed image to indicate the portion of the sample that is, or would be, illuminated by the x-ray beam. The analyzer may automatically annotate the image of the sample with text or graphics that contain information about the analyzed sample. The image may be stored in the hand-held analyzer or provided for external storage or display.
摘要翻译： 手持式独立的X射线荧光（XRF）分析仪在样品上产生小的x射线斑点，以询问毫米尺寸特征尺寸的样品区域的元素组成。 分析仪包括准直器，用于将X射线束朝向样品上的期望位置，并用于确定样品上产生的斑点的尺寸。 分析器可以包括朝向被X射线点或将要被X射线点询问以便于瞄准分析器的样本部分的数字照相机。 分析器可以在所显示的图像中生成网状物，以指示样本的X射线束照射的部分或者被X射线束照射的部分。 分析仪可以使用包含有关分析样本信息的文本或图形自动注释样品图像。 图像可以存储在手持式分析仪中或提供用于外部存储或显示。
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公开(公告)号：US07391508B2
公开(公告)日：2008-06-24
申请号：US11486439
申请日：2006-07-13
申请人： Lee Grodzins
发明人： Lee Grodzins
CPC分类号： G01N21/1702 , G01N21/67 , G01N21/718 , G01N21/94 , G01N29/0618 , G01N29/14 , G01N29/2418 , G01N33/20 , G01N2021/1706 , G01S5/26 , G01S5/30
摘要： Two or more high-frequency microphones are used to determine where an individual spark or other excitation beam strikes a sample in an optical emission spectroscopy (OES) instrument. The position of the spark can be correlated with the elemental composition of the material in the sample vaporized by the spark. The microphones are placed appropriately in air around a sparker of the instrument, or appropriately on the sample, or on both the sample and in the air. Arrival times of sound from the spark to the microphones, or a difference in the arrival times, yields information, from which the position of the spark relative to the microphones, and hence the absolute position of the spark, is deduced, such as by triangulation. Optionally or in addition, a signal that indicates a time when the spark is produced is correlated with one or more spectra detected by a spectrometer, so a spectrum that results from the vaporized sample can be distinguished from a spectrum that results from heated gas above the sample.
摘要翻译： 使用两个或更多个高频麦克风来确定单个火花或其他激发光束在光发射光谱仪（OES）仪器中射出的样品。 火花的位置可以与由火花蒸发的样品中的材料的元素组成相关。 将麦克风适当放置在仪器火花塞周围的空气中，或适当地放置在样品上，或样品和空气中。 从火花到麦克风的声音到达时间的到达时间，或到达时间的差异，产生了相对于麦克风的火花位置以及火花的绝对位置的信息，例如通过三角测量 。 可选地或另外地，指示产生火花的时间的信号与由光谱仪检测到的一个或多个光谱相关联，因此从气化样品产生的光谱可以与由上述 样品。
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公开(公告)号：US20050117683A1
公开(公告)日：2005-06-02
申请号：US10957770
申请日：2004-10-04
申请人： Andrey Mishin , Wade Sapp , Lee Grodzins , Peter Rothschild
发明人： Andrey Mishin , Wade Sapp , Lee Grodzins , Peter Rothschild
CPC分类号： G21K5/10 , G01N23/02 , G01N23/04 , G01N23/20 , G01T3/06 , G01V5/0041 , G01V5/0069 , G01V5/0091
摘要： An x-ray inspection system for identifying fissile material includes one or more sources of penetrating radiation that generate first, second, and third instantaneous spectra where the object is exposed to the second only if there is no penetration of the first and the object is exposed to the third only if there is no penetration of the second. Further, the sources of the second and the third spectra are pulsed. Consequently, ambient levels of radiation may be held below cabinet levels while identifying objects containing fissile material.
摘要翻译： 用于识别易裂变材料的X射线检查系统包括一个或多个穿透辐射源，其产生第一，第二和第三瞬时光谱，其中仅当第一和第（3）个物体不被穿透时物体暴露于第二瞬间光谱 只有在没有渗透的情况下，才能到第三名。 此外，第二和第三光谱的来源是脉冲的。 因此，在识别含有易裂变材料的物体时，辐射的环境水平可能会保持在机柜水平以下。
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10.发明授权公开(公告)号：US06421420B1
公开(公告)日：2002-07-16
申请号：US09599386
申请日：2000-06-22
申请人： Lee Grodzins
发明人： Lee Grodzins
IPC分类号： H01J3530
CPC分类号： G01V5/0016 , G01N23/20 , G21K1/025 , H01J35/14 , H01J35/30
摘要： An apparatus and method for generating electronically steerable beams of sequential penetrating radiation. Charged particles from a source are formed into a beam and accelerated to a target. Electromagnetic radiation generated by the target is emitted with an angular distribution which is a function of the target thickness and the energy of the particles. A beam of particles is produced by allowing the radiation to exit from an apparatus through a collimator proximal to the target. The direction of the beam is determined by the point of radiation production and the corresponding array of transmission regions of the collimator.
摘要翻译： 一种用于产生顺序穿透辐射的电子可操纵束的装置和方法。 来自源的带电粒子形成束并加速到靶。 由靶产生的电磁辐射以角度分布发射，角分布是目标厚度和粒子能量的函数。 通过允许辐射通过靠近靶的准直器离开设备来产生粒子束。 光束的方向由辐射产生点和准直器的相应的透射区域阵列决定。
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