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    APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS
    6.
    发明申请
    APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS 审中-公开
    制造显示装置的装置和制造显示装置的方法

    公开(公告)号：US20160226031A1

    公开(公告)日：2016-08-04

    申请号：US14929159

    申请日：2015-10-30

    申请人： Samsung Display Co., Ltd.

    发明人： Choelmin Jang ,  Dongkyun Ko ,  Inkyo Kim ,  Sukwon Jung ,  Nam Ha ,  Myungsoo Huh

    IPC分类号： H01L51/56 ,  H01L51/00 ,  H01L51/52

    CPC分类号： H01L51/56 ,  C23C16/4412 ,  C23C16/45551 ,  C23C16/45563 ,  C23C16/54 ,  H01L51/0097 ,  H01L51/5253 ,  H01L51/5256

    摘要： An apparatus and method for manufacturing a display apparatus includes: a chamber; a first nozzle unit at the chamber, the first nozzle unit configured to deposit an organic layer or an inorganic layer on a substrate; a second nozzle unit at the chamber, the second nozzle unit configured to deposit the organic layer or the inorganic layer on a substrate and the second nozzle unit being linearly aligned with the first nozzle unit in a first direction; and an injection nozzle unit between the first nozzle unit and the second nozzle unit, the injection nozzle unit configured to inject a first gas in the chamber toward the substrate.

    摘要翻译： 一种显示装置的制造装置和方法，包括：室; 在所述腔室处的第一喷嘴单元，所述第一喷嘴单元被配置为在基板上沉积有机层或无机层; 所述第二喷嘴单元被配置为将所述有机层或所述无机层沉积在基板上，并且所述第二喷嘴单元在所述第一方向上与所述第一喷嘴单元线性对准; 以及在所述第一喷嘴单元和所述第二喷嘴单元之间的喷嘴单元，所述喷射喷嘴单元被配置为将所述室中的第一气体朝向所述基板喷射。

    Apparatus and method of manufacturing display apparatus
    7.
    发明授权
    Apparatus and method of manufacturing display apparatus 有权

    公开(公告)号：US11186908B2

    公开(公告)日：2021-11-30

    申请号：US16160757

    申请日：2018-10-15

    申请人： Samsung Display Co., Ltd.

    发明人： Seokjin Ko ,  Myungsoo Huh ,  Sukwon Jung ,  Dongkyun Ko ,  Inkyo Kim

    IPC分类号： C23C16/44 ,  C23C16/46 ,  H01L21/00 ,  H01J37/32 ,  C23C16/455

    摘要： An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.

    Apparatus and method of manufacturing display apparatus
    9.
    发明授权
    Apparatus and method of manufacturing display apparatus 有权

    公开(公告)号：US10041173B2

    公开(公告)日：2018-08-07

    申请号：US14793562

    申请日：2015-07-07

    申请人： Samsung Display Co., Ltd.

    发明人： Myungsoo Huh ,  Dongkyun Ko ,  Choelmin Jang ,  Sungchul Kim ,  Inkyo Kim ,  Cheollae Roh

    IPC分类号： C23C16/50 ,  C23C16/54 ,  H01J37/32 ,  C23C16/455 ,  H01L51/52

    摘要： An apparatus and a method of manufacturing a display apparatus are disclosed. In one aspect, the apparatus includes a chamber and an inorganic layer forming nozzle unit formed in the chamber and configured to form at least one inorganic layer. The apparatus also includes an organic layer forming nozzle unit formed in the chamber and configured to form at least one organic layer, wherein the organic layer forming nozzle unit is arranged substantially in line with the inorganic layer forming nozzle unit. The apparatus further includes a separating nozzle unit formed between the inorganic layer forming nozzle unit and the organic layer forming nozzle unit and configured to spray an inert gas.

    APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS
    10.
    发明申请
    APPARATUS AND METHOD OF MANUFACTURING DISPLAY APPARATUS 审中-公开

    公开(公告)号：US20190211445A1

    公开(公告)日：2019-07-11

    申请号：US16160757

    申请日：2018-10-15

    申请人： Samsung Display Co., Ltd.

    发明人： Seokjin Ko ,  Myungsoo Huh ,  Sukwon Jung ,  Dongkyun Ko ,  Inkyo Kim

    IPC分类号： C23C16/44 ,  C23C16/46

    CPC分类号： C23C16/4405 ,  C23C16/46

    摘要： An apparatus for manufacturing a display apparatus includes: a chamber; a head unit configured to supply a process gas and a cleaning gas to an inside of the chamber; which has a storage space where the process gas or the cleaning gas is temporarily stored, and including a nozzle connected to the storage space and configured to guide the process gas or the cleaning gas from the storage space to the inside of the chamber; a susceptor unit arranged to face the head unit and on which a substrate is placeable; a cleaning gas supply unit connected to the head unit and configured to plasmarize the cleaning gas and supply the cleaning gas that is plasmarized to the head unit; and a cleaning gas ejection unit connected to the cleaning gas supply unit and configured to supply the cleaning gas to at least two portions of the storage space.