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公开(公告)号：US20170158492A1
公开(公告)日：2017-06-08
申请号：US15355798
申请日：2016-11-18
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Frank Reichenbach , Jochen Reinmuth , Julia Amthor
CPC classification number: B81B7/0051 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81C1/00325 , B81C2201/0167 , B81C2203/0145
Abstract: A method is described for manufacturing a micromechanical component including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. An access opening connecting the first cavity to surroundings of the micromechanical component is formed in the substrate or cap. The first pressure and/or the first chemical composition is adjusted in the first cavity. The access opening is sealed by introducing energy or heat into an absorbing part of the substrate or cap using a laser. A layer is deposited or grown on a surface of the substrate or the cap in the area of the access opening to produce a second mechanical stress, which counteracts a first mechanical stress occurring in the case of sealed access opening.
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公开(公告)号：US10183861B2
公开(公告)日：2019-01-22
申请号：US15368740
申请日：2016-12-05
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Frank Reichenbach , Jochen Reinmuth , Julia Amthor
IPC: H01L21/00 , B81C1/00 , B81B7/04 , G01C19/5783 , G01P15/08 , B81B7/02 , G01C19/5769
Abstract: A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate, the cap, together with the substrate, enclosing a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. An access opening connecting the first cavity to surroundings of the micromechanical component is formed in the substrate or in the cap. The first pressure and/or the first chemical composition is adjusted in the first cavity. The access opening is sealed by introducing energy or heat into an absorbing part of the substrate or of the cap with the aid of a laser. A layer for protecting the sealed access opening is applied to or deposited on or grown on a material area, which transitions into a liquid aggregate state and then transitions into a solid aggregate state and seals the access opening.
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公开(公告)号：US10029911B2
公开(公告)日：2018-07-24
申请号：US15401808
申请日：2017-01-09
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Frank Reichenbach , Jochen Reinmuth , Julia Amthor
Abstract: A method for manufacturing a micromechanical component is provided including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity, the cap together with the substrate enclosing a second cavity, a second pressure prevailing and a second gas mixture having a second chemical composition being enclosed in the second cavity. A recess situated essentially between the first cavity and the second cavity is formed for diverting at least one first particle type of the first gas mixture and/or at least one second particle type of the second gas mixture.
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公开(公告)号：US20170158489A1
公开(公告)日：2017-06-08
申请号：US15368951
申请日：2016-12-05
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Frank Reichenbach , Jochen Reinmuth , Julia Amthor
CPC classification number: B81B3/0072 , B81B7/0038 , B81B7/02 , B81B2201/0235 , B81B2203/0315 , B81C1/00666 , B81C2201/017 , B81C2203/0109 , B81C2203/0145
Abstract: A method for manufacturing a micromechanical component including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. An access opening connecting the first cavity to surroundings of the micromechanical component is formed in the substrate or in the cap. The first pressure and/or the first chemical composition is adjusted. The access opening is sealed by introducing energy or heat into an absorbing part of the substrate or the cap with the aid of a laser. A getter material is deposited on or grown on a surface of the substrate facing the first cavity and/or a surface of the cap facing the first cavity for further adjustment of the first pressure and/or of the first chemical composition.
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公开(公告)号：US10017375B2
公开(公告)日：2018-07-10
申请号：US15291142
申请日：2016-10-12
Applicant: Robert Bosch GmbH
Inventor： Frank Reichenbach , Till Schade , Jochen Reinmuth , Philip Kappe , Alexander Ilin , Mawuli Ametowobla , Julia Amthor
CPC classification number: B81B7/0035 , B81B2201/0235 , B81C1/00182 , B81C1/00277 , B81C1/00293 , B81C1/00325 , B81C1/00666 , B81C2201/0132 , B81C2201/0143 , B81C2203/0109 , B81C2203/0145
Abstract: A method is provided for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity. An access opening, connecting the first cavity to surroundings of the micromechanical component, is formed in the substrate or in the cap. The first pressure and/or the first chemical composition are adjusted in the first cavity. The access opening is sealed by introducing energy and heat into an absorbing part of the substrate or the cap with the aid of a laser. A recess is formed in a surface of the substrate or of the cap facing away from the first cavity in the area of the access opening for reducing local stresses occurring at a sealed access opening.
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Patent Agency Ranking
公开(公告)号：US20170203956A1
公开(公告)日：2017-07-20
申请号：US15401259
申请日：2017-01-09
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Frank Reichenbach , Jochen Reinmuth , Julia Amthor
CPC classification number: B81B7/0038 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81B2203/0315 , B81C1/00285 , B81C1/00293 , B81C2201/0177 , B81C2203/0145
Abstract: A method is provided for manufacturing a micromechanical component including a substrate and including a cap, which is connected to the substrate and, together with the substrate, encloses a first cavity, a first pressure prevailing and a first gas mixture having a first chemical composition being enclosed in the first cavity. A first crystalline layer or a first amorphous layer or a first nanocrystalline layer or a first polycrystalline layer is deposited on or grown on a surface of the substrate or of the cap. A recess is introduced into the substrate or into the cap for accommodating the first crystalline layer or the first amorphous layer or the first nanocrystalline layer or the first polycrystalline layer.
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公开(公告)号：US20170158495A1
公开(公告)日：2017-06-08
申请号：US15369038
申请日：2016-12-05
Applicant: Robert Bosch GmbH
Inventor： Achim Breitling , Frank Reichenbach , Jens Frey , Jochen Reinmuth , Julia Amthor
CPC classification number: B81C1/00277 , B81B7/0035 , B81B2201/0235 , B81B2201/0242 , B81C1/00293 , B81C2203/0145 , G01P15/0802
Abstract: A method for manufacturing a micromechanical component including a substrate, and a cap connected to the substrate, the cap, together with the substrate, encloses a cavity, a pressure prevailing and a gas mixture having a first chemical composition being enclosed in the cavity. An access opening connecting the cavity to surroundings of the micromechanical component is formed in the substrate or in the cap. The pressure and/or the chemical composition is adjusted in the cavity. The access opening is sealed by introducing energy or heat into an absorbing part of the substrate or the cap with the aid of a laser. A first crystalline, amorphous, nanocrystalline, or polycrystalline layer is deposited or grown on a surface of the substrate or of the cap, and/or a substrate including a second crystalline, amorphous, nanocrystalline, and/or polycrystalline layer, and/or a cap including the second crystalline, amorphous, nanocrystalline, and/or polycrystalline layer is provided.
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公开(公告)号：US20170113920A1
公开(公告)日：2017-04-27
申请号：US15299600
申请日：2016-10-21
Applicant: Robert Bosch GmbH
Inventor： Frank Reichenbach , Jochen Reinmuth , Jens Frey , Julia Amthor
CPC classification number: B81B7/0048 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81C1/00293 , B81C1/00325 , B81C2201/013 , B81C2203/0145
Abstract: A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity. An access opening, connecting the first cavity to surroundings of the micromechanical component, is formed in the substrate or the cap. The first pressure and/or the first chemical composition is adjusted in the first cavity. The access opening is sealed by introducing energy and heat into an absorbing part of the substrate or cap with the aid of a laser. A recess is formed in a surface of the substrate or of the cap facing away from the first cavity in the area of the access opening for accommodating a material area of the substrate or the cap converted into a liquid aggregate state.
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公开(公告)号：US10000375B2
公开(公告)日：2018-06-19
申请号：US15299600
申请日：2016-10-21
Applicant: Robert Bosch GmbH
Inventor： Frank Reichenbach , Jochen Reinmuth , Jens Frey , Julia Amthor
CPC classification number: B81B7/0048 , B81B7/02 , B81B2201/0235 , B81B2201/0242 , B81C1/00293 , B81C1/00325 , B81C2201/013 , B81C2203/0145
Abstract: A method for manufacturing a micromechanical component including a substrate and a cap connected to the substrate and together with the substrate enclosing a first cavity, a first pressure prevailing and a first gas mixture with a first chemical composition being enclosed in the first cavity. An access opening, connecting the first cavity to surroundings of the micromechanical component, is formed in the substrate or the cap. The first pressure and/or the first chemical composition is adjusted in the first cavity. The access opening is sealed by introducing energy and heat into an absorbing part of the substrate or cap with the aid of a laser. A recess is formed in a surface of the substrate or of the cap facing away from the first cavity in the area of the access opening for accommodating a material area of the substrate or the cap converted into a liquid aggregate state.
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公开(公告)号：US09927497B2
公开(公告)日：2018-03-27
申请号：US15120951
申请日：2014-12-22
Applicant: Robert Bosch GmbH
Inventor： Frank Reichenbach , Sevki Gencol , Rainer Eckstein , Christian Patak , Achim Breitling , Arne Dannenberg , Frank Schatz
CPC classification number: G01R33/04 , G01R33/0011 , G01R33/0052
Abstract: A sensor apparatus having at least one magnet core, on at least one carrier surface, which encompasses at least one soft magnetic material and for which a respective longitudinal center plane, which is oriented perpendicularly to the carrier surface and divides the respective magnet core into two halves having an identical mass, is definable, at least one coil being on, around, and/or adjacent to the at least one magnet core, the at least one magnet core having in its interior sub-regions by which an initiation of a magnetization reversal of the respective magnet core is targetedly locally controllable since a drive energy to be applied for propagation of a magnetic domain wall is elevated. Also described is a manufacturing method for a sensor apparatus having at least one magnet core, and a method for ascertaining a field strength of a magnetic field in at least one spatial direction.
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