摘要:
A wireless process device for use in an industrial process control or monitoring system comprising includes a power source configured to power the process device. Diagnostic circuitry is configured to diagnose operation of process device and provides a diagnostic output. Wireless communication circuitry transmits information over a wireless communication link.
摘要:
A field mountable dedicated process diagnostic device is used for diagnosing operation of an industrial control or monitoring system. An input is configured to receive at least one process signal related to operation of the industrial process. A memory contains diagnostic program instructions configured to implement a diagnostic algorithm using the process signal. The diagnostic algorithm is specific to the industrial process. A microprocessor performs the diagnostic program instructions and responsively diagnoses operation of the process based upon the process signal.
摘要:
A method of electrically isolating a MEMS device is provided. In one example, a piezo-resistive pressure sensor having an exposed silicon region undergoes a Local Oxidation of Silicon (LOCOS) process. An electrically insulating structure is created in the LOCOS process. The insulating structure has a rounded, or curved, interface with the piezo-resistive pressure sensor. The curved interface mitigates stresses associated with exposure to high temperatures and pressures. Additionally, the electrically insulating line may be patterned so that it has curved angles, further mitigating stress.
摘要:
A sensor array includes an array of nodes coupled to an optical transmission line. The nodes include a transducer, and encoder, and a transmitter. The transducer senses an environmental condition such as temperature and pressure. The encoder encodes readings from the transducer by means of a characteristic frequency to indicate which node generated the reading. The transmitter transmits the encoded reading to a decoder located near the opening of the oil well, or other blind hole. Power is transmitted to the nodes through the transmission line. A photo-electric converter at the node converts the optical power to electrical energy that is stored to power the node.
摘要:
An industrial process field device with improved power generation is provided. The process device can be a process variable transmitter, process actuator, or any other suitable field device. The field device includes a wireless transceiver that transceives information related to the process via a wireless medium. A power supply within the field device is couplable to a source of pressurized gas and generates motion within the power supply that is translated into electrical energy. This electrical energy is then used to operate the field device.
摘要:
A pressure transmitter having a pressure sensor includes a first half cell and a second half cell. The first half cell includes a first recess formed therein filled with brittle material and having a first sensor surface formed thereon. The second half cell is coupled to the first half cell and includes a second recess formed therein which opposes the first recess and is filled with brittle material having a second sensor surface formed thereon. A diaphragm is positioned between the first and second sensor surfaces. The diaphragm deflects in response to applied pressure. The first and second sensor surfaces comprise heated surfaces.
摘要:
A pH sensor is provided. The pH sensor comprises a substrate and an ion sensitive field effect transistor (ISFET) die comprising an ion sensing part that responds to pH, wherein the ISFET die is located over the substrate. The pH sensor also comprises a protective layer formed over at least a portion of an outer surface of the ISFET die and at least a portion of the substrate. Further, the pH sensor comprises a cover member mechanically coupled to the protective layer, wherein the cover member houses the ISFET die and the substrate, and wherein the cover member defines an opening proximate to the ion sensing part.
摘要:
System and methods for silicon on insulator MEMS pressure sensors are provided. In one embodiment, a method comprises: applying a doping source to a silicon-on-insulator (SOI) silicon wafer having a sensor layer and an insulating layer comprising SiO2 material; doping the silicon wafer with Boron atoms from the doping source while controlling an injection energy of the doping to achieve a top-heavy ion penetration profile; and applying a heat source to diffuse the Boron atoms throughout the sensor layer of the SOI silicon wafer.
摘要:
A pressure sensor device for a modular pressure sensor package is provided, comprising a substrate having a pressure port that extends through the substrate from a first side of the substrate to a second side of the substrate. A pressure sensor die is attached to the first side of the substrate, forming a seal over the pressure port on the first side of the substrate. A cover is attached to the first side of the substrate over the pressure sensor die, forming a sealed cavity wherein the pressure sensor die is located within the cavity. The device also comprises a plurality of electrical connectors mounted to the substrate external to the cavity, the plurality of electrical connectors electrically coupled to the pressure sensor die. Further, the substrate includes at least one mounting element configured to secure a pressure port interface to the second side of the substrate in a position around the pressure port.
摘要:
A sensing apparatus for determining the pressure of a fluid includes first and second support members. The first and second support members are configured to define at least one sealed chamber. A flexible diaphragm is disposed between the first and second support members. The diaphragm includes first and second opposing surfaces. The first opposing surface is in fluid communication with a first fluid-flow circuit, and the second opposing surface is in fluid communication with a second fluid-flow circuit. A first electronic circuit is disposed within the at least one chamber and coupled to the diaphragm for sensing a first differential pressure associated with the first and second flow circuits. The first electronic circuit is configured to produce at least one electrical signal proportional to a magnitude of the first differential pressure.